IP Library › Granted Patent US 10,816,728
Granted Patent B1
US 10,816,728 · App. 16/686,782 · Granted Oct 27, 2020

Polarizers with confinement cladding

Inventors: Yusheng Bian (Ballston Lake, NY); Ajey Poovannummoottil Jacob (Watervliet, NY)
Assignee: GLOBALFOUNDRIES INC.
G02B6/126G02B6/1228G02B6/13G02B2006/12061
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Quick Facts
Patent No.
US 10,816,728
App. No.
16/686,782
Granted
Oct 27, 2020
Kind
B1
Abstract

Structures for a polarizer and methods of fabricating a structure for a polarizer. A first waveguide core has a first width, and a polarizer includes a second waveguide core having a second width that is greater than the first width. The second waveguide core is coupled to the first waveguide core. The polarizer includes a layer that is positioned adjacent to a side surface of the second waveguide core. The layer is comprised of a material having a permittivity with an imaginary part that ranges from 0 to about 15.

Claims (25)

1. A structure comprising:

a first waveguide core having a first width; and

a polarizer including a second waveguide core coupled to the first waveguide core and a first layer, the second waveguide core having a first side surface and a second width that is greater than the first width, the first layer positioned adjacent to the first side surface of the second waveguide core, the first layer comprised of a material having a permittivity with an imaginary part that ranges from 0 to about 15, and the material comprises a metal vanadate.

2. The structure of claim 1 wherein the polarizer includes a second layer positioned between the first layer and the first side surface, and the second layer is comprised of silicon dioxide.

3. The structure of claim 1 wherein the metal vanadate is calcium vanadate or strontium vanadate, and the second waveguide core comprises single-crystal silicon.

4. The structure of claim 1 wherein the metal vanadate is calcium vanadate or strontium vanadate, and the second waveguide core comprises silicon nitride.

5. The structure of claim 1 wherein the polarizer includes a second layer comprised of the material, the second waveguide core has a second side surface, and the second layer is positioned adjacent to the second side surface of the second waveguide core.

6. The structure of claim 5 wherein the polarizer includes a third layer comprised of the material, the second waveguide core has a top surface connecting the first side surface and the second side surface, the third layer is positioned adjacent to the top surface of the second waveguide core, and the third layer connects the first layer with the second layer.

7. The structure of claim 6 wherein the polarizer includes a fourth layer positioned in part between the first layer and the first side surface, in part between the second layer and the second side surface, and in part between the third layer and the top surface, and the fourth layer is comprised of silicon dioxide.

8. The structure of claim 1 wherein the first layer is in direct contact with the first side surface of the second waveguide core.

9. The structure of claim 1 wherein the polarizer includes a second layer and a third layer positioned between the second layer and the first layer, and the third layer is comprised of silicon dioxide, and the second layer is comprised of the material.

10. The structure of claim 9 wherein the first layer is in direct contact with the first side surface of the second waveguide core.

11. The structure of claim 1 wherein the polarizer includes a taper coupling the first waveguide core to the second waveguide core, and the first layer extends adjacent to the taper.

12. The structure of claim 11 wherein the taper and the first waveguide core meet at an interface, and the first layer terminates between the interface and the second waveguide core.

13. The structure of claim 1 wherein the polarizer includes a taper coupling the first waveguide core to the second waveguide core, the taper and the second waveguide core meet at an interface, and the first layer terminates at or before the interface.

14. A method of forming a polarizer, the method comprising:

forming a first waveguide core having a first width;

forming a second waveguide core having a second width that is coupled to the first waveguide core; and

forming a first layer that is positioned adjacent to a side surface of the second waveguide core,

wherein the first layer is comprised of a material having a permittivity with an imaginary part that ranges from 0 to about 15, and the material comprises a metal vanadate.

15. The method of claim 14 further comprising:

forming a second layer positioned adjacent to the side surface of the second waveguide core,

wherein the second layer is arranged between the first layer and the side surface, and the second layer comprises silicon dioxide.

16. The method of claim 14 wherein the metal vanadate is calcium vanadate or strontium vanadate, and the second waveguide core comprises single-crystal silicon.

17. The method of claim 14 wherein the metal vanadate is calcium vanadate or strontium vanadate, and the second waveguide core comprises silicon nitride.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 18, 2019
From: BIAN, YUSHENG; JACOB, AJEY POOVANNUMMOOTTIL
To: GLOBALFOUNDRIES INC.
Reel/Frame 051038/0650 →
Cited By (3)
US 12,189,183 US 12,210,135 US 12,386,117