Method of forming split gate memory cells with thinner tunnel oxide
A method of forming a memory cell includes forming a first polysilicon block over an upper surface of a semiconductor substrate and having top surface and a side surface meeting at a sharp edge, forming an oxide layer with a first portion over the upper surface, a second portion directly on the side surface, and a third portion directly on the sharp edge, performing an etch that thins the oxide layer in a non-uniform manner such that the third portion is thinner than the first and second portions, performing an oxide deposition that thickens the first, second and third portions of the oxide layer, wherein after the oxide deposition, the third portion is thinner than the first and second portions, and forming a second polysilicon block having one portion directly on the first portion of the oxide layer and another portion directly on the third portion of the oxide layer.
1. A method of forming a memory cell, comprising:
forming a first oxide layer on an upper surface of a semiconductor substrate;
forming a first polysilicon block on the first oxide layer, wherein the first polysilicon block includes a top surface and a side surface, and wherein the top surface terminates at the side surface in a sharp edge;
forming a second oxide layer by performing a first oxide deposition, wherein the second oxide layer includes a first portion over the upper surface, a second portion directly on the side surface, and a third portion directly on the sharp edge;
performing an etch that thins the second oxide layer in a non-uniform manner such that the third portion of the second oxide layer is thinner than the first and second portions of the second oxide layer;
performing a second oxide deposition that thickens the first, second and third portions of the second oxide layer, wherein after the second oxide deposition, the third portion of the second oxide layer is thinner than the first and second portions of the second oxide layer;
forming a second polysilicon block having a first portion directly on the first portion of the second oxide layer and a second portion directly on the third portion of the second oxide layer; and
forming a source region and a drain region in the semiconductor substrate, which define a channel region of the semiconductor substrate therebetween, wherein the first polysilicon block is disposed over a first portion of the channel region and the first portion of the second polysilicon block is disposed over a second portion of the channel region.
2. The method of claim 1 , wherein after the performing the second oxide deposition, the third portion of the second oxide layer has a thickness that is approximately 25 Angstroms to 35 Angstroms less than a thickness of the first portion of the second oxide layer.
3. The method of claim 1 , wherein after the second oxide deposition, the second portion of the second oxide layer is thicker than the first portion of the second oxide layer.
4. The method of claim 1 , wherein the top surface of the first polysilicon block is concave.
5. The method of claim 1 , wherein the forming a first polysilicon block includes oxidizing the top surface of the first polysilicon block such that the top surface is concave.
6. The method of claim 1 , wherein the forming of the second oxide layer includes forming the first portion of the second oxide layer directly on the first oxide layer.
7. The method of claim 1 , further comprising:
removing a portion of the first oxide layer which is adjacent to the side surface of the first polysilicon block and not underneath the first polysilicon block, wherein the forming of the second oxide layer includes forming the first portion of the second oxide layer directly on the upper surface.
8. The method of claim 1 , wherein the performing the etch comprises using an etch radio frequency power between approximately 150 watts and 350 watts.
9. The method of claim 1 , wherein the performing the etch comprises using an etch pressure between approximately 30 millitorr and 100 millitorr.
10. The method of claim 1 , wherein the performing the etch comprises using etch gasses that include oxygen and argon, together with carbon tetrafluoride (CF4), nitrogen trifluoride (NF3) or sulfur hexafluoride (SF6).
11. The method of claim 1 , wherein the performing the etch comprises using an etch radio frequency power between approximately 150 watts and 350 watts, and using an etch pressure between approximately 30 millitorr and 100 millitorr, and using etch gasses that include oxygen and argon, together with carbon tetrafluoride (CF4), nitrogen trifluoride (NF3) or sulfur hexafluoride (SF6).