Polarization rotators with overlapping waveguide cores
Structures for a polarization rotator and methods of forming a structure for a polarization rotator. The structure comprises a first waveguide core having a first section, a second section, a first terminating end, and a second terminating end opposite to the first terminating end. The first and second sections of the first waveguide core are arranged between the first terminating end and the second terminating end. The structure further comprises a second waveguide core including a first tapered section having a first overlapping arrangement with the first section of the first waveguide core and a second tapered section having a second overlapping arrangement with the second section of the first waveguide core. The first waveguide core comprises a first material, and the second waveguide core comprises a second material different from the first material.
1. A structure for a polarization rotator, the structure comprising:
a substrate;
a first waveguide core having a first section, a second section, a first terminating end, and a second terminating end opposite to the first terminating end, the first section and the second section arranged between the first terminating end and the second terminating end, and the first waveguide core comprising a first material; and
a second waveguide core including a first tapered section, a second tapered section, a third tapered section adjoined to the first tapered section, and a non-tapered section adjoined to the second tapered section, the third tapered section configured as a light input of the polarization rotator to receive light of a first polarization, the non-tapered section configured as a light output to output light of a second polarization from the polarization rotator, the first tapered section of the second waveguide core having a first overlapping arrangement with the first section of the first waveguide core, the second tapered section of the second waveguide core having a second overlapping arrangement with the second section of the first waveguide core, and the second waveguide core comprising a second material different from the first material,
wherein the first waveguide core is positioned between the second waveguide core and the substrate, and the first tapered section and the second tapered section are longitudinally arranged between the third tapered section and the non-tapered section.
2. The structure of claim 1 wherein the first material comprises single-crystal silicon, and the second material comprises silicon nitride or polysilicon.
3. The structure of claim 1 further comprising:
a third waveguide core positioned adjacent to the first waveguide core, the third waveguide core separated from the first waveguide core by a slot.
4. The structure of claim 3 wherein the second waveguide core has a non-overlapping arrangement with the third waveguide core.
5. The structure of claim 4 wherein the second waveguide core has a non-overlapping arrangement with the slot.
6. The structure of claim 1 further comprising:
a dielectric layer positioned between the first waveguide core and the second waveguide core, the dielectric layer comprising a dielectric material.
7. The structure of claim 1 further comprising:
a dielectric layer positioned between the first waveguide core and the second waveguide core, the dielectric layer comprising a dielectric material.
8. The structure of claim 1 further comprising:
a back-end-of-line stack on the substrate,
wherein the second waveguide core is positioned in the back-end-of-line stack.
9. The structure of claim 8 wherein the second material is silicon-carbon nitride or hydrogenated silicon-carbon nitride.
10. The structure of claim 1 wherein the first section of the first waveguide core and the second section of the first waveguide core adjoin at a junction.
11. The structure of claim 10 wherein the first tapered section of the second waveguide core fully overlaps with the first section of the first waveguide core adjacent to the first terminating end, and the first tapered section of the second waveguide core partially overlaps with the first section of the first waveguide core adjacent to the junction.
12. The structure of claim 11 wherein the second tapered section of the second waveguide core fully overlaps with the second section of the first waveguide core adjacent to the junction, and the second tapered section of the second waveguide core partially overlaps with the second section of the first waveguide core adjacent to the second terminating end.
13. The structure of claim 10 wherein the second tapered section of the second waveguide core fully overlaps with the second section of the first waveguide core adjacent to the junction, and the second tapered section of the second waveguide core partially overlaps with the second section of the first waveguide core adjacent to the second terminating end.
14. The structure of claim 1 wherein the first tapered section of the second waveguide core is adjoined to the second tapered section of the second waveguide core at a junction.
15. The structure of claim 14 wherein the first tapered section of the second waveguide core increases in width dimension with decreasing distance from the junction, and the second tapered section of the second waveguide core increases in width dimension with increasing distance from the junction.
16. The structure of claim 1 wherein the second tapered section tapers in a same direction as the first tapered section, and the second tapered section has a larger taper angle than the first tapered section.
17. The structure of claim 16 wherein the first tapered section and the second tapered section each taper in an opposite direction from the third tapered section.
18. A structure for a polarization rotator, the structure comprising:
a substrate;
a first waveguide core having a first section, a second section, a first terminating end, and a second terminating end opposite to the first terminating end, the first section and the second section arranged between the first terminating end and the second terminating end, and the first waveguide core comprising a first material; and
a second waveguide core including a first tapered section, a second tapered section, and a third tapered section adjoined to the first tapered section, the third tapered section configured as a light input of the polarization rotator to receive light of a first polarization, the first tapered section of the second waveguide core having a first overlapping arrangement with the first section of the first waveguide core, the second tapered section of the second waveguide core having a second overlapping arrangement with the second section of the first waveguide core, and the second waveguide core comprising a second material different from the first material,
wherein the first waveguide core is positioned between the second waveguide core and the substrate, the first section of the first waveguide core and the second section of the first waveguide core adjoin at a junction, the first section of the first waveguide core is aligned along a first longitudinal axis, the second section of the first waveguide core is aligned along a second longitudinal axis, and the first longitudinal axis is angled relative to the second longitudinal axis at the junction.
19. A method of forming a structure for a polarization rotator, the method comprising:
forming a first waveguide core having a first section, a second section, a first terminating end, and a second terminating end opposite to the first terminating end, wherein the first section and the second section are arranged between the first terminating end and the second terminating end, and the first waveguide core comprises a first material; and
forming a second waveguide core including a first tapered section, a second tapered section, a third tapered section adjoined to the first tapered section, and a non-tapered section adjoined to the second tapered section, wherein the third tapered section is configured as a light input of the polarization rotator to receive light of a first polarization, the non-tapered section is configured as a light output to output light of a second polarization from the polarization rotator, the first tapered section of the second waveguide core has a first overlapping arrangement with the first section of the first waveguide core, the second tapered section of the second waveguide core has a second overlapping arrangement with the second section of the first waveguide core, the second waveguide core comprises a second material different from the first material, the first waveguide core is positioned between the second waveguide core and a substrate, and the first tapered section and the second tapered section are longitudinally arranged between the third tapered section and the non-tapered section.