Semiconductor device with reduced via resistance
A semiconductor interconnect structure having a first electrically conductive structure having a plurality of bottom portions; a dielectric capping layer, at least a portion of the dielectric capping layer being in contact with a first bottom portion of the plurality of bottom portions; and a second electrically conductive structure in electrical contact with a second bottom portion of the plurality of bottom portions. A method of forming the interconnect structure is also provided.
1. A semiconductor interconnect structure comprising:
a first electrically conductive structure having a plurality of bottom portions;
a capping layer, comprising at least one metal capping layer and at least one dielectric capping layer, with at least a portion of the at least one dielectric capping layer being in contact with a first bottom portion of the plurality of bottom portions, wherein the at least one metal capping layer and the at least one dielectric capping layer have respective top surfaces that are substantially coplanar; and
a second electrically conductive structure in electrical contact with a second bottom portion of the plurality of bottom portions.
2. The semiconductor interconnect structure of claim 1 , further comprising:
a first dielectric layer having the second electrically conductive structure embedded therein, wherein the at least one metal capping layer is located over at least a portion of the second electrically conductive structure, and wherein the at least one dielectric capping layer is located over at least a portion of the first dielectric layer; and
a second dielectric layer located over the capping layer, the second dielectric layer having the first electrically conductive structure embedded therein, wherein the first electrically conductive structure includes a first liner material on one or more sidewalls of the first electrically conductive structure, and wherein the first electrically conductive structure is in electrical contact with at least one portion of a top surface of the second electrically conductive structure.
3. The semiconductor interconnect structure of claim 2 , wherein the metal capping layer comprises at least one layer comprising one or more of: Co, Ru, W, Ta, Ti, P, and Rh.
4. The semiconductor interconnect structure of claim 2 , wherein the dielectric capping layer comprises a dielectric material that inhibits metal diffusion between the first electrically conductive structure and the first dielectric layer.
5. The semiconductor interconnect structure of claim 2 , further comprising:
a low resistivity contact between the second bottom surface and at least one portion of a top surface of the second electrically conductive structure, wherein the second bottom portion of the plurality of bottom portions is within an opening through the metal capping layer and the first liner material.
6. The semiconductor interconnect structure of claim 2 , wherein the first electrically conductive structure further comprises a second liner material located over at least a portion of one or both of the first liner material and the dielectric capping layer, and is in contact with the top surface of the second electrically conductive structure.
7. The semiconductor interconnect structure of claim 6 , wherein the second liner material comprises at least one layer comprising a conductive material with low resistivity including one or more of: Cu, Co, and Ru.
8. The semiconductor interconnect structure of claim 7 , wherein low resistivity is defined as resistivity less than 100 micro-ohm centimeters.
9. The semiconductor interconnect structure of claim 2 , wherein the first liner material is absent from a surface of the first bottom portion.
10. The semiconductor interconnect structure of claim 1 , wherein the dielectric capping layer comprises at least one layer including one or more of: SiC, Si 4 NH 3 , and SiO 2 .
11. The semiconductor interconnect structure of claim 1 , wherein one or both of the first electrically conductive structure and the second electrically conductive structure comprise Cu.
12. A semiconductor interconnect structure, comprising:
a first electrically conductive structure having a plurality of bottom portions;
a first liner on one or more sidewalls of the first electrically conductive structure, the first liner material being absent from a surface of each of the plurality of bottom portions;
a dielectric capping layer, at least a portion of the dielectric capping layer being in contact with a first bottom portion of the plurality of bottom portions; and
a second electrically conductive structure in electrical contact with a second bottom portion of the plurality of bottom portions.
13. The semiconductor interconnect structure of claim 12 , further comprising:
a first dielectric layer having the second electrically conductive structure embedded therein;
a capping layer located over the first dielectric layer, the capping layer comprising at least one portion of a metal capping layer and the at least a portion of the dielectric capping layer, wherein the metal capping layer is located over at least a portion of the second electrically conductive structure, and wherein the dielectric capping layer is located over at least a portion of the first dielectric layer; and
a second dielectric layer located over the capping layer, the second dielectric layer having the first electrically conductive structure embedded therein, wherein the first electrically conductive structure is in electrical contact with at least one portion of a top surface of the second electrically conductive structure.
14. The semiconductor interconnect structure of claim 13 , wherein the metal capping layer comprises at least one layer comprising one or more of: Co, Ru, W, Ta, Ti, P, and Rh.
15. The semiconductor interconnect structure of claim 13 , wherein the dielectric capping layer comprises a dielectric material that inhibits metal diffusion between the first electrically conductive structure and the first dielectric layer.
16. The semiconductor interconnect structure of claim 13 , further comprising:
a low resistivity contact between the second bottom surface and at least one portion of a top surface of the second electrically conductive structure, wherein the second bottom portion of the plurality of bottom portions is within an opening through the metal capping layer and the first liner material.
17. The semiconductor interconnect structure of claim 13 , wherein the first electrically conductive structure further comprises a second liner material located over at least a portion of one or both of the first liner material and the dielectric capping layer, and is in contact with the top surface of the second electrically conductive structure.
18. The semiconductor interconnect structure of claim 17 , wherein the second liner material comprises at least one layer comprising a conductive material with low resistivity including one or more of: Cu, Co, and Ru.
19. The semiconductor interconnect structure of claim 12 , wherein the dielectric capping layer comprises at least one layer including one or more of: SiC, Si 4 NH 3 , and SiO 2 .
20. The semiconductor interconnect structure of claim 12 , wherein one or both of the first electrically conductive structure and the second electrically conductive structure comprise Cu.