Semiconductor device
An amplifier circuit including a semiconductor element is formed on a substrate. A protection circuit is formed including a plurality of protection diodes that are formed on the substrate and that are connected in series with each other, the protection circuit being connected to an output terminal of the amplifier circuit. A pad conductive layer is formed that at least partially includes a pad for connecting to a circuit outside the substrate. An insulating protective film covers the pad conductive layer. The insulating protective film includes an opening that exposes a partial area of a surface of the pad conductive layer, and that covers another area. A first bump is formed on the pad conductive layer on a bottom surface of the opening, and a second bump at least partially overlaps the protection circuit in plan view and is connected to a ground (GND) potential connected to the amplifier circuit.
1. A semiconductor device comprising:
an amplifier circuit including a semiconductor element formed on a substrate;
a protection circuit including a plurality of protection diodes that are formed on the substrate and that are connected in series with each other, the protection circuit being connected to an output terminal of the amplifier circuit;
a pad conductive layer at least partially including a pad for connecting to a circuit outside the substrate;
an insulating protective film covering the pad conductive layer, the insulating protective film including an opening that exposes a partial area of a surface of the pad conductive layer, the insulating protective film covering another area;
a first bump formed on the pad conductive layer on a bottom surface of the opening; and
a second bump at least partially overlapping the protection circuit in plan view and connected to a ground (GND) potential connected to the amplifier circuit.
2. The semiconductor device according to claim 1 , wherein the second bump at least partially overlaps a transistor included in the amplifier circuit.
3. The semiconductor device according to claim 2 , wherein at least one of the bumps is formed in an ellipse shape.
4. The semiconductor device according to claim 1 , wherein the plurality of protection diodes form a diode array folded back in a middle of the diode array in plan view, and part of the protection circuit is arranged outside the second bump.
5. The semiconductor device according to claim 2 , wherein the plurality of protection diodes form a diode array folded back in a middle of the diode array in plan view, and part of the protection circuit is arranged outside the second bump.
6. The semiconductor device according to claim 3 , wherein the plurality of protection diodes form a diode array folded back in a middle of the diode array in plan view, and part of the protection circuit is arranged outside the second bump.
7. The semiconductor device according to claim 1 , wherein the plurality of protection diodes form a diode array of diodes that are aligned with one another, and part of the protection circuit is arranged outside the second bump.
8. The semiconductor device according to claim 2 , wherein the plurality of protection diodes form a diode array of diodes that are aligned with one another, and part of the protection circuit is arranged outside the second bump.
9. The semiconductor device according to claim 3 , wherein the plurality of protection diodes form a diode array of diodes that are aligned with one another, and part of the protection circuit is arranged outside the second bump.
10. The semiconductor device according to claim 1 , the first bump being arranged parallel to the second bump.
11. The semiconductor device according to claim 2 , the first bump being arranged parallel to the second bump.
12. The semiconductor device according to claim 3 , the first bump being arranged parallel to the second bump.
13. The semiconductor device according to claim 1 , further comprising a third bump, the third bump being arranged parallel to one or both of the first bump or the second bump.
14. The semiconductor device according to claim 2 , further comprising a third bump, the third bump being arranged parallel to one or both of the first bump or the second bump.
15. The semiconductor device according to claim 3 , further comprising a third bump, the third bump being arranged parallel to one or both of the first bump or the second bump.