IP Library Granted Patent US 11,276,669
Granted Patent B2
US 11,276,669 · App. 16/818,752 · Granted Mar 15, 2022

High capacity semiconductor device including bifurcated memory module

Inventors: Xuyi Yang (Shanghai, CN); Shineng Ma (Shanghai, CN); Cong Zhang (Shanghai, CN); Chin-Tien Chiu (Taichung, TW)
Assignee: Western Digital Technologies, Inc.
H01L25/0657H01L24/08H01L25/18H01L2224/08145H01L2225/06524H01L2225/06541H01L2924/1431H01L2924/1433H01L2924/1434
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Quick Facts
Patent No.
US 11,276,669
App. No.
16/818,752
Granted
Mar 15, 2022
Kind
B2
Abstract

A semiconductor device is disclosed including wafers of stacked integrated memory modules. A semiconductor device of the present technology may include multiple memory array semiconductor wafers, and a CMOS controller wafer, which together, operate as a single, integrated flash memory semiconductor device. In embodiments, the CMOS controller wafer may include semiconductor dies comprising ASIC logic circuits integrated together with memory array logic circuits.

Claims (31)

1. A semiconductor device configured to operate with a host device, comprising:

a first semiconductor die having a major surface and comprising:

an ASIC logic circuit configured to interface with the host device, the ASIC logic circuit provided at a first elevation along an axis perpendicular to the major surface within the first semiconductor die, and

a memory array logic circuit configured to interface with a memory array, the memory array logic circuit provided at a second elevation along the axis perpendicular to the major surface within the first semiconductor die, the second elevation being different than the first elevation; and

a group of one or more second semiconductor dies coupled to the first semiconductor die along the axis perpendicular to the major surface, the group of one or more second semiconductor dies comprising the memory array configured to interface with the memory array logic circuit of the first semiconductor die.

2. The semiconductor device of claim 1 , wherein the first semiconductor die is part of a first wafer, and the group of one or more second semiconductor dies are part of one or more second wafers, wherein the first wafer and the group of one or more second wafers are stacked on each other.

3. The semiconductor device of claim 1 , wherein the first semiconductor die is part of a first wafer, and the group of one or more second semiconductor dies are part of one or more second wafers, wherein the first wafer and the group of one or more second wafers are stacked on each other and the first semiconductor die and the group of one or more second semiconductor dies are aligned with each other in a column in the stacked wafers.

4. The semiconductor device of claim 1 , wherein the semiconductor device is a single channel device.

5. The semiconductor device of claim 1 , wherein the semiconductor device is a multiple channel device.

6. The semiconductor device of claim 5 , wherein the first semiconductor die comprises a memory array logic circuit for each channel of the multiple channels.

7. The semiconductor device of claim 1 , wherein the first die and the group of one or more second dies are electrically coupled by through silicon vias in the first die and the group of one or more second dies.

8. The semiconductor device of claim 1 , wherein the first semiconductor die comprises a set of bond pads on a first surface configured to mate with contacts of the host device, and a set of conductive bumps on a second surface configured to mate with contacts of a memory array die of the group of one or more memory array dies.

9. The semiconductor device of claim 1 , wherein the group of one or more second semiconductor dies comprise a three-dimensional stacked memory structure having strings of memory cells formed into layers.

10. A semiconductor device configured to operate with a host device, comprising:

a first wafer having a first major surface and comprising a first group of semiconductor dies having logic circuits for interfacing with the host device and logic circuits for interfacing with a memory array; and

a plurality of second wafers, physically and electrically coupled to the first wafer, the plurality of second wafers comprising a second group of semiconductor dies having a plurality of memory arrays;

wherein the plurality of second wafers are mounted to each other and the first wafer along an axis perpendicular to the major surface so that the logic circuits for interfacing with the memory array are electrically coupled with the plurality of memory arrays in the plurality of second wafers.

11. The semiconductor device of claim 10 , wherein the first wafer comprises logic circuits for interfacing with the host device and logic circuits for interfacing with a memory array.

12. The semiconductor device of claim 10 , wherein the first wafer comprises a first semiconductor die, the first semiconductor die comprising logic circuits for interfacing with the host device and logic circuits for interfacing with a memory array.

13. The semiconductor device of claim 12 , wherein the plurality of second wafer comprise a plurality of second semiconductor dies, the plurality of second semiconductor dies each comprising a memory array.

14. The semiconductor device of claim 12 , wherein the first semiconductor die and the plurality of second semiconductor dies are stacked on each other in a column.

15. The semiconductor device of claim 10 , wherein the first wafer and the plurality of second wafers are stacked on top of each other to form a stack of wafers.

16. The semiconductor device of claim 15 , wherein the first wafer is at the top of the stack of wafers.

17. The semiconductor device of claim 15 , wherein the first wafer comprises a plurality of first semiconductor dies, and the plurality of second wafers each comprise a plurality of second semiconductor dies, wherein a first die of the plurality of first dies controls a group of second dies of the plurality of second dies.

18. The semiconductor device of claim 15 , wherein group of second dies controlled by the first die are mounted in a column beneath the first die.

19. A semiconductor device configured to operate with a host device, comprising:

a controller wafer comprising a major surface and a plurality of controller semiconductor dies, each controller semiconductor die of the plurality of controller semiconductor dies comprising:

ASIC logic circuits for interfacing with the host device, the ASIC logic circuits provided at a first elevation along an axis perpendicular to the major surface within the controller wafer,

memory array logic circuits for interfacing with a memory array, the memory array logic circuit provided at a second elevation along the axis perpendicular to the major surface within the controller wafer, the second elevation being different than the first elevation; and

a plurality of memory array wafers, physically and electrically coupled to the first wafer along the axis perpendicular to the major surface, the plurality of memory array wafers each comprising a plurality of memory array semiconductor dies having memory arrays.

20. The semiconductor device of claim 19 , wherein the plurality of memory array wafers are stacked on top of each other to form a stack of wafers, with memory array semiconductor dies of respective memory array wafers being physically and electrically bonded to each other in a column.

Assignments (10)
PARTIAL RELEASE OF SECURITY INTERESTS Recorded Apr 25, 2025
From: JPMORGAN CHASE BANK, N.A., AS AGENT
To: SANDISK TECHNOLOGIES, INC.
Reel/Frame 071382/0001 →
SECURITY AGREEMENT Recorded Apr 25, 2025
From: SANDISK TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 071050/0001 →
PATENT COLLATERAL AGREEMENT Recorded Aug 23, 2024
From: SANDISK TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS THE AGENT
Reel/Frame 068762/0494 →
CHANGE OF NAME Recorded Jun 27, 2024
From: SANDISK TECHNOLOGIES, INC.
To: SANDISK TECHNOLOGIES, INC.
Reel/Frame 067982/0032 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 29, 2024
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: SANDISK TECHNOLOGIES, INC.
Reel/Frame 067567/0682 →
PATENT COLLATERAL AGREEMENT - DDTL LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 067045/0156 →
PATENT COLLATERAL AGREEMENT - A&R LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 064715/0001 →
RELEASE OF SECURITY INTEREST AT REEL 053482 FRAME 0453 Recorded Feb 8, 2022
From: JPMORGAN CHASE BANK, N.A.
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 058966/0279 →
SECURITY INTEREST Recorded May 14, 2020
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS AGENT
Reel/Frame 053482/0453 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 13, 2020
From: YANG, XUYI; MA, SHINENG; ZHANG, CONG; CHIU, CHIN-TIEN
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 052112/0567 →