Complementary transistor and semiconductor device
A complementary transistor is constituted of a first transistor TR 1 and a second transistor TR 2 , active regions 32, 42 of the respective transistors are formed by layering first A layers 33, 43 and the first B layers 35, 45 respectively, surface regions 20 1 , 20 2 provided in a base correspond to first A layers 33, 43 respectively, first B layers 35, 45 each have a conductivity type different from that of the first A layers 33, 43 , and extension layers 36, 46 of the first B layer are provided on insulation regions 21 1 , 21 2 respectively.
1. A complementary transistor, comprising:
a first transistor including:
a first control electrode;
a first active region located below the first control electrode;
a first A extension region extending from one end of the first active region; and
a first B extension region extending from the other end of the first active region; and
a second transistor including:
a second control electrode;
a second active region located below the second control electrode;
a second A extension region extending from one end of the second active region; and
a second B extension region extending from the other end of the second active region.
2. The complementary transistor according to claim 1 , wherein
the first A extension region and the second A extension region are constituted of different materials, and
the first B extension region and the second B extension region are constituted of a same material.
3. The complementary transistor according to claim 1 , wherein
the first A extension region and the second A extension region are constituted of different materials, and
the first B extension region and the second B extension region are constituted of different materials.
4. The complementary transistor according to claim 1 , wherein
the first A extension region is constituted of a silicon semiconductor substrate,
the second A extension region is constituted of a semiconductor layer formed in the silicon semiconductor substrate, and
the first B extension region and the second B extension region are constituted of a same two-dimensional material.
5. The complementary transistor according to claim 1 , wherein
the first A extension region is constituted of a semiconductor layer formed in a silicon semiconductor substrate,
the second A extension region is constituted of the silicon semiconductor substrate, and
the first B extension region and the second B extension region are constituted of a same two-dimensional material.
6. The complementary transistor according to claim 1 , wherein
the first A extension region is constituted of a first semiconductor layer formed in a semiconductor substrate,
the second A extension region is constituted of a second semiconductor layer formed in the semiconductor substrate, and
the first B extension region and the second B extension region are constituted of a same two-dimensional material.
7. The complementary transistor according to claim 1 , wherein
the first B extension region is constituted of a two-dimensional material or graphene, and
the second B extension region is constituted of a two-dimensional material or graphene.
8. The complementary transistor according to claim 7 , wherein the two-dimensional material includes one kind of two-dimensional material selected from a group consisting of MoS 2 , MoSe 2 , MoTe 2 , WS 2 , WSe 2 , WTe 2 , ZrS 2 , ZrSe 2 , ZrTe 2 , HfS 2 , HfSe 2 and HfTe 2 .
9. The complementary transistor according to claim 1 ,
wherein
the first A extension region has a first conductivity type,
the first B extension region has a second conductivity type different from the first conductivity type,
the second A extension region has the second conductivity type, and
the second B extension region has the first conductivity type.
10. The complementary transistor according to claim 1 ,
further comprising:
a first A electrode connected to the first A extension region,
a first B electrode connected to the first B extension region,
a second A electrode connected to the second A extension region, and
a second B electrode connected to the second B extension region.
11. A complementary transistor, comprising:
a first transistor including:
a first control electrode;
a first active region located below the first control electrode and formed by layering a first A layer and a first B layer;
a first A extension layer of the first A layer extending from one end of the first active region;
a first B extension layer of the first B layer extending from the other end of the first active region; and
a second transistor including:
a second control electrode;
a second active region located below the second control electrode and formed by layering a second A layer and a second B layer;
a second A extension layer of the second A layer extending from one end of the second active region; and
a second B extension layer of the second B layer extending from the other end of the second active region.
12. The complementary transistor according to claim 11 , further comprising:
a first interlayer insulation film formed between the first A layer and the first B layer, and
a second interlayer insulation film formed between the second A layer and the second B layer.
13. The complementary transistor according to claim 11 , wherein
the first A extension layer and the second A extension layer are constituted of different materials, and
the first B extension layer and the second B extension layer are constituted of a same material.
14. The complementary transistor according to claim 11 , wherein
the first A extension layer and the second A extension layer are constituted of different materials, and
the first B extension layer and the second B extension layer are constituted of different materials.
15. The complementary transistor according to claim 11 , wherein
the first A extension layer is constituted of a silicon semiconductor substrate,
the second A extension layer is constituted of a semiconductor layer formed in the silicon semiconductor substrate, and
the first B extension layer and the second B extension layer are constituted of a same two-dimensional material.
16. The complementary transistor according to claim 11 , wherein
the first A extension layer is constituted of a semiconductor layer formed in a silicon semiconductor substrate,
the second A extension layer is constituted of the silicon semiconductor substrate, and
the first B extension layer and the second B extension layer are constituted of a same two-dimensional material.
17. The complementary transistor according to claim 11 , wherein
the first A extension layer is constituted of a first semiconductor layer formed in a semiconductor substrate,
the second A extension layer is constituted of a second semiconductor layer formed in the semiconductor substrate, and
the first B extension layer and the second B extension layer are constituted of a same two-dimensional material.
18. The complementary transistor according to claim 11 , wherein
the first B extension layer is constituted of a two-dimensional material or graphene, and
the second B extension layer is constituted of a two-dimensional material or graphene.
19. The complementary transistor according to claim 18 , wherein the two-dimensional material includes one kind of two-dimensional material selected from a group consisting of MoS 2 , MoSe 2 , MoTe 2 , WS 2 , WSe 2 , WTe 2 , ZrS 2 , ZrSe 2 , ZrTe 2 , HfS 2 , HfSe 2 and HfTe 2 .
20. A complementary transistor, comprising:
a first transistor including:
a first control electrode;
a first boundary region located below the first control electrode and formed by a first B layer;
a first A extension layer extending from one end of the first boundary region;
a first B extension layer of the first B layer extending from the other end of the first boundary region; and
a second transistor including:
a second control electrode;
a second boundary region located below the second control electrode and formed by a second B layer;
a second A extension layer extending from one end of the second boundary region; and
a second B extension layer of the second B layer extending from the other end of the second boundary region.