Semiconductor memory device and method of fabricating the same
Disclosed are semiconductor memory devices and methods of fabricating the same. The semiconductor memory device comprises a capacitor that includes a bottom electrode, a top electrode opposite to the bottom electrode across a dielectric layer, and an interface layer between the bottom electrode and the dielectric layer. The interface layer includes a combination of niobium (Nb), titanium (Ti), oxygen (O), and nitrogen (N), and further includes a constituent of the dielectric layer.
1. A semiconductor memory device, comprising a capacitor that includes a bottom electrode, a top electrode opposite to the bottom electrode across a dielectric layer, and a first interface layer between the bottom electrode and the dielectric layer,
wherein the first interface layer includes a combination of niobium (Nb), titanium (Ti), oxygen (O), and nitrogen (N), and further includes a constituent of the dielectric layer.
2. The semiconductor memory device of claim 1 , wherein the constituent of the dielectric layer includes metal.
3. The semiconductor memory device of claim 1 , wherein niobium (Nb) contained in the first interface layer has an amount of about 5 at % or less.
4. The semiconductor memory device of claim 1 , wherein niobium (Nb) contained in the first interface layer has an amount of about 2 at % to about 3 at %.
5. The semiconductor memory device of claim 1 , wherein the first interface layer includes HfNbTiON or ZrNbTiON.
6. The semiconductor memory device of claim 1 , wherein the dielectric layer includes an oxide layer of hafnium (Hf), niobium (Nb), titanium (Ti), tantalum (Ta), zirconium (Zr), chromium (Cr), cobalt (Co), iridium (Ir), molybdenum (Mo), osmium (Os), rhenium (Re), rhodium (Rh), ruthenium (Ru), tungsten (W), vanadium (V), or any combination thereof.
7. The semiconductor memory device of claim 1 , wherein
the dielectric layer includes zirconium oxide (ZrO x ), hafnium oxide (HfO x ), titanium oxide (TiO x ), or any combination thereof, and
the first interface layer includes one of HfNbTiON, ZrNbTiON, and a combination thereof.
8. The semiconductor memory device of claim 1 , wherein the capacitor further includes a second interface layer between the top electrode and the dielectric layer.
9. The semiconductor memory device of claim 8 , wherein the second interface layer has the same constituent as that of the first interface layer.
10. The semiconductor memory device of claim 8 , wherein the second interface layer includes a combination of niobium (Nb), titanium (Ti), oxygen (O), and nitrogen (N), and further includes a metallic constituent of the dielectric layer.
11. A semiconductor memory device, comprising a capacitor that includes:
a bottom electrode;
a dielectric layer on the bottom electrode;
a top electrode on the dielectric layer; and
a lower interface layer between the bottom electrode and the dielectric layer,
wherein the lower interface layer includes NbTiON and a metallic constituent of the dielectric layer,
wherein niobium (Nb) contained in the lower interface layer has a maximum amount of about 5 at %.
12. The semiconductor memory device of claim 11 , wherein the metallic constituent includes hafnium (Hf), zirconium (Zr), or a combination thereof.
13. The semiconductor memory device of claim 12 , wherein the capacitor further includes an upper interface layer between the dielectric layer and the top electrode,
wherein the upper interface layer includes NbTiON and a metallic constituent of the dielectric layer,
wherein niobium (Nb) contained in the upper interface layer has a maximum amount of about 5 at %.
14. The semiconductor memory device of claim 13 , wherein niobium (Nb) contained in one or both of the lower and upper interface layers has an amount of about 2 at % to about 3 at %.
15. The semiconductor memory device of claim 13 , wherein each of the lower and upper interface layers include ZrNbTiON or HfNbTiON.
16. The semiconductor memory device of claim 13 , wherein
one of the lower and upper interface layers includes ZrNbTiON, and
the other of the lower and upper interface layers includes HfNbTiON.
17. A semiconductor memory device, comprising a capacitor connected to a transistor on a substrate,
wherein the capacitor includes:
a plurality of bottom electrodes supported by a support pattern, the support pattern connected to sidewalls of the bottom electrodes adjacent to the support pattern;
a top electrode on the bottom electrodes;
a dielectric layer between the top electrode and the bottom electrodes, the dielectric layer extending along surfaces of the bottom electrodes; and
a lower interface layer between the dielectric layer and each of the bottom electrodes,
wherein the lower interface layer includes MNbTiON,
wherein M is one of hafnium (Hf), zirconium (Zr), and a combination thereof.
18. The semiconductor memory device of claim 17 , wherein niobium (Nb) contained in the lower interface layer has an amount of about 5 at % or less, narrowly about 2 at % to about 3 at %.
19. The semiconductor memory device of claim 17 , wherein the lower interface layer extends discontinuously along the bottom electrodes and is not on the support pattern.
20. The semiconductor memory device of claim 17 , wherein the capacitor further includes an upper interface layer between the dielectric layer and the top electrode,
wherein the upper interface layer includes NbTiON and further includes one of hafnium (Hf), zirconium (Zr), and a combination thereof.