Aminoiodosilanes and methods of synthesizing these aminoiodosilanes
Methods of synthesizing aminoiodosilanes are disclosed. The reaction to produce the disclosed aminoiodosilanes is represented by the formula: SiI 4 +z (NH 2 R 1 )═SiI y (NHR 1 ) z , wherein R 1 is selected from a C 1 -C 10 alkyl or cycloalkyl, aryl, or a hetero group; y=1 to 3; and z=4−y.
1. A method of synthesizing an aminoiodosilane comprising the steps of:
adding tetraiodosilane to a reactor at a temperature that is below 0° C.;
adding a monosubstituted amine having the formula, NH 2 R 1 , to the reactor to produce a mixture, wherein R 1 is selected from a C 1 -C 10 alkyl or cycloalkyl, aryl, or a hetero group;
stirring the mixture to form a stirred mixture; and
isolating the aminoiodosilane from the stirred mixture, wherein the aminoiodosilane has the formula SiI 2 (NHR 1 ) 2 .
2. The method of claim 1 , wherein the solvent is toluene.
3. The method of claim 1 , further comprising vacuum distilling the aminosilane.
4. The method of claim 1 , wherein the monosubstituted amine is t-butylamine.
5. The method of claim 1 , wherein the monosubstituted amine is methylamine or ethylamine.
6. The method of claim 1 , wherein the monosubstituted amine is isopropylamine.
7. The method of claim 1 , wherein the temperature is in a range of from about −15° C. to about −5° C.
8. The method of claim 1 , wherein the amine is added to the iodosilane.
9. A method of synthesizing an aminoiodosilane comprising the steps of:
adding tetraiodosilane to a reactor;
adding a monosubstituted amine having the formula, NH 2 R 1 , to the reactor to produce a mixture, wherein R 1 is selected from a C 1 -C 10 alkyl or cycloalkyl, aryl, or a hetero group;
stirring the mixture to form a stirred mixture; and
isolating the aminoiodosilane from the stirred mixture, wherein the aminoiodosilane has the formula SiI 2 (NHR 1 ) 2 .
10. The method of claim 1 , wherein the aminoiodosilane is bis(t-butylamino)diiodosilane or bis(isopropylamino)diiodosilane.