Image pickup element, method of manufacturing image pickup element, and electronic apparatus
An image pickup element includes: a semiconductor substrate including a photoelectric conversion section for each pixel; a pixel separation groove provided in the semiconductor substrate; and a fixed charge film provided on a light-receiving surface side of the semiconductor substrate, wherein the fixed charge film includes a first insulating film and a second insulating film, the first insulating film being provided contiguously from the light-receiving surface to a wall surface and a bottom surface of the pixel separation groove, and the second insulating film being provided on a part of the first insulating film, the part corresponding to at least the light-receiving surface.
1. An imaging device, comprising:
a first photoelectric conversion region disposed in a substrate;
a second photoelectric conversion region adjacent to the first photoelectric conversion region in the substrate;
a trench disposed between the first photoelectric conversion region and the second photoelectric conversion region;
a first film including silicon oxide disposed in the trench and directly contacting a wall surface of the trench;
a second film including aluminum oxide disposed in the trench and above the first film;
a third film including hafnium oxide disposed in the trench and above the second film; and
a fourth film including tantalum oxide disposed in the trench and above the third film.
2. The imaging device according to claim 1 , further comprising a fifth film including silicon oxide disposed in the trench and above the fourth film.
3. The imaging device according to claim 1 , wherein the first film is further disposed above a light receiving surface of the substrate.
4. The imaging device according to claim 3 , wherein the second film is disposed above the light receiving surface of the substrate.
5. The imaging device according to claim 4 , wherein the third film is disposed above the light receiving surface of the substrate.
6. The imaging device according to claim 5 , wherein the fourth film is disposed above the light receiving surface of the substrate.
7. The imaging device according to claim 6 , further comprising a fifth film including silicon oxide disposed in the trench and above the fourth film, wherein the fifth film is disposed above the light receiving surface of the substrate.
8. The imaging device according to claim 1 , wherein the fourth film has a first thickness disposed above a light receiving surface of the substrate and a second thickness disposed in the trench, wherein the first thickness is larger than the second thickness.
9. The imaging device according to claim 2 , further comprising a light shielding film disposed above the fifth film at a light receiving surface of the substrate.
10. The imaging device according to claim 9 , wherein the light shielding film is disposed corresponding to the trench.
11. The imaging device according to claim 9 , wherein the light shielding film includes tungsten or aluminum.
12. The imaging device according to claim 1 , wherein a depth of the trench is greater than or equal to 0.25 μm and less than or equal to 5 μm.
13. The imaging device according to claim 1 , wherein a width of the trench is greater than or equal to 100 nm and less than or equal to 1000 nm.
14. The imaging device according to claim 1 , wherein a thickness of the second film is greater than or equal to 1 nm and less than or equal to 25 nm.
15. The imaging device according to claim 1 , wherein a thickness of the third film is greater than or equal to 1 nm and less than or equal to 25 nm.
16. The imaging device according to claim 1 , wherein an overall thickness of the second film and the third film is greater than or equal to 2 nm and less than or equal to 100 nm.
17. The imaging device according to claim 1 , wherein a thickness of the fourth film is greater than or equal to 10 nm and less than or equal to 80 nm.
18. The imaging device according to claim 1 , wherein a thickness of the first film is about 1 nm.
19. The imaging device according to claim 1 , wherein one or more of the second film, the third film, or the fourth film include silicon.
20. An electric apparatus provided with an imaging device according to claim 1 .