Semiconductor memory device
A semiconductor memory device includes two first electrode films, a first column and a second insulating film. The two first electrode films extend in a first direction and are separated from each other in a second direction. The first column is provided between the two first electrode films and has a plurality of first members and a plurality of insulating members. Each of the first members and each of the insulating members are arranged alternately in the first direction. One of the plurality of first members has a semiconductor pillar, a second electrode film and a first insulating film provided between the semiconductor pillar and the second electrode film. The semiconductor pillar, the first insulating film and the second electrode film are arranged in the second direction. The second insulating film is provided between the first column and one of the two first electrode films.
1. A semiconductor memory device comprising:
a first semiconductor pillar extending in a first direction;
a second semiconductor pillar extending in the first direction, the first semiconductor pillar and the second semiconductor pillar being arranged in a second direction intersecting the first direction;
a first insulating layer provided between the first semiconductor pillar and the second semiconductor pillar;
a first electrode film extending in a third direction intersecting the first direction and the second direction;
a second electrode film extending in the third direction, the first electrode film and the second electrode film being arranged in the second direction, the first pillar and the second pillar provided between the first electrode and the second electrode;
a second insulating layer provided between the first semiconductor pillar and the first electrode;
a first charge storage layer including a first face connecting to the second insulating layer and a second face opposed to the first face in the second direction, the first charge storage layer provided between the second insulating layer and the first electrode;
a third insulating layer provided between the first charge storage layer and the first electrode; and
wherein a length e second face is longer than a length of the first face in the third direction; and
wherein the first charge storage layer includes a third face, the third face continuously connected between the first face and the second face in the second and third directions.
2. The semiconductor device according to claim 1 , wherein the second face is connected to the third insulating layer.
3. The semiconductor device according to claim 1 , wherein the first insulating layer extends in the first and third directions.
4. The semiconductor device according to claim 1 , wherein the third insulating layer is not provided on a side surface of the first charge storage layer in the third direction.
5. The semiconductor device according to claim 1 , wherein the third insulating layer connects to the second insulating layer in the second direction.
6. The semiconductor device according to claim 1 , further comprising a first semiconductor connecting to a surface of a conductive material.
7. The semiconductor device according to claim 6 , further comprising:
a conductive layer extending in the first direction and connecting to the surface of the conductive material, the conductive layer being located in the second direction of the second semiconductor pillar.
8. The semiconductor device according to claim 7 , wherein a material of the first semiconductor pillar and the second semiconductor pillar is different from a material of the conductive layer.
9. The semiconductor device according to claim 7 , wherein
a length of the conductive layer in the first direction is longer than lengths of the first semiconductor pillar and the second semiconductor pillar in the first direction.
10. The semiconductor device according to claim 1 , further comprising:
a first memory provided between the first semiconductor pillar and the first electrode film; and
a second memory provided between the second semiconductor pillar and the second electrode film.
11. The semiconductor device according to claim 10 , wherein the first memory includes the second insulating layer, the first charge storage layer, and a fourth insulating layer.
12. The semiconductor device according to claim 1 , wherein the third face is curved.
13. The semiconductor device according to claim 1 , further comprising:
a third semiconductor pillar extending in the first direction, the first semiconductor pillar and the third semiconductor pillar being arranged in the third direction;
a fourth insulating layer provided between the third semiconductor pillar and the first electrode; and
a second charge storage layer including a fourth face connecting to the fourth insulating layer and a fifth face opposed to the fourth face in the second direction, the second charge storage layer provided between the fourth insulating layer and the first electrode;
wherein the third insulating layer include a sixth face, the sixth face provided between the second face and the fifth face in the third direction and provided at a different location in the second direction.
14. The semiconductor device according to claim 13 , wherein the sixth face is closer to the first electrode than the second and fifth faces in the second direction.
15. The semiconductor device according to claim 13 , wherein the first insulating layer is provided between the first semiconductor pillar and the third semiconductor pillar.
16. The semiconductor device according to claim 13 , wherein the first insulating layer is connected to the sixth face.
17. The semiconductor device according to claim 1 , wherein the third insulating layer is not provided on the third face in the third direction.
18. The semiconductor device according to claim 1 , wherein the third insulating layer is provided on two first direction sides of the first charge storage layer.