Three-dimensional metal-insulator-metal (MIM) capacitor
A three-dimensional metal-insulator-metal (MIM) capacitor is formed in an integrated circuit structure. The 3D MIM capacitor may include a bottom conductor including a bottom plate portion (e.g., formed in a metal interconnect layer) and vertically-extending sidewall portions extending from the bottom plate portion. An insulator layer is formed on the bottom plate portion and the vertically extending sidewall portions of the bottom conductor. A top conductor is formed over the insulating layer, such that the top conductor is capacitively coupled to both the bottom plate portion and the vertically extending sidewall portions of the bottom conductor, to thereby define an increased area of capacitive coupling between the top and bottom conductors. The vertically extending sidewall portions of the bottom conductor may be formed in a single metal layer or by components of multiple metal layers.
1. An integrated circuit device, comprising:
at least one integrated circuit element; and
a metal-insulator-metal (MIM) capacitor, comprising:
a bottom conductor including:
a bottom plate; and
a cup-shaped conductor formed on the bottom plate and including a bottom portion and at least one vertically extending sidewall portion extending upwardly from the bottom plate;
a top conductor;
an insulator layer arranged between the top conductor and the cup-shaped conductor;
a bond pad separate from and laterally spaced apart from the top conductor; and
a conductive via laterally spaced apart from the cup-shaped conductor and conductively connecting the bond pad to the bottom plate;
wherein the cup-shaped conductor comprises a first portion of a first metal layer that partially fills a bottom conductor opening; and
wherein the conductive via comprises a second portion of the first metal layer that fully fills a conductive via opening.
2. The integrated circuit device of claim 1 , wherein the top conductor and the bond pad are formed in a common bond pad layer.
3. The integrated circuit device claim 1 , wherein the bottom plate comprises copper, the cup-shaped conductor comprises tungsten, and the top conductor comprises aluminum.
4. The integrated circuit device of claim 1 , wherein the bottom plate is defined by a portion of a copper interconnect layer.
5. The integrated circuit device of claim 1 , wherein the at least one vertically extending sidewall portion of the cup-shaped conductor comprises elements of multiple metal layers of an integrated circuit device.
6. The integrated circuit device of claim 1 , wherein the at least one sidewall portion of the cup-shaped conductor is formed in a wide tub opening having a height-to-width aspect ratio in the range of 0.5-2.0.
7. The integrated circuit device of claim 1 , wherein the at least one sidewall portion of the cup-shaped conductor is formed in a wide tub opening having a height-to-width aspect ratio in the range of 0.8-1.2.
8. The integrated circuit device of claim 1 , wherein:
the bond pad is formed from the same material as the top conductor;
the conductive via is formed from the same material as the cup-shaped conductor.
9. The integrated circuit device of claim 1 , wherein:
the at least one vertically extending sidewall portion of the cup-shaped conductor is formed in a bottom conductor opening; and
the conductive via is formed in a via opening;
wherein a lateral width of the bottom conductor opening is at least twice as large as a lateral width of the conductive via.
10. The integrated circuit device of claim 9 , wherein the bottom conductor opening and the conductive via are formed in a passivation layer.
11. The integrated circuit device of claim 9 , wherein a lateral width of the bottom conductor opening is at least five times as large as a lateral width of the conductive via.
12. The integrated circuit device of claim 1 , wherein:
the at least one vertically extending sidewall portion of the cup-shaped conductor is formed in a bottom conductor opening; and
at least a portion of the insulator layer is located in the bottom conductor opening; and
at least a portion of the top conductor is located in the bottom conductor opening and covering at least a portion of the insulator layer.
13. The integrated circuit device of claim 12 , wherein the top conductor includes a first portion located above a top portion of the insulator layer and a second portion extending downwardly into the bottom conductor opening.
14. The integrated circuit device of claim 1 , wherein:
the insulator layer is cup-shaped and defines an opening; and
at least a portion of the top conductor is located in the opening of the cup-shaped insulator layer.
15. The integrated circuit device of claim 1 , wherein the at least one integrated circuit element comprises at least one interconnect structure separate from and laterally spaced apart from the MIM capacitor.
16. The integrated circuit device of claim 15 , wherein the at least one interconnect structure comprises at least one interconnect via formed from a common metal as the conductive via of the MIM capacitor.