Method for source/drain contact formation in semiconductor devices using common doping and common etching to n-type and p-type source/drains
A method includes providing a structure that includes a substrate, a first gate structure and a second gate structure over the substrate, and a first source/drain (S/D) feature and a second S/D feature over the substrate. The first S/D feature is adjacent to the first gate structure, the second S/D feature is adjacent to the second gate structure, the first S/D feature is configured for an n-type transistor, and the second S/D feature is configured for a p-type transistor. The method further includes introducing a p-type dopant into both the first and the second S/D features. After the introducing of the p-type dopant, the method further includes performing an etching process to the first and the second S/D features, wherein the etching process etches the first S/D feature faster than it etches the second S/D feature.
1. A method of forming a semiconductor device, the method comprising:
providing a structure that includes:
a substrate;
a first gate structure and a second gate structure over the substrate; and
a first source/drain and a second source/drain over the substrate, wherein the first source/drain is adjacent to the first gate structure, the second source/drain is adjacent to the second gate structure, the first source/drain is configured for an n-type transistor, and the second source/drain is configured for a p-type transistor;
introducing a p-type dopant into both the first and the second source/drains; and
after the introducing of the p-type dopant, performing an etching process to the first and the second source/drains, wherein the etching process etches the first source/drain faster than it etches the second source/drain.
2. The method of claim 1 , wherein each of the first and the second gate structures includes a high-k gate dielectric layer, a work function layer over the high-k gate dielectric layer, and a metal layer over the work function layer.
3. The method of claim 1 , wherein the first source/drain comprises silicon or silicon-carbon, and the second source/drain comprises silicon germanium.
4. The method of claim 1 , wherein the p-type dopant includes boron.
5. The method of claim 4 , wherein the first source/drain includes an n-type dopant.
6. The method of claim 1 , wherein the second source/drain includes another p-type dopant.
7. The method of claim 1 , wherein the etching process includes a dry etching process using a gas mixture of SF 6 , H 2 , and CF 4 .
8. The method of claim 1 , wherein the etching process includes a wet etching process using NH 4 OH or TMAH.
9. The method of claim 1 , further comprising annealing the p-type dopant in at least the second source/drain.
10. The method of claim 1 , after the performing of the etching process, further comprising:
forming a first contact over the first source/drain; and
forming a second contact over the second source/drain.
11. The method of claim 10 , after the performing of the etching process and before the forming of the first contact and the forming of the second contact, further comprising:
forming a first silicide layer over a remaining portion of the first source/drain ; and
forming a second silicide layer over a remaining portion of the second source/drain.
12. A method of forming a semiconductor device, the method comprising:
providing a structure that includes:
a substrate;
a first gate structure over the substrate;
a first source/drain comprising an n-type doped semiconductor adjacent to the first gate structure; and
one or more dielectric layers over sidewalls of the first gate structure and over the first source/drain;
etching the one or more dielectric layers to expose the first source/drain;
doping a p-type dopant into the first source/drain; and
after the doping of the p-type dopant, partially etching the first source/drain.
13. The method of claim 12 , further comprising:
cleaning a top surface of a remaining portion of the first source/drain; and
forming a first silicide layer over the first source/drain.
14. The method of claim 12 , wherein the structure further includes a second gate structure over the substrate, and a second source/drain comprising silicon germanium adjacent to the second gate structure, wherein the doping of the p-type dopant also dopes the p-type dopant into the second source/drain.
15. The method of claim 14 , after the doping of the p-type dopant, further comprising partially etching the second source/drain.
16. The method of claim 15 , wherein the partially etching of the first source/drain and the partially etching of the second source/drain are by a same etching process that etches the first source/drain at a faster rate than it etches the second source/drain.
17. A method of forming a semiconductor device, the method comprising:
providing a structure that includes:
a substrate;
a first source/drain configured for an n-type transistor;
a second source/drain configured for a p-type transistor; and
one or more dielectric layers over the first and second source/drains;
performing a first etching process to the one or more dielectric layers to expose the first and second source/drains;
doping a p-type dopant into the first and second source/drains, resulting in a first doped portion in the first source/drain and a second doped portion in the second source/drain;
performing a second etching process to the first doped portion and the second doped portion; and
performing an annealing process to the structure after the doping of the p-type dopant.
18. The method of claim 17 , wherein the second etching process completely removes the first doped portion and partially removes the second doped portion.
19. The method of claim 17 , wherein the annealing process is performed before the second etching process is performed.
20. The method of claim 19 , wherein the annealing process is performed after the second etching process is performed.