Self aligned pattern formation post spacer etchback in tight pitch configurations
View Patent ↗A method of forming a structure for etch masking that includes forming first dielectric spacers on sidewalls of a plurality of mandrel structures and forming non-mandrel structures in space between adjacent first dielectric spacers. Second dielectric spacers are formed on sidewalls of an etch mask having a window that exposes a connecting portion of a centralized first dielectric spacer. The connecting portion of the centralized first dielectric spacer is removed. The mandrel structures and non-mandrel structures are removed selectively to the first dielectric spacers to provide an etch mask. The connecting portion removed from the centralized first dielectric spacer provides an opening connecting a first trench corresponding to the mandrel structures and a second trench corresponding to the non-mandrel structures.
1. An etch method comprising:
forming first spacers on sidewalls of a first mask that are present on a substrate, the first mask formed using a subtractive method;
forming a second mask using an additive method between sidewalls of said first spacers that are not in contact with the first mask formed using the subtractive method;
forming second spacers on sidewalls of a first etch mask having an etch window that exposes a connecting portion of one of the first spacers in the etch window;
cutting the connecting portion to remove the connecting portion of said one of the first spacers; and
etching the substrate using a remaining portion of the first spacers as a second etch mask, wherein an opening is formed from space provided by said cutting the connecting portion of the one spacer of the first spacers connects a first trench patterned by the first mask formed using the subtractive method and a second trench patterned by the second mask using the additive method.
2. The etch method of claim 1 , wherein the first trench patterned by the first mask formed using the subtractive method and the second trench patterned by the second mask using the additive method are on a same lithographic level.
3. The etch method of claim 1 , wherein the substrate is a silicon containing dielectric layer.
4. The etch method of claim 3 , wherein the opening in the substrate is filled to provide a metal line.
5. The etch method of claim 1 , wherein forming the first spacers on sidewalls of the first mask comprises:
conformally depositing a material layer for the first spacers on the first mask; and
etching the material layer, wherein horizontally orientated portions are removed, and vertically orientated portions of the material layer remains to provide the first spacers.
6. The etch method of claim 1 , wherein forming said first etch mask comprises:
depositing a photoresist layer; and
patterning the photoresist layer to provide said etch window.
7. The etch method of claim 6 , wherein the etch window exposes the connecting portion of the one spacer of the first spacers.
8. The etch method of claim 1 , wherein said cutting the connecting portion of said one of the first spacers comprises an etch that is selective to the second spacers.
9. The etch method of claim 1 , further comprising removing the first mask and the second mask selectively to the first spacers.
10. The etch method of claim 1 , wherein the first mask, the second mask and the first spacers have geometries that are arranged to provide a self-aligned double patterning (SADP) etch process.
11. The etch method of claim 1 , wherein the subtractive method that forms the first mask is an etch process.
12. The etch method of claim 11 , wherein the etch process is an anisotropic etch.
13. The etch method of claim 12 , wherein the first mask is comprised of amorphous silicon.
14. The etch method of claim 1 , wherein the first spacers are comprised of a material selected from the group consisting of silicon oxide, silicon nitride and a combination thereof.
15. The etch method of claim 1 , wherein the second spacers are comprised of material selected from the group consisting of silicon oxide, silicon nitride and a combination thereof.
16. The etch method of claim 1 , wherein the additive method comprises deposition within a trench to fill the trench.
17. A self-aligned double patterning (SADP) etch method comprising:
forming a plurality of etched features separated by trenches produced by a first mask structure formed by a subtractive forming method and a second mask structure formed by an additive forming method in the SADP etch method; and
forming an opening in at least one of said plurality of etched features connecting a first trench of said trenches separating etched features corresponding to said first mask structure and a second trench corresponding to said second mask structure on a same lithographic level.
18. The self-aligned double patterning (SADP) etch method of claim 17 , wherein the subtractive forming method that forms the first mask structure is an etch process.
19. The self-aligned double patterning (SADP) etch method of claim 17 , wherein the additive forming method that forms the second mask structure comprises deposition within a trench to fill the trench.
20. The self-aligned double patterning (SADP) etch method of claim 17 , wherein the at least one of said plurality of etched features is a metal line for conducting electrical current to an electrical device.