Three-dimensional memory device including bump-containing bit lines and methods for manufacturing the same
A semiconductor die can include an alternating stack of insulating layers and electrically conductive layers located on a substrate, memory stack structures extending through the alternating stack, drain regions located at a first end of a respective one of the vertical semiconductor channels of a memory stack structure, and bit lines extending over the drain regions and electrically connected to a respective subset of the drain regions. At least of a subset of the bit lines includes bump-containing bit lines. Each of the bump-containing bit lines includes a line portion and a bump portion that protrudes upward from a top surface of the line portion by a bump height. Bit line contact via structures overlie the bit lines and contact a bump portion of a respective one of the bump-containing bit lines.
1. A method of forming a semiconductor structure that comprises a first semiconductor die, the method comprising:
forming a three-dimensional memory array including memory stack structures vertically extending through an alternating stack of insulating layers and electrically conductive layers over a first substrate, wherein each of the memory stack structures comprises a respective vertical semiconductor channel and a respective memory film, and a drain region is disposed on a top end of each of the vertical semiconductor channels;
forming conductive via structures embedded within at least one connection-level dielectric layer over the drain regions;
forming bit lines on physically exposed top surfaces of the conductive via structures,
masking a first area of each of the bit lines with a respective patterned mask material portion without covering a second area of each of the bit lines;
vertically recessing portions of the bit lines that are not masked by the patterned mask material portions by performing an anisotropic etch process, wherein the bit lines are converted into bump-containing bit lines, and each of the bump-containing bit lines comprises a line portion having a uniform height between a planar bottom surface and a planar top surface and a bump portion that protrudes upward from a horizontal plane including the planar top surface of the line portion by a bump height; and
forming bit line contact via structures on a bump portion of a respective one of the bump-containing bit lines.
2. The method of claim 1 , wherein:
the bit lines have a periodic pitch along a first horizontal direction, and laterally extend along a second horizontal direction that is perpendicular to the first horizontal direction;
the patterned mask material portions comprise patterned portions of a photoresist layer that is applied over the bit lines and is patterned by lithographic exposure and development; and
each patterned portion of the photoresist layer has a width along the first horizontal direction that is not greater than the periodic pitch along the first horizontal direction.
3. The method of claim 2 , wherein:
the patterned mask material portions comprise patterned portions of a photoresist layer that is applied over the bit lines and is patterned by lithographic exposure and development; and
each patterned portion of the photoresist layer laterally extends along a horizontal direction that is at a tilt angle with respect to the second horizontal direction over a respective plurality of bit lines, wherein the tilt angle is greater than 0 degrees and is less than 45 degrees.
4. The method of claim 1 , further comprising:
forming a bit-line-level dielectric layer over the at least one connection-level dielectric layer;
forming line trenches laterally extending along the second horizontal direction through the bit-line-level dielectric layer, wherein top surfaces of a respective subset of the conductive via structures are physically exposed underneath each of the line trenches;
forming the bit lines by depositing at least one conductive material in the line trenches,
wherein:
each patterned mask material portion covers a respective portion of the bit-line-level dielectric layer;
portions of the bit-line-level dielectric layer that are covered by the patterned mask material portions have a respective top surface that is coplanar with top surfaces of the bump portions of the bit lines; and
portions of the bit-line-level dielectric layer that are not covered by the patterned mask material portions are vertically recessed from a horizontal plane including the top surfaces of the bump portions of the bit lines.
5. The method of claim 1 , further comprising:
forming a via-level dielectric layer over the bump-containing bit lines;
forming via cavities extending through the via-level dielectric layer, wherein a top surface and upper portions of a pair of lengthwise sidewall segments of a respective bump portion are physically exposed underneath each of the via cavities; and
forming the bit line contact via structures on a respective one of the bump portions by depositing at least one conductive material in the via cavities.
6. The method of claim 1 , further comprising:
forming a first pad-level dielectric layer over the bit line contact via structures; and
forming first bonding pads in the first pad-level dielectric layer directly on a top surface of a respective one of the bit line contact via structures.
7. The method of claim 6 , further comprising:
providing a second semiconductor die that comprises:
semiconductor devices located on a second substrate,
dielectric material layers embedding metal interconnect structures and electrically connected to the semiconductor devices, and
second bonding pads embedded in a second pad-level dielectric layer that is located in the dielectric material layers; and
bonding the second bonding pads to a respective one of the first bonding pads to form a bonded assembly including the first semiconductor die and the second semiconductor die.