RF front end module including hybrid filter and active circuits in a single package

1. A package comprising:

an active die comprising an acoustic wave resonator;

a package substrate electrically coupled to the active die;

a seal frame surrounding the acoustic wave resonator and attached to the active die and to the package substrate, the seal frame hermetically sealing the acoustic wave resonator in a cavity between the active die and the package substrate;

a substrate cavity disposed in the package substrate beneath the acoustic wave resonator; and

an active die cavity disposed in the active die above the acoustic wave resonator, wherein the cavity between the active die and the package substrate is continuous with both the active die cavity and the substrate cavity.

2. The package of claim 1 wherein the seal frame comprises a metal selected from the group consisting of gold, copper, tin, and indium.

3. The package of claim 1 wherein the seal frame comprises a first metal layer on the active die and a second metal layer on the package substrate.

4. The package of claim 3 wherein the first metal layer is bonded to the second metal layer by metal to metal diffusion bonding.

5. The package of claim 3 wherein the first metal layer is bonded to the second metal layer by a solder connection.

6. The package of claim 1 wherein the seal frame comprises a material selected from the group consisting of a glass frit, a polymer, and an inorganic dielectric.

7. The package of claim 1 wherein the package substrate is selected from the group consisting of a glass substrate and a ceramic substrate.

8. The package of claim 1 wherein the package substrate is a multilayer organic substrate.

9. The package of claim 8 further comprising a hermetic coating on a surface of the package substrate nearest the active die, wherein the hermetic coating is surrounded by the seal frame.

10. The package of claim 9 wherein the hermetic coating is an inorganic dielectric.

11. The package of claim 10 wherein the hermetic coating is selected from the group consisting of silicon oxide and silicon nitride.

12. The package of claim 8 wherein the substrate cavity is disposed in the package substrate on a side nearest the active die, wherein the cavity is lined with a hermetic coating.

13. The package of claim 8 wherein the package substrate comprises a plurality of metal layers, a plurality of dielectric layers, and a plurality of vias wherein the cavity has a sidewall comprising one of the vias of the plurality of vias.

14. The package of claim 13 further comprising a hermetic coating on a sidewall of the cavity.

15. The package of claim 1 wherein the package substrate comprises a passive device, wherein the passive device is electrically coupled to an electrode of the acoustic wave resonator, wherein the passive device is selected from the group consisting of a resistor, a capacitor, an inductor, and a transformer.

16. A package comprising:

an active die comprising an acoustic wave resonator;

a cap coupled to the active die, the cap over the acoustic wave resonator;

a package substrate having an active die side electrically coupled to the active die, the package substrate having a cavity, the cap disposed in the cavity; and

a seal frame, the seal frame surrounding the acoustic wave resonator, the seal frame attaching the cap to the active die.

17. The package of claim 16 wherein the cap has a further cavity on a side nearest the acoustic wave resonator.

18. A package comprising:

an active die comprising a semiconductor substrate and an interconnect structure disposed on the semiconductor substrate, the active die comprising an active circuit;

a resonator die coupled to the active die, the resonator die comprising an acoustic wave resonator;

a package substrate, the package substrate electrically coupled to the active die, and to the resonator die; and

a seal frame, the seal frame surrounding the acoustic wave resonator and attached to the active die and to the resonator die.

19. The package of claim 18 further comprising a substrate cavity in the package substrate, the resonator die in the substrate cavity in the package substrate.

20. The package of claim 18 further comprising a die cavity in the active die, the cavity above the acoustic wave resonator of the resonator die.

21. The package of claim 20 wherein the die cavity is disposed in the interconnect structure of the active die.

22. A package comprising:

an active die comprising a semiconductor substrate and an interconnect structure disposed on the semiconductor substrate, the active die comprising an active circuit;

a resonator die coupled to the active die, the resonator die comprising an acoustic wave resonator;

a package substrate, the package substrate electrically coupled to the active die, and to the resonator die; and

a substrate cavity in the package substrate, the resonator die in the substrate cavity in the package substrate.

23. A package comprising:

an active die comprising a semiconductor substrate and an interconnect structure disposed on the semiconductor substrate, the active die comprising an active circuit;

a resonator die coupled to the active die, the resonator die comprising an acoustic wave resonator;

a package substrate, the package substrate electrically coupled to the active die, and to the resonator die; and

a die cavity in the active die, the cavity above the acoustic wave resonator of the resonator die, wherein the die cavity is disposed in the interconnect structure of the active die.

24. A package comprising:

an active die comprising an acoustic wave resonator;

a package substrate electrically coupled to the active die;

a seal frame surrounding the acoustic wave resonator and attached to the active die and to the package substrate, the seal frame hermetically sealing the acoustic wave resonator in a cavity between the active die and the package substrate, wherein the seal frame comprises a first metal layer on the active die and a second metal layer on the package substrate; and

a substrate cavity disposed in the package substrate beneath the acoustic wave resonator.

25. A package comprising:

an active die comprising an acoustic wave resonator;

a package substrate electrically coupled to the active die, wherein the package substrate comprises a passive device, wherein the passive device is electrically coupled to an electrode of the acoustic wave resonator, wherein the passive device is selected from the group consisting of a resistor, a capacitor, an inductor, and a transformer;

a seal frame surrounding the acoustic wave resonator and attached to the active die and to the package substrate, the seal frame hermetically sealing the acoustic wave resonator in a cavity between the active die and the package substrate; and

a substrate cavity disposed in the package substrate beneath the acoustic wave resonator.

26. A package comprising:

an active die comprising an acoustic wave resonator;

a package substrate electrically coupled to the active die, wherein the package substrate is a multilayer organic substrate;

a seal frame surrounding the acoustic wave resonator and attached to the active die and to the package substrate, the seal frame hermetically sealing the acoustic wave resonator in a cavity between the active die and the package substrate; and

a hermetic coating on a surface of the package substrate nearest the active die, wherein the hermetic coating is surrounded by the seal frame.

27. A package comprising:

an active die comprising an acoustic wave resonator;

a package substrate electrically coupled to the active die, wherein the package substrate is a multilayer organic substrate;

a seal frame surrounding the acoustic wave resonator and attached to the active die and to the package substrate, the seal frame hermetically sealing the acoustic wave resonator in a cavity between the active die and the package substrate; and

a cavity disposed in the package substrate on a side nearest the active die, wherein the cavity is lined with a hermetic coating.

28. A package comprising:

an active die comprising an acoustic wave resonator;

a package substrate electrically coupled to the active die, wherein the package substrate is a multilayer organic substrate, and wherein the package substrate comprises a plurality of metal layers, a plurality of dielectric layers, and a plurality of vias; and

a seal frame surrounding the acoustic wave resonator and attached to the active die and to the package substrate, the seal frame hermetically sealing the acoustic wave resonator in a cavity between the active die and the package substrate, wherein the cavity has a sidewall comprising one of the vias of the plurality of vias.