IP Library Granted Patent US 11,837,457
Granted Patent B2
US 11,837,457 · App. 17/018,721 · Granted Dec 5, 2023

Packaging for RF transistor amplifiers

Inventors: Basim Noori (San Jose, CA); Marvin Marbell (Morgan Hill, CA); Scott Sheppard (Chapel Hill, NC); Kwangmo Chris Lim (San Jose, CA); Alexander Komposch (Morgan Hill, CA); Qianli Mu (San Jose, CA)
Assignee: Wolfspeed, Inc.
H01L23/5389H01L23/49811H01L23/5386H01L23/66H01L24/16H01L24/32H01L25/16H01L25/50H01L29/41741H01L29/4238H01L2223/6644H01L2223/6655H01L2224/16227H01L2224/32245H01L2924/1033H01L2924/10253H01L2924/10272H01L2924/10344H01L2924/10346H01L2924/13064H01L2924/19105
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Quick Facts
Patent No.
US 11,837,457
App. No.
17/018,721
Granted
Dec 5, 2023
Kind
B2
Abstract

RF transistor amplifiers an RF transistor amplifier die having a semiconductor layer structure, an interconnect structure having first and second opposing sides, wherein the first side of the interconnect structure is adjacent a surface of the RF transistor amplifier die such that the interconnect structure and the RF transistor amplifier die are in a stacked arrangement, and one or more circuit elements on the first and/or second side of the interconnect structure.

Claims (56)

1. A radio frequency (“RF”) transistor amplifier, comprising:

an RF transistor amplifier die;

an interconnect structure having first and second opposing sides, wherein the first side of the interconnect structure is adjacent a first surface of the RF transistor amplifier die such that the interconnect structure and the RF transistor amplifier die are in a stacked arrangement;

one or more circuit elements on the first and/or second side of the interconnect structure;

an encapsulating material on the RF transistor amplifier die and the interconnect structure; and

an auxiliary spacer on the one or more circuit elements.

2. The RF transistor amplifier of claim 1 , wherein the RF transistor amplifier die further includes a gate terminal and a drain terminal on the first surface of the RF transistor amplifier die and a source terminal on a second surface of the RF transistor amplifier die.

3. The RF transistor amplifier of claim 2 , further comprising a spacer that is on and electrically connected to the source terminal of the RF transistor amplifier die.

4. The RF transistor amplifier of claim 3 , wherein the encapsulating material is also on the spacer.

5. The RF transistor amplifier of claim 3 , wherein the spacer and the auxiliary spacer comprise a single monolithic structure.

6. The RF transistor amplifier of claim 1 , wherein the one or more circuit elements include circuitry comprising at least part of harmonic terminating circuitry and/or impedance matching circuitry.

7. The RF transistor amplifier of claim 1 , wherein the encapsulating material exposes a surface of the auxiliary spacer.

8. A radio frequency (“RF”) transistor amplifier, comprising:

an RF transistor amplifier die having a semiconductor layer structure;

an interconnect structure having first and second opposing sides, wherein the first side of the interconnect structure is adjacent a first surface of the RF transistor amplifier die such that the interconnect structure and the RF transistor amplifier die are in a stacked arrangement;

one or more circuit elements on the first and/or second side of the interconnect structure; and

an encapsulating material on the RF transistor amplifier die and the interconnect structure,

wherein the encapsulating material exposes a surface of the one or more circuit elements.

9. A radio frequency (“RF”) transistor amplifier package comprising:

an RF transistor amplifier die having a first major surface and a second major surface on an opposite side of the RF transistor amplifier die from the first major surface, the RF transistor amplifier die comprising a gate terminal and a drain terminal on the first major surface and a source terminal on the second major surface;

an interconnect structure on the first major surface of the RF transistor amplifier die, the interconnect structure comprising a gate lead pad electrically coupled to the gate terminal and a drain lead pad electrically coupled to the drain terminal;

an input lead extending from outside the RF transistor amplifier package and electrically coupled to the gate lead pad; and

an output lead extending from outside the RF transistor amplifier package and electrically coupled to the drain lead pad,

wherein the input lead is electrically coupled to the gate lead pad by a through via in an encapsulating material on the interconnect structure.

10. The RF transistor amplifier package of claim 9 , wherein the interconnect structure further comprises:

a first side adjacent the first major surface of the RF transistor amplifier die and a second side opposite the first side; and

one or more circuit elements that are coupled between the gate terminal and the input lead and/or between the drain terminal and the output lead.

11. The RF transistor amplifier package of claim 10 , further comprising an auxiliary spacer that is on the one or more circuit elements.

12. The RF transistor amplifier package of claim 9 , further comprising a spacer that is on and electrically connected to the source terminal of the RF transistor amplifier die.

13. The RF transistor amplifier package of claim 12 , further comprising a carrier substrate on the second major surface of the RF transistor amplifier die, with the spacer therebetween.

14. The RF transistor amplifier package of claim 13 , wherein the spacer is electrically connected to the carrier substrate.

15. The RF transistor amplifier package of claim 9 , wherein the interconnect structure comprises an input matching circuit and/or an output matching circuit.

16. A transistor amplifier package, comprising:

a group III-nitride based amplifier die comprising a first major surface and a second major surface on an opposite side of the amplifier die from the first major surface, the amplifier die comprising a gate terminal and a drain terminal on the first major surface and a source terminal on the second major surface; and

an interconnect structure on the first major surface of the amplifier die and electrically coupled to the gate terminal and drain terminal, wherein the interconnect structure comprises one or more circuit elements that are coupled between the gate terminal and a first lead of the transistor amplifier package and/or between the drain terminal and a second lead of the transistor amplifier package,

wherein the interconnect structure has a first side and a second side that is on an opposite side of the interconnect structure from the first side, wherein the first side of the interconnect structure is adjacent the first major surface of the amplifier die,

wherein the first lead and the second lead are coupled to the first side of the interconnect structure or the second side of the interconnect structure.

17. The transistor amplifier package of claim 16 , wherein the one or more circuit elements are mounted on the first side and/or second side of the interconnect structure.

18. The transistor amplifier package of claim 16 , further comprising a spacer that is on and electrically connected to the source terminal of the amplifier die.

19. The transistor amplifier package of claim 18 , further comprising an encapsulating material on the amplifier die, the interconnect structure, and the spacer.

20. The transistor amplifier package of claim 19 , further comprising an auxiliary spacer on at least one of the one or more circuit elements.

21. The transistor amplifier package of claim 16 , wherein the one or more circuit elements include circuitry comprising at least part of harmonic terminating circuitry and/or impedance matching circuitry.

22. A radio frequency (“RF”) transistor amplifier, comprising:

an RF transistor amplifier die;

an interconnect structure having first and second opposing sides, wherein the first side of the interconnect structure is adjacent a first surface of the RF transistor amplifier die such that the interconnect structure and the RF transistor amplifier die are in a stacked arrangement;

one or more harmonic terminating circuit elements and/or impedance matching circuit elements on the second side of the interconnect structure; and

an encapsulating material on the RF transistor amplifier die and the interconnect structure.

23. The RF transistor amplifier of claim 22 , wherein the RF transistor amplifier die comprises a gate terminal, the RF transistor amplifier further comprising:

a gate lead pad that is electrically coupled to the gate terminal;

an input lead that is electrically coupled to the gate lead pad by a through via in the encapsulating material.

24. A radio frequency (“RF”) transistor amplifier, comprising:

an RF transistor amplifier die that comprises a gate terminal;

an interconnect structure having first and second opposing sides, wherein the first side of the interconnect structure is adjacent a first surface of the RF transistor amplifier die such that the interconnect structure and the RF transistor amplifier die are in a stacked arrangement;

a circuit element on the first side of the interconnect structure that is coupled to the gate terminal;

an encapsulating material on the RF transistor amplifier die, the circuit element and the interconnect structure; and

an input lead that is electrically coupled to the circuit element by a through via in the interconnect structure.

Assignments (6)
RELEASE OF SECURITY INTEREST IN INTELLECTUAL PROPERTY COLLATERAL AT REEL/FRAME NO. 64185/0755 Recorded Sep 30, 2025
From: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: WOLFSPEED, INC.
Reel/Frame 072989/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 29, 2023
From: WOLFSPEED, INC.
To: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
Reel/Frame 066236/0086 →
RELEASE OF SECURITY INTEREST IN PATENT COLLATERAL AT REEL/FRAME NO. 64185/0755 Recorded Dec 4, 2023
From: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: WOLFSPEED, INC.
Reel/Frame 065758/0625 →
SECURITY INTEREST Recorded Jun 30, 2023
From: WOLFSPEED, INC.
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION
Reel/Frame 064185/0755 →
CHANGE OF NAME Recorded Jan 24, 2022
From: CREE, INC.
To: WOLFSPEED, INC.
Reel/Frame 058823/0351 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 14, 2020
From: SHEPPARD, SCOTT; NOORI, BASIM; MARBELL, MARVIN; LIM, KWANGMO CHRIS; KOMPOSCH, ALEXANDER; MU, QIANLI
To: CREE, INC.
Reel/Frame 054629/0340 →