Three dimensional metal insulator metal capacitor structure
The present disclosure relates to a semiconductor device and a manufacturing method, and more particularly to a 3D metal insulator metal (MIM) capacitor structure with an increased capacitance per unit area in a semiconductor structure. The MIM structure includes a substrate, an oxide layer formed over the substrate, and a first metal layer formed over the oxide layer. The first metal layer includes a plurality of mandrels formed on a surface of the first metal layer. The MIM structure also includes a dielectric layer formed over the first metal layer and the plurality of mandrels, a second metal layer formed over on the dielectric layer, and one or more interconnect structures electrically connected to the first and second metal layers.
1. A metal insulator metal (MIM) structure, comprising:
a substrate;
an oxide layer formed over the substrate;
a first metal layer formed over the oxide layer, wherein the first metal layer comprises a plurality of mandrels formed on a surface of the first metal layer;
a dielectric layer formed over the first metal layer and the plurality of mandrels;
a second metal layer formed over on the dielectric layer;
a capping layer formed over the first metal layer, the dielectric layer, and the second metal layer, wherein the dielectric layer is in contact with the plurality of mandrels and the capping layer; and
one or more interconnect structures electrically connected to the first and second metal layers.
2. The MIM structure of claim 1 , wherein the first metal layer comprises one or more metal sublayers.
3. The MIM structure of claim 1 , wherein the first metal layer comprises titanium nitride.
4. The MIM structure of claim 1 , wherein a height of the plurality of mandrels ranges from about 10 nm to about 300 nm.
5. The MIM structure of claim 1 , wherein a space between the plurality of mandrels ranges from about 10 nm to about 100 nm.
6. The MIM structure of claim 1 , wherein a pitch between the plurality of mandrels ranges from about 38 nm to about 100 nm.
7. The MIM structure of claim 1 , wherein the second metal layer is formed over a portion of the plurality of mandrels.
8. The MIM structure of claim 1 , further comprising an other dielectric layer surrounding the one or more interconnect structures.
9. The MIM structure of claim 1 , wherein a space between the plurality of mandrels is different from an other space between the plurality of mandrels.
10. The MIM structure of claim 1 , wherein one of the plurality of mandrels intersects with an other one of the plurality of mandrels from a top-down view.
11. The MIM structure of claim 1 , wherein the oxide layer comprises another plurality of mandrels.
12. The MIM structure of claim 1 , wherein the plurality f mandrels have an aspect ratio of a height to a width between about 1 and about 30.
13. A system, comprising:
a redistribution layer comprising solder bumps; and
an interposer structure electrically connected to the redistribution layer and comprising:
a capacitor structure comprising:
a substrate;
an oxide layer formed over the substrate;
a first metal layer formed over the oxide layer, wherein the first metal layer comprises a plurality of mandrels on a surface of the first metal layer;
a dielectric layer formed over the first metal layer and the plurality of the mandrels;
a second metal layer formed over the dielectric layer;
a first interconnect structure electrically connected to the first metal layer, wherein the first interconnect structure is in contact with the plurality of mandrels; and
a second interconnect structure electrically connected to the second metal layer;
one or more dies over the substrate; and
an other dielectric layer surrounding the one or more dies and the one or more interconnect structures of the capacitor structure.
14. The system of claim 13 , wherein the second metal layer is formed over a portion of the plurality of mandrels.
15. The system of claim 13 , wherein an aspect ratio of the plurality of mandrels ranges from about 1 to about 30, the aspect ratio being a ratio of a height to a width of the plurality of mandrels.
16. A semiconductor structure, comprising:
a capacitor structure formed over a substrate, wherein the capacitor structure comprises:
a first metal layer on an oxide layer and comprising a first plurality of mandrels on a surface of the first metal layer;
a dielectric layer on the first metal layer and the first plurality of the mandrels; and
a second metal layer on the dielectric layer, wherein the second metal layer comprises a second plurality of mandrels between the first plurality of mandrels;
a capping layer formed over the capacitor structure and in contact with the second plurality of mandrels;
a first interconnect structure electrically connected to the first metal layer;
a second interconnect structure electrically connected to the second metal layer; and
an intermetallic dielectric layer formed over the capacitor structure and the capping layer, wherein the intermetallic dielectric separates the first and second interconnect structures.
17. The semiconductor structure of claim 16 , wherein the second metal layer is formed over a portion of the first plurality of mandrels.
18. The semiconductor structure of claim 16 , wherein an aspect ratio of the first plurality of mandrels ranges from about 1 to about 30, the aspect ratio being a ratio of a height to a width of the first plurality of mandrels.
19. The semiconductor structure of claim 16 , wherein the capping layer comprises a first capping sublayer on the second metal layer, a second capping sublayer on the first capping sublayer and the dielectric layer, and a third capping sublayer on the second capping sublayer.
20. The semiconductor structure of claim 16 , wherein the dielectric layer comprises a high-k dielectric material.