Granted Patent B2

US 11,335,540 · App. 16/778,181 · Granted May 17, 2022

Inventors: Imran Bhutta (Moorestown, NJ); Michael Ulrich (Delran, NJ)

H01J37/32183C23C16/50C23C16/52H01L22/26H03H7/40H03H11/30H01J2237/24564H01J2237/332H01J2237/334

Abstract

Claims (82)

1. A method of matching an impedance while controlling an RF source frequency, the method comprising:

coupling a matching network between an RF source and a plasma chamber, the matching network comprising:

an RF input configured to operably couple to an RF source output of the RF source;

an RF output configured to operably couple to the plasma chamber;

a first variable capacitor;

an inductor coupled in series or parallel to the first variable capacitor; and

a second variable capacitor separate and distinct from the first variable capacitor;

measuring a parameter related to the plasma chamber;

carrying out a first process of:

determining a parameter-based value based on the measured parameter;

using the parameter-based value, determining a second variable capacitor configuration for reducing a reflected power at the RF source output; and

causing an alteration of the second variable capacitor to the second variable capacitor configuration; and

carrying out a second process of:

determining an RF source frequency;

upon determining that the RF source frequency is outside, at a minimum, or at a maximum of a predetermined frequency range, determining a new first variable capacitor configuration to cause the RF source frequency, according to an RF source frequency tuning process reducing the reflected power at the RF source output, to be altered to be within or closer to the predetermined frequency range, wherein the determination of the new first variable capacitor configuration is based on the RF source frequency and the predetermined frequency range; and

causing an alteration of the first variable capacitor to the new first variable capacitor configuration.

2. The method of claim 1 wherein the RF source frequency tuning process is carried out by an RF source control circuit independent from the control circuit such that the control circuit does not provide instructions or data to the RF source control circuit.

3. The method of claim 2 wherein the RF source frequency tuning process comprises detecting at the RF source output a parameter related to the reflected power, the alteration of the RF source frequency according to the frequency tune process being based on the detected parameter related to the reflected power.

4. The method of claim 1 wherein the parameter-based value is a load impedance value.

5. The method of claim 4 wherein the load impedance value is determined by entering an impedance value for the input of the matching network into a first parameter matrix, the input impedance value being determined based on the measured parameter value.

6. The method of claim 1 wherein the predetermined frequency range comprises a plurality of frequency values, the RF source frequency is at the minimum or at the maximum of the plurality of frequency values, and the new first variable capacitor configuration causes the RF source frequency, according to the RF source frequency tuning process, to be altered to be within the predetermined frequency range such that the RF source frequency is no longer at the minimum or at the maximum of the plurality of frequency values.

7. The method of claim 1 wherein the predetermined frequency range is a single frequency value, the RF source frequency is not at the single frequency value, and the new first variable capacitor configuration causes the RF source frequency, according to the RF source frequency tuning process, to be at or closer to the single frequency value.

8. The method of claim 1 wherein the determination of the new first variable capacitor configuration is further based on the second variable capacitor configuration.

9. The method of claim 1 wherein the first variable capacitor is a vacuum variable capacitor, and the second variable capacitor is an electronically variable capacitor (EVC) comprising discrete capacitors configured to switch in and out to vary a capacitance of the EVC.

10. The method of claim 1 wherein the first variable capacitor is a mechanically variable capacitor.

11. An impedance matching network comprising:

a radio frequency (RF) input configured to operably couple to an RF source output of an RF source;

an RF output configured to operably couple to a plasma chamber;

a first variable capacitor;

an inductor coupled in series or parallel to the first variable capacitor;

a second variable capacitor separate and distinct from the first variable capacitor;

a sensor configured to measure a parameter related to the plasma chamber; and

a control circuit operably coupled to the first variable capacitor, the second variable capacitor, and the sensor, the control circuit configured to:

carry out a first process of:

determining a parameter-based value based on the measured parameter;

using the parameter-based value, determining a second variable capacitor configuration for reducing a reflected power at the RF source output; and

causing an alteration of the second variable capacitor to the second variable capacitor configuration; and

carry out a second process of:

determining an RF source frequency;

upon determining that the RF source frequency is outside, at a minimum, or at a maximum of a predetermined frequency range, determining a new first variable capacitor configuration to cause the RF source frequency, according to an RF source frequency tuning process reducing the reflected power at the RF source output, to be altered to be within or closer to the predetermined frequency range, wherein the determination of the new first variable capacitor configuration is based on the RF source frequency and the predetermined frequency range; and

causing an alteration of the first variable capacitor to the new first variable capacitor configuration.

12. The matching network of claim 11 wherein the RF source frequency tuning process is carried out by an RF source control circuit independent from the control circuit such that the control circuit does not provide instructions or data to the RF source control circuit.

13. The matching network of claim 12 wherein the RF source frequency tuning process comprises detecting at the RF source output a parameter related to the reflected power, the alteration of the RF source frequency according to the frequency tune process being based on the detected parameter related to the reflected power.

14. The matching network of claim 11 wherein the predetermined frequency range comprises a plurality of frequency values, the RF source frequency is at the minimum or at the maximum of the plurality of frequency values, and the new first variable capacitor configuration causes the RF source frequency, according to the RF source frequency tuning process, to be altered to be within the predetermined frequency range such that the RF source frequency is no longer at the minimum or at the maximum of the plurality of frequency values.

15. The matching network of claim 11 wherein the predetermined frequency range is a single frequency value, the RF source frequency is not at the single frequency value, and the new first variable capacitor configuration causes the RF source frequency, according to the RF source frequency tuning process, to be at or closer to the single frequency value.

16. The matching network of claim 11 wherein the determination of the new first variable capacitor configuration is further based on the second variable capacitor configuration.

17. The matching network of claim 11 wherein the first variable capacitor is a vacuum variable capacitor, and the second variable capacitor is an electronically variable capacitor (EVC) comprising discrete capacitors configured to switch in and out to vary a capacitance of the EVC.

18. A semiconductor processing tool comprising:

a plasma chamber configured to deposit a material onto a substrate or etch a material from the substrate; and

an impedance matching network operably coupled to the plasma chamber, the matching network comprising:

an RF input configured to operably couple to an RF source output of an RF source;

an RF output configured to operably couple to the plasma chamber;

a first variable capacitor;

an inductor coupled in series or parallel to the first variable capacitor;

a second variable capacitor separate and distinct from the first variable capacitor;

a sensor configured to measure a parameter related to the plasma chamber; and

a control circuit operably coupled to the first variable capacitor, the second variable capacitor, and the sensor, the control circuit configured to:

carry out a first process of:

determining a parameter-based value based on the measured parameter;

using the parameter-based value, determining a second variable capacitor configuration for reducing a reflected power at the RF source output; and

causing an alteration of the second variable capacitor to the second variable capacitor configuration; and

carry out a second process of:

determining an RF source frequency;

upon determining that the RF source frequency is outside, at a minimum, or at a maximum of a predetermined frequency range, determining a new first variable capacitor configuration to cause the RF source frequency, according to the an RF source frequency tuning process reducing the reflected power at the RF source output, to be altered to be within or closer to the predetermined frequency range, wherein the determination of the new first variable capacitor configuration is based on the RF source frequency and the predetermined frequency range; and

causing an alteration of the first variable capacitor to the new first variable capacitor configuration.

19. A method of manufacturing a semiconductor, the method comprising:

placing a substrate in a plasma chamber configured to deposit a material layer onto the substrate or etch a material layer from the substrate;

coupling a matching network between an RF source and a plasma chamber, the matching network comprising:

an RF input configured to operably couple to an RF source output of the RF source;

an RF output configured to operably couple to the plasma chamber;

a first variable capacitor;

an inductor coupled in series or parallel to the first variable capacitor; and

a second variable capacitor separate and distinct from the first variable capacitor;

measuring a parameter related to the plasma chamber;

carrying out a first process of:

determining a parameter-based value based on the measured parameter;

using the parameter-based value, determining a second variable capacitor configuration for reducing a reflected power at the RF source output; and

causing an alteration of the second variable capacitor to the second variable capacitor configuration; and

carrying out a second process of:

determining an RF source frequency;

upon determining that the RF source frequency is outside, at a minimum, or at a maximum of a predetermined frequency range, determining a new first variable capacitor configuration to cause the RF source frequency, according to an RF source frequency tuning process reducing the reflected power at the RF source output, to be altered to be within or closer to the predetermined frequency range, wherein the determination of the new first variable capacitor configuration is based on the RF source frequency and the predetermined frequency range; and

causing an alteration of the first variable capacitor to the new first variable capacitor configuration.

Assignments (3)

Continuity (23)

Cited By (1)

US 12,413,148