Forming a sacrificial liner for dual channel devices
A semiconductor device includes one or more fins. Each fin includes a top channel portion formed from a channel material, and a bottom substrate portion formed from a same material as an underlying substrate. An isolation dielectric layer is formed between and around the bottom substrate portion of the one or more fins. A single oxide layer is formed in direct contact with the bottom substrate portion of each fin, between the bottom substrate portion of each fin and the isolation dielectric layer. A gate dielectric is formed over the one or more fins and between a straight sidewall of at least a top portion of the single oxide layer and an adjacent sidewall of the one or more fins, in contact with both the straight sidewall and the bottom substrate portion.
1. A semiconductor device, comprising:
a plurality of fins, each fin comprising:
a top channel portion formed from a channel material; and
a bottom substrate portion formed from a same material as an underlying substrate;
an isolation dielectric layer disposed around the bottom substrate portion;
a single oxide layer disposed in direct contact with the bottom substrate portion and between the bottom substrate portion and the isolation dielectric layer; and
a gate dielectric disposed over the fin and between a straight sidewall of at least a top portion of the single oxide layer and an adjacent sidewall of the fin, in contact with both the straight sidewall and the bottom substrate portion.
2. The semiconductor device of claim 1 , wherein a first subset of the fins comprises a top channel portion formed from a first channel material and wherein a second subset of the fins comprises a top channel portion formed from a second channel material.
3. The semiconductor device of claim 2 , wherein the first channel material is silicon and wherein the second channel material is silicon germanium.
4. The semiconductor device of claim 1 , wherein a top channel portion of each of the fins has a width that is smaller than a width of the bottom substrate portion of each respective fin.
5. The semiconductor device of claim 4 , wherein each fin further comprises a middle portion formed from a same material as the underlying substrate and having a width that is smaller than the width of the bottom substrate portion.
6. The semiconductor device of claim 1 , wherein the straight sidewall of at least the top portion of the single oxide layer is vertical with respect to the underlying substrate.
7. The semiconductor device of claim 1 , wherein the single oxide layer has a height greater than a bottom surface of the top channel portion of each fin.
8. The semiconductor device of claim 1 , wherein the single oxide layer has a stepped top portion.
9. The semiconductor device of claim 8 , wherein a first step of the stepped top portion has a first height that is lower than a bottom surface of the top channel portion of each fin and a second step of the stepped top portion has a second height that is greater than the bottom surface of the top channel portion of each fin.
10. A semiconductor device, comprising:
a plurality of fins, each fin comprising:
a top channel portion formed from a channel material; and
a bottom substrate portion formed from a same material as an underlying substrate;
an isolation dielectric layer disposed around the bottom substrate portion;
a single oxide layer disposed in direct contact with the bottom substrate portion, and between the bottom substrate portion and the isolation dielectric layer, wherein a space exists between a straight sidewall of the single oxide layer and a closest fin; and
a gate dielectric disposed over the fin and in the space, and in contact with both the straight sidewall and the bottom substrate portion.
11. The semiconductor device of claim 10 , wherein a first subset of the fins comprises a top channel portion formed from a first channel material and wherein a second subset of the fins comprises a top channel portion formed from a second channel material.
12. The semiconductor device of claim 11 , wherein the first channel material is silicon and wherein the second channel material is silicon germanium.
13. The semiconductor device of claim 10 , wherein each fin further comprises a middle portion formed from a same material as the underlying substrate and having a width that is lower than the width of the bottom substrate portion.
14. The semiconductor device of claim 10 , wherein the straight sidewall of at least the top portion of the single oxide layer is parallel to the adjacent sidewall of the one or more fins.
15. The semiconductor device of claim 10 , wherein the single oxide layer has a height greater than a bottom surface of the top channel portion of each fin.
16. The semiconductor device of claim 10 , wherein the single oxide layer has a stepped top portion.
17. The semiconductor device of claim 16 , wherein a first step of the stepped top portion has a first height that is lower than a bottom surface of the top channel portion of each fin and a second step of the stepped top portion has a second height that is greater than the bottom surface of the top channel portion of each fin.
18. A semiconductor device, comprising:
a plurality of fins, each fin comprising:
a top channel portion formed from a channel material;
a bottom substrate portion formed from a same material as an underlying substrate; and
a middle portion formed from a same material as the underlying substrate and having a width that is smaller than the width of the bottom substrate portion;
an isolation dielectric layer disposed between and around the bottom substrate portion of the fins;
a single oxide layer disposed in direct contact with the bottom substrate portion of each fin, between the bottom substrate portion of each fin and the isolation dielectric layer; and
a gate dielectric disposed over the fins and between a straight sidewall of at least a top portion of the single oxide layer and an adjacent sidewall of the fins, the gate dielectric in contact with both the straight sidewall and the bottom substrate portion.
19. The semiconductor device of claim 18 , wherein a first subset of the fins comprises a top channel portion formed from a first channel material and wherein a second subset of the fins comprises a top channel portion formed from a second channel material.
20. The semiconductor device of claim 19 , wherein the first channel material is silicon and wherein the second channel material is silicon germanium.