Semiconductor device including lower semiconductor package having heat sink pattern
A semiconductor includes a lower structure, an upper structure on the lower structure, and a connection pattern between the lower structure and the upper structure. The connection pattern is configured to electrically connect the lower structure and the upper structure to each other. The lower structure includes a lower base and a first lower chip on the lower base. The first lower chip includes a chip bonding pad, a pad structure, and a heat sink structure. The connection pattern is connected to the upper structure and extends away from the upper structure to be connected to the pad structure. The pad structure has a thickness greater than a thickness of the chip bonding pad. At least a portion of the heat sink structure is at a same height level as at least a portion of the pad structure.
1 . A semiconductor device, comprising:
a lower semiconductor package, the lower semiconductor package including a lower base, a first lower chip on the lower base, and a lower mold layer on the first lower chip;
an upper semiconductor package including at least one chip, the upper semiconductor package on the lower semiconductor package;
a connection pattern between the lower semiconductor package and the upper semiconductor package, the connection pattern configured to electrically connect the lower semiconductor package and the upper semiconductor package to each other; and
an empty space between the lower semiconductor package and the upper semiconductor package,
wherein the first lower chip includes
a body,
a chip pad on the body,
a pad structure on the body,
a heat sink pattern on the body, and
a redistribution line on the body and configured to electrically connect the chip pad and the pad structure to each other,
wherein at least a portion of a side surface of the connection pattern is exposed by the empty space, and
wherein at least a portion of an upper surface of the heat sink pattern is exposed by the empty space.
2 . The semiconductor device of claim 1 , wherein the lower mold layer includes
a first mold opening to expose at least a portion of the pad structure; and
a second mold opening to expose at least a portion of the heat sink pattern.
3 . The semiconductor device of claim 2 , wherein the upper surface of the heat sink pattern includes
a first portion in contact with the lower mold layer; and
a second portion exposed by the second mold opening and the empty space.
4 . The semiconductor device of claim 2 , wherein an entirety of the upper surface of the heat sink pattern is exposed by the second mold opening and the empty space.
5 . The semiconductor device of claim 2 , wherein an entirety of the upper surface of the heat sink pattern and at least a portion of a side surface of the heat sink pattern are exposed by the second mold opening and the empty space.
6 . The semiconductor device of claim 1 , wherein
the pad structure includes
a first pad, and
a second pad on the first pad, and
the chip pad is at a same height level as the first pad.
7 . The semiconductor device of claim 6 , wherein
the heat sink pattern includes a first pattern and a second pattern on the first pattern,
the first pattern is at a same height level as the first pad,
the first pattern includes a same material as the first pad,
the second pattern is at a same height level as the second pad, and
the second pattern includes a same material as the second pad.
8 . The semiconductor device of claim 6 , wherein a thickness of the second pad is greater than a thickness of the first pad.
9 . The semiconductor device of claim 1 , wherein the lower semiconductor package further includes a second lower chip below the first lower chip.
10 . The semiconductor device of claim 1 , wherein
the pad structure includes
a first pad, and
a second pad on the first pad, and
the chip pad, the redistribution line and the first pad are included in a single, continuous instance of material.
11 . The semiconductor device of claim 1 , wherein
the first lower chip further includes
a lower layer on the body,
an upper layer on the lower layer, and
an intermediate layer between the lower layer and the upper layer, the chip pad, the pad structure, and the heat sink pattern are on the lower layer, and the upper layer and the intermediate layer have
a first opening that extends through both the upper layer and the intermediate layer to expose at least a portion of the chip pad, and
a second opening that extends through both the upper layer and the intermediate layer to expose at least a portion of a top surface of the pad structure.
12 . The semiconductor device of claim 1 , wherein
the lower base includes a base pad,
the lower semiconductor package further includes a wire configured to electrically connect the chip pad and the base pad to each other, and
the lower mold layer covers the first lower chip and the wire.
13 . The semiconductor device of claim 12 , wherein
the lower semiconductor package further includes
a second lower chip between the first lower chip and the lower base,
an adhesive layer between the first lower chip and the second lower chip, and
a conductive bump between the second lower chip and the lower base, and
the adhesive layer is in contact with a bottom surface of a silicon substrate of the first lower chip and a top surface of the second lower chip.
14 . The semiconductor device of claim 1 , wherein the upper semiconductor package further includes
an upper base below the at least one chip, and
an upper pad below the upper base and contacting the connection pattern.
15 . A semiconductor device, comprising:
a lower semiconductor package, the lower semiconductor package including a lower base, a first lower chip on the lower base, and a lower mold layer on the first lower chip and the lower base;
an upper semiconductor package including at least one chip, the upper semiconductor package on the lower semiconductor package;
connection patterns between the lower semiconductor package and the upper semiconductor package, the connection patterns configured to electrically connect the lower semiconductor package and the upper semiconductor package to each other; and
an empty space between the lower semiconductor package and the upper semiconductor package,
wherein the first lower chip includes
a body,
chip pads on the body,
pad structures on the body,
heat sink patterns on the body, and
redistribution lines on the body and configured to electrically connect the chip pads and the pad structures to each other,
wherein at least a portion of a side surface of each of the connection patterns is exposed by the empty space,
wherein at least a portion of an upper surface of at least one of the heat sink patterns is exposed by the empty space, and wherein the at least one of the heat sink patterns is between the pad structures.
16 . The semiconductor device of claim 15 , wherein
an upper surface of the lower mold layer is at a higher level than upper surfaces of the heat sink patterns, and
the lower mold layer includes openings to expose the heat sink patterns.
17 . The semiconductor device of claim 16 , wherein the upper surface of at least one of the heat sink patterns includes
a first portion in contact with the lower mold layer, and
a second portion exposed by at least one mold layer opening of the lower mold layer and the empty space.
18 . The semiconductor device of claim 15 , wherein
each of the pad structures includes:
a first pad; and
a second pad on the first pad,
each of the heat sink patterns includes:
a first pattern; and
a second pattern on the first pattern,
the first pattern is at a same height level as the first pad,
the first pattern includes a same material as the first pad,
the second pattern is at a same height level as the second pad, and
the second pattern includes a same material as the second pad.
19 . The semiconductor device of claim 18 , wherein a thickness of the second pad is greater than a thickness of the first pad.
20 . The semiconductor device of claim 15 , wherein the lower semiconductor package further includes a second lower chip between the first lower chip and the lower base.