IP Library Granted Patent US 11,069,592
Granted Patent B2
US 11,069,592 · App. 16/582,418 · Granted Jul 20, 2021

Semiconductor packages including a lower structure, an upper structure on the lower structure, and a connection pattern between the lower structure and the upper structure

Inventors: Ji Hwang Kim (Cheonan-si, KR); Jong Bo Shim (Asan-si, KR); Jang Woo Lee (Seoul, KR); Yung Cheol Kong (Cheonan-si, KR); Young Hoon Hyun (Seoul, KR)
Assignee: Samsung Electronics Co., Ltd.
H01L23/367H01L23/3157H01L24/08H01L24/48H01L2224/02371
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Quick Facts
Patent No.
US 11,069,592
App. No.
16/582,418
Granted
Jul 20, 2021
Kind
B2
Abstract

A semiconductor includes a lower structure, an upper structure on the lower structure, and a connection pattern between the lower structure and the upper structure. The connection pattern is configured to electrically connect the lower structure and the upper structure to each other. The lower structure includes a lower base and a first lower chip on the lower base. The first lower chip includes a chip bonding pad, a pad structure, and a heat sink structure. The connection pattern is connected to the upper structure and extends away from the upper structure to be connected to the pad structure. The pad structure has a thickness greater than a thickness of the chip bonding pad. At least a portion of the heat sink structure is at a same height level as at least a portion of the pad structure.

Claims (84)

1. A semiconductor package, comprising:

a lower structure, the lower structure including a lower base and a first lower chip on the lower base, the first lower chip including a chip bonding pad, a pad structure, and a heat sink structure, the pad structure having a thickness greater than a thickness of the chip bonding pad, wherein at least a portion of the heat sink structure is at a same height level as at least a portion of the pad structure;

an upper structure on the lower structure; and

a connection pattern between the lower structure and the upper structure, the connection pattern configured to electrically connect the lower structure and the upper structure to each other, the connection pattern connected to the upper structure, the connection pattern extending away from the upper structure to be connected to the pad structure,

wherein the chip bonding pad does not overlap the pad structure and the connection pattern in a vertical direction perpendicular to an upper surface of the lower base.

2. The semiconductor package of claim 1 , wherein

the pad structure includes

a first pad, and

a second pad on the first pad,

a top surface of the second pad of the pad structure is at a higher level than a top surface of the chip bonding pad,

the top surface of the chip bonding pad is at a same height level as a top surface of the first pad, and

a bottom surface of the chip bonding pad is at a same height level as a bottom surface of the first pad.

3. The semiconductor package of claim 2 , wherein

the heat sink structure includes a first heat sink pattern and a second heat sink pattern on the first heat sink pattern,

the first heat sink pattern is at a same height level as the first pad,

the first heat sink pattern includes a same material as the first pad,

the second heat sink pattern is at a same height level as the second pad, and

the second heat sink pattern includes a same material as the second pad.

4. The semiconductor package of claim 1 , further comprising:

a redistribution line configured to electrically connect the chip bonding pad and the pad structure to each other.

5. The semiconductor package of claim 4 , wherein

the pad structure includes

a first pad, and

a second pad on the first pad, and

the chip bonding pad, the redistribution line and the first pad are included in a single, continuous instance of material.

6. The semiconductor package of claim 1 , wherein

the first lower chip further includes

a silicon substrate,

a lower layer on the silicon substrate,

an upper layer on the lower layer, and

an intermediate layer between the lower layer and the upper layer,

the chip bonding pad, the pad structure, and the heat sink structure are on the lower layer, and

the upper layer and the intermediate layer have

a first opening that extends through both the upper layer and the intermediate layer to expose at least a portion of the chip bonding pad, and

a second opening that extends through both the upper layer and the intermediate layer to expose at least a portion of a top surface of the pad structure.

7. The semiconductor package of claim 1 , wherein

the lower base includes a first base pad,

the lower structure further includes a wire configured to electrically connect the chip bonding pad and the first base pad to each other, and

the lower structure further includes a lower mold layer covering the first lower chip and the wire.

8. The semiconductor package of claim 7 , further comprising:

a second lower chip between the first lower chip and the lower base;

an adhesive layer between the first lower chip and the second lower chip; and

a conductive bump between the second lower chip and the lower base,

wherein the adhesive layer is in contact with a bottom surface of a silicon substrate of the first lower chip and a top surface of the second lower chip.

9. The semiconductor package of claim 7 , wherein

the lower mold layer has a first opening extending through at least a portion of the lower mold layer to expose at least a portion of a top surface of the pad structure, and

the connection pattern extends away from the upper structure to be connected to the portion of the pad structure that is exposed by the first opening of the lower mold layer.

10. A semiconductor package, comprising:

a lower structure, the lower structure including a lower base, a lower chip on the lower base, and a lower mold layer on the lower base such that the lower mold layer covers the lower chip, the lower chip including a pad structure and a heat sink structure, at least a portion of the heat sink structure at a same height level as at least a portion of the pad structure, the lower mold layer having a top surface that is at a higher height level than both a top surface of the pad structure and a top surface of the heat sink structure, the lower mold layer having a first opening that extends through at least a portion of the lower mold layer to expose at least a portion of the top surface of the pad structure;

an upper structure on the lower structure; and

a connection pattern between the lower structure and the upper structure, the connection pattern configured to electrically connect the lower structure and the upper structure to each other, the connection pattern connected to the upper structure, the connection pattern extending away from the upper structure to be connected to the portion of the top surface of the pad structure exposed by the first opening.

11. The semiconductor package of claim 10 , wherein

the pad structure includes

a first pad, and

a second pad on the first pad, and

the heat sink structure includes a heat sink pattern at a same height level as the first pad, the second pad, or both the first and second pads.

12. The semiconductor package of claim 11 , wherein

the heat sink structure includes the heat sink pattern and a capping pattern on the heat sink pattern,

at least a portion of the heat sink pattern is at a same height level as at least a portion of the second pad,

the heat sink pattern includes a same material as the second pad,

the connection pattern includes a same material as the capping pattern, and

the connection pattern and the capping pattern include a material different from a material of the heat sink pattern and the second pad.

13. The semiconductor package of claim 10 , wherein at least a portion of the connection pattern disposed in the first opening includes an inflection portion narrows and then widens in proportion with distance from the top surface of the pad structure.

14. The semiconductor package of claim 10 , wherein the first opening further exposes at least a portion of a side surface of the pad structure.

15. The semiconductor package of claim 10 , wherein the lower mold layer covers the top surface of the heat sink structure.

16. The semiconductor package of claim 10 , wherein the lower mold layer further has a second opening exposing at least a particular portion of the heat sink structure.

17. The semiconductor package of claim 10 , further comprising:

a dummy pattern between the lower structure and the upper structure,

wherein the dummy pattern is connected to both a dummy pad of the upper structure and the heat sink structure of the lower structure,

wherein the dummy pattern includes a same material as the connection pattern.

18. A semiconductor package comprising:

a lower structure, the lower structure including a lower base, a first lower chip on the lower base, a second lower chip between the first lower chip and the lower base, and a lower mold layer covering the first lower chip, the first lower chip including a substrate, a chip bonding pad on the substrate, a pad structure, and a heat sink structure, at least a portion of the heat sink structure at a same height level as at least a portion of the pad structure, the lower mold layer having a top surface that is at a higher height level than both a top surface of the pad structure and a top surface of the heat sink structure, the lower mold layer having a first opening that extends through at least a portion of the lower mold layer to expose at least a portion of the top surface of the pad structure;

an upper structure on the lower structure, the upper structure isolated from direct contact with the lower structure; and

a connection pattern between the lower structure and the upper structure, the connection pattern configured to electrically connect the lower structure and the upper structure to each other, the connection pattern configured to connect the portion of the top surface of the pad structure and the upper structure to each other.

19. The semiconductor package of claim 18 , wherein

the lower structure and the upper structure are spaced apart from each other to define an empty space between the lower structure and the upper structure to expose at least a portion of a side surface of the connection pattern.

20. The semiconductor package of claim 18 , wherein

the first lower chip further includes a redistribution line on the substrate, the redistribution line configured to electrically connect the chip bonding pad and the pad structure to each other,

the lower structure further includes a wire configured to electrically connect the chip bonding pad of the first lower chip and a base pad of the lower base,

the heat sink structure includes a heat sink pattern and a capping pattern on the heat sink pattern,

the pad structure includes a first pad and a second pad on the first pad,

the redistribution line is configured to electrically connect the first pad and the chip bonding pad to each other,

the heat sink pattern includes a same material as the second pad, and

the connection pattern includes a same material as the capping pattern.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 1, 2019
From: KIM, JI HWANG; SHIM, JONG BO; LEE, JANG WOO; KONG, YUNG CHEOL; HYUN, YOUNG HOON
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 050581/0100 →
Priority Claims (1)
KR 10-2018-0161564 · Dec 14, 2018 · national
Continuity (1)
Related Publication 20200194331A1 · Jun 18, 2020
Cited By (1)
US 12,733,491