Photomask having a plurality of shielding layers
View Patent ↗Some embodiments pertain to a photomask for mask patterning. The photomask includes a phase shift layer overlying a transparent layer, a first shielding layer overlying the phase shift layer, and a second shielding layer overlying the first shielding layer. The first shielding layer has a first optical density, and the second shielding layer has a second optical density. The second optical density is less than the first optical density.
1. A photomask for mask patterning, comprising:
a transparent layer comprising quartz;
a phase shift layer comprising molybdenum silicide (MoSi) overlying the transparent layer; and
an upper shielding layer overlying the phase shift layer, wherein the upper shielding layer comprises chromium and has a thickness of 3 nm to 7 nm.
2. The photomask of claim 1 , further comprising:
a lower shielding layer separating the phase shift layer from the upper shielding layer, wherein the lower shielding layer has a material composition that differs from that of the upper shielding layer.
3. The photomask of claim 2 , wherein the lower shielding layer has a first optical density and the upper shielding layer has a second optical density, wherein the second optical density is less than the first optical density.
4. The photomask of claim 3 , wherein the first optical density is greater than 1 and the second optical density is less than 1.
5. The photomask of claim 2 , wherein the lower shielding layer has a first thickness and the upper shielding layer has a second thickness, the second thickness is less than the first thickness.
6. The photomask of claim 2 , wherein the lower shielding layer and the upper shielding layer have a combined optical density that is at least 1.8.
7. The photomask of claim 1 , wherein the phase shift layer covers some portions of the transparent layer while leaving other portions of the transparent layer uncovered.
8. The photomask of claim 1 , wherein the upper shielding layer covers some portions of the phase shift layer but leaves other portions of the phase shift layer uncovered.
9. The photomask of claim 1 , wherein the upper shielding layer comprises chromium nitride.
10. A photomask for mask patterning, comprising:
a transparent layer comprising quartz;
a phase shift layer overlying the transparent layer;
a first shielding layer overlying the phase shift layer, wherein the first shielding layer has a first thickness; and
a second shielding layer overlying the first shielding layer and having a non-zero second thickness, wherein the second shielding layer comprises chromium and the non-zero second thickness is 7 nm or less.
11. The photomask of claim 10 , wherein the first shielding layer comprises tantalum or boron.
12. The photomask of claim 10 , wherein the phase shift layer covers some portions of the transparent layer while leaving other portions of the transparent layer uncovered.
13. The photomask of claim 10 , wherein the first shielding layer covers some portions of the phase shift layer but leaves other portions of the phase shift layer uncovered.
14. The photomask of claim 10 , wherein the first shielding layer and the second shielding layer collectively have a combined optical density greater than one.
15. The photomask of claim 14 , wherein the combined optical density is approximately 1.8.
16. The photomask of claim 11 , wherein the first shielding layer has a first optical density and the second shielding layer has a second optical density, and wherein the second optical density is less than the first optical density.
17. The photomask of claim 16 , wherein the first optical density is approximately 1.6 and the second optical density is approximately 0.23.
18. The photomask of claim 16 , wherein the first optical density is greater than 1 and the second optical density is less than 1.
19. A photomask for mask patterning, comprising:
a transparent layer comprising quartz;
a phase shift layer comprising molybdenum silicide (MoSi) overlying the transparent layer;
a first shielding layer overlying the phase shift layer, wherein the first shielding layer has a first thickness; and
a second shielding layer overlying the first shielding layer, wherein the second shielding layer comprises chromium and has a second thickness ranging between about one-tenth to about one-third of the first thickness.
20. The photomask of claim 19 , wherein the first shielding layer has a first optical density and the second shielding layer has a second optical density, and wherein the second optical density is less than the first optical density.