Self-aligned cross-point phase change memory-switch array
Subject matter disclosed herein relates to a memory device, and more particularly to a self-aligned cross-point phase change memory-switch array and methods of fabricating same.
1. A memory device comprising:
a plurality of switch structures extending in a first direction and comprising a switch layer that is isolated from switch layers of adjacent switch structures in a second direction different from the first direction; and
a plurality of memory structures coupled with the plurality of switch structures, a memory structure of the plurality of memory structures comprising a phase change memory layer between a first memory electrode layer and a second memory electrode layer, the second memory electrode layer extending in the second direction and directly coupled with a first switch structure and a second switch structure of the plurality of switch structures, wherein the first switch structure is adjacent to the second switch structure, the phase change memory layer and the first memory electrode layer extending in a third direction different from the first direction and the second direction between a switch structure and the second memory electrode layer of the memory structure, wherein the first memory electrode layer is isolated from adjacent memory structures in the first direction and the second direction.
2. The memory device of claim 1 , wherein each memory structure of the plurality of memory structures is in series with a corresponding switch structures of the plurality of switch structures to each form one of a plurality of memory cells.
3. The memory device of claim 2 , further comprising:
a first plurality of electrically conductive lines located under the plurality of switch structures; and
a second plurality of electrically conductive lines located over the plurality of memory structures,
wherein the first plurality of electrically conductive lines and the second plurality of electrically conductive lines are configured to interconnect the plurality of memory cells of the memory device.
4. The memory device of claim 3 , wherein each of the plurality of switch structures further comprise a first switch electrode layer and a second switch electrode layer, and wherein the switch layer is between the first switch electrode layer and the second switch electrode layer.
5. The memory device of claim 4 , wherein the second switch electrode layer is in contact with the first memory electrode layer.
6. The memory device of claim 4 , wherein the first switch electrode layer, the second switch electrode layer, the first memory electrode layer, and the second memory electrode layer comprise titanium nitride (TiN) or carbon, or both.
7. The memory device of claim 3 , wherein the first plurality of electrically conductive lines is in contact with the first memory electrode layer.
8. A memory device, comprising:
a plurality of switch structures extending in a first direction, each switch structure comprising a switch layer between a first switch electrode layer and a second switch electrode layer; and
a plurality of memory structures coupled with the plurality of switch structures, each memory structure of the plurality of memory structures comprising a memory layer between a first memory electrode layer and a second memory electrode layer, the second memory electrode layer extending in a second direction different from the first direction and directly coupled with a first switch structure and a second switch structure of the plurality of switch structures, wherein the first switch structure is adjacent to the second switch structure, the memory layer and the first memory electrode layer extending in a third direction different from the first direction and the second direction between a switch structure and the second memory electrode layer of a memory structure, wherein the first memory electrode layer is isolated from adjacent memory structures in the first direction and the second direction.
9. The memory device of claim 8 , wherein the first switch electrode layer extends between two or more neighboring switch structures.
10. The memory device of claim 9 , wherein the switch layer extends between the two or more neighboring switch structures.
11. The memory device of claim 10 , wherein the second switch electrode layer is isolated from neighboring switch structures.
12. The memory device of claim 11 , wherein the first memory electrode layer is isolated from neighboring memory structures, wherein the first memory electrode layer is in contact with the second switch electrode layer.
13. The memory device of claim 8 , wherein the memory layer extends between two or more adjacent memory structures.
14. The memory device of claim 8 , wherein the second memory electrode layer extends between two or more adjacent memory structures.
15. A memory device, comprising:
a memory cell including a switch structure and a memory structure, the switch structure extending in a first direction and comprising a switch layer, and the memory cell comprising a memory layer between a first memory electrode layer and a second memory electrode layer, the second memory electrode layer extending in a second direction different from the first direction and directly coupled with a first switch structure and a second switch structure, wherein the first switch structure is adjacent to the second switch structure in the second direction, the memory layer and the first memory electrode layer extending in a third direction different from the first direction and the second direction between the switch structure and the second memory electrode layer of the memory structure, wherein the first memory electrode layer is isolated from adjacent memory structures in the first direction and the second direction;
a column line is above the memory cell and coupled with the memory structure of the memory cell; and
a row line is below the memory cell and coupled with the switch structure of the memory cell.
16. The memory device of claim 15 , wherein the switch structure further comprises:
a first switch electrode layer and a second switch electrode layer that are isolated from neighboring switch structures.
17. The memory device of claim 16 , wherein the switch layer is between the first switch electrode layer and the second switch electrode layer, wherein the switch layer is isolated from the neighboring switch structures.
18. The memory device of claim 16 , wherein the first memory electrode layer is isolated from neighboring memory structures and is in contact with the second switch electrode layer.
19. The memory device of claim 15 , wherein the memory layer and the second memory electrode layer are isolated from neighboring memory structures.
20. The memory device of claim 15 , wherein the memory layer comprises a phase change memory layer.