Method for forming hermetic package for a power semiconductor
A method for fabricating a hermetic electronic package includes providing a package body; hermetically coupling a package base plate to the package body; thermally coupling a substrate to the base plate; thermally mounting a semiconductor device to the substrate; bonding at least one high-current input/output (I/O) terminal to the first metalized region of the substrate by a strap terminal that is an integral high current heatsink terminal. A ceramic seal surrounding the at least one high-current I/O terminal is hermetically bonded to an outer surface of the package body. A metal hermetic seal washer surrounding the at least one high-current I/O terminal is hermetically bonded to the ceramic seal and to a portion of the at least one high-current I/O terminal. A lid is seam welded onto the package body.
1. A method of fabricating a hermetic electronic package comprising:
providing a package body;
hermetically coupling a package base plate to a first end of the package body;
thermally coupling a substrate to the base plate, the substrate having a plurality of metalized regions;
mounting a semiconductor device to the substrate, the semiconductor device having at least one high-current output electrically bonded to a first metalized region of the substrate;
bonding at least one high-current input/output (I/O) terminal to the first metalized region of the substrate by a strap terminal that is an integral high current heatsink terminal, the at least one high-current I/O terminal passing through a respective hole formed in the package body;
hermetically bonding to an outer surface of the package body a ceramic seal surrounding the at least one high-current I/O terminal by brazing a first surface of the ceramic seal to the outer surface of the package body;
hermetically bonding a metal hermetic seal washer surrounding the at least one high-current I/O terminal to the ceramic seal and to a portion of the at least one high-current I/O terminal that passes through the metal hermetic seal washer by brazing the metal hermetic seal washer to a second surface of the ceramic seal and to the portion of the at least one high-current I/O terminal that passes through the metal hermetic seal washer; and
seam welding a lid onto the package body at a second end opposite the first end to form a hermetic seal with the package body.
2. The method of claim 1 wherein the ceramic seal is formed from one of alumina and silicon nitride and the brazing the first surface of the ceramic seal to the outer surface of the package body uses a CuAg braze.
3. The method of claim 1 wherein the brazing the metal hermetic seal washer to the second surface of the ceramic seal and to the portion of the at least one high-current I/O terminal that passes through the metal hermetic seal washer uses a CuAg braze.