X-ray transmission inspection apparatus and X-ray transmission inspection method
An X-ray transmission inspection apparatus includes an X-ray source for irradiating a sample with X-rays, a two-dimensional sensor for detecting transmission X-rays passing through the sample, a sample moving mechanism for moving the sample, a calculation unit for processing an image of the transmission X-rays detected by the two-dimensional sensor, and a display unit for displaying a cross-sectional image. When V 1 is a speed at which the sample moves, F is a frame rate of the two-dimensional sensor, A is a sample pitch of the two-dimensional sensor, and LS is a distance between the X-ray source and the two-dimensional sensor, the calculation unit creates a cross-sectional image taken at a distance L from the X-ray source by adding the images of the pixels positioned at an interval of [(LS×V 2 )/(L×F×A)] in a direction in which the sample moves.
1. An X-ray transmission inspection apparatus comprising:
an X-ray source configured to irradiate a sample with X-rays;
a two-dimensional sensor including a detection surface installed on an opposite side of the X-ray source with the sample placed therebetween and configured to detect X-rays transmitted through the sample;
a sample moving mechanism capable of moving the sample at a predetermined speed in a predetermined direction parallel to the detection surface of the two-dimensional sensor;
a calculation unit configured to process an image of the X-rays detected by the two-dimensional sensor; and
a display unit capable of displaying a cross-sectional image based on the image of the X-rays processed by the calculation unit,
wherein the two-dimensional sensor includes a plurality of pixels that are image sensing devices arranged in a lattice pattern and is capable of reading images of the X-rays detected by the plurality of pixels at once at a predetermined frame rate, and
wherein the calculation unit creates a cross-sectional image of the sample at a position having a distance of L from the X-ray source by performing an addition process of continuously adding the images of the X-rays at an interval of [(LS×V 1 )/(L×F×A)] along the predetermined direction, where V 1 is the predetermined speed at which the sample moves, F is the predetermined frame rate, A is a pixel pitch of the two-dimensional sensor, and LS is a distance between the X-ray source and the two-dimensional sensor.
2. The X-ray transmission inspection apparatus according to claim 1 , wherein the calculation unit is configured to:
create a first cross-sectional image of the sample at a position having a distance of L 1 front the X-ray source and a second cross-sectional image of the sample at a position having a distance of L 2 from the X-ray source,
display the first cross-sectional image and the second cross-sectional image on the display unit,
perform a correction process of making a display size of the first cross-sectional image L 1 /L 2 times the first cross-sectional image, and
display the first cross-sectional image at the display size and the second cross-sectional image on the display unit.
3. The X-ray transmission inspection apparatus according to claim 2 , further comprising:
a sample rotating mechanism capable of changing an orientation of the sample with respect to the X-ray source,
wherein the calculation unit creates a plurality of cross-sectional images of the sample from the X-rays transmitted through the sample from different directions by changing directions of the sample by the sample rotating mechanism.
4. The X-ray transmission inspection apparatus according to claim 1 , further comprising:
a sample rotating mechanism capable of changing an orientation of the sample with respect to the X-ray source,
wherein the calculation unit creates a plurality of cross-sectional images of the sample from the X-rays transmitted through the sample from different directions by changing directions of the sample by the sample rotating mechanism.
5. An X-ray transmission inspection method comprising:
irradiating a sample with X-rays using an X-ray source;
detecting the X-rays transmitted through the sample using a two-dimensional sensor including a detection surface installed on an opposite side of the X-ray source with the sample placed between the X-ray source and the two-dimensional sensor;
moving the sample at a predetermined speed in a predetermined direction parallel to the detection surface of the two-dimensional sensor;
processing an image of the X-rays detected by the two-dimensional sensor by a calculation unit; and
displaying a cross-sectional image based on the image of the X-rays processed by the calculation unit on a display unit,
wherein the two-dimensional sensor includes a plurality of pixels that are image sensing devices arranged in a lattice pattern and is capable of reading images of the X-rays detected by the plurality of pixels at once at a predetermined frame rate, and
wherein the processing an image of the X-rays detected by the two-dimensional sensor comprises creating a cross-sectional image of the sample taken at a position having a distance of L from the X-ray source by performing an addition process of continuously adding the images of the X-rays at an interval of [(LS×V 1 )/(L×F×A)] in the predetermined direction, where V 1 is the predetermined speed, F is the predetermined frame rate, A is a pixel pitch of the two-dimensional sensor, and LS is a distance between the X-ray source and the two-dimensional sensor.
6. The X-ray transmission inspection method according to claim 5 , wherein the processing an image of the X-rays detected by the two-dimensional sensor comprises:
creating a first cross-sectional image of the sample at a position having a distance of L 1 from the X-ray source and a second cross-sectional image of the sample at a position having a distance of L 2 from the X-ray source on the display unit,
performing a correction process of making a display size of the first cross-sectional image of the sample L 1 /L 2 times the first cross-sectional image, and
displaying the first cross-sectional image at the display size and the second cross-sectional image on the display unit.
7. The X-ray transmission inspection method according to claim 6 , wherein the processing an image of the X-rays detected by the two-dimensional sensor comprises:
creating a plurality of cross-sectional images of the sample from the X-rays transmitted through the sample from different directions by changing an orientation of the sample with respect to the X-ray source.
8. The X-ray transmission inspection method according to claim 5 , wherein the processing an image of the X-rays detected by the two-dimensional sensor comprises:
creating a plurality of cross-sectional images of the sample from the X-rays transmitted through the sample from different directions by changing an orientation of the sample with respect to the X-ray source.