Solid-state imaging device and electronic apparatus
A solid-state imaging device includes a semiconductor layer on which a plurality of pixels are arranged along a light-receiving surface being a main surface of the semiconductor layer, photoelectric conversion units provided for the respective pixels in the semiconductor layer, and a trench element isolation area formed by providing an insulating layer in a trench pattern formed on a light-receiving surface side of the semiconductor layer, the trench element isolation area being provided at a position displaced from a pixel boundary between the pixels.
1. A light detecting device comprising:
a semiconductor substrate having a first side as a light incident side and a second side opposite to the first side, the first side and the second side each extending in a first direction;
a plurality of photoelectric conversion units disposed in the semiconductor substrate;
a first trench region disposed in the semiconductor substrate between two of the plurality of photoelectric conversion units in the first direction;
a first light shielding region disposed above the first side, wherein the first light shielding region is above at least a part of the first trench region in a second direction, the second direction being perpendicular to the first direction, and the first light shielding region is offset from a center portion of the first trench region in a third direction;
a second trench region disposed in the semiconductor substrate adjacent to at least one of the plurality of photoelectric conversion units in the first direction;
a second light shielding region disposed above the first side, wherein the second light shielding region is above at least a part of the second trench region in the second direction and offset from a center portion of the second trench region in a fourth direction opposite the third direction;
a first opening corresponding to a first color filter; and
a second opening corresponding to a second color filter, wherein a size of the first opening and a size of the second opening are substantially the same and the first color filter filters light of a different wavelength range than the second color filter.
2. The light detecting device according to claim 1 , wherein the first light shielding region is offset from a pixel boundary of a pixel in a direction associated with a wavelength of light to be received in the pixel.
3. The light detecting device according to claim 1 , further comprising a light-shielding film including the first light shielding region and the second light shielding region provided on a light-receiving side of the first side, the light-shielding film having an opening and being pattern-formed to have a line width with a pixel boundary being a center of the light-shielding film.
4. The light detecting device according to claim 1 , further comprising an insulating layer included in the first trench region and the second trench region, wherein the insulating layer includes a metal oxide.
5. The light detecting device according to claim 4 , wherein a light-shielding film is embedded in the first trench region.
6. The light detecting device according to claim 5 , wherein the light-shielding film is a metal material comprising at least one of tungsten, aluminum, titanium nitride, and titanium.
7. The light detecting device according to claim 4 , wherein the insulating layer is disposed at the first side of the semiconductor substrate.
8. The light detecting device according to claim 4 , wherein the metal oxide is at least one of hafnium, aluminum, and tantalum.
9. The light detecting device according to claim 1 , wherein the first and second color filters are provided on a light-receiving side of the first side, the first and second color filters being pattern-formed so that a center of each of the color filters corresponds to a center of a respective pixel.
10. The light detecting device according to claim 1 , further comprising an on-chip lens provided on a light-receiving side of the first side, the on-chip lens being pattern-formed so that a center of the on-chip lens corresponds to a center of a respective pixel.
11. The light detecting device according to claim 1 , wherein the semiconductor substrate includes a division area including an impurity area on a pixel boundary, the division area extending from the second side to the first trench region.
12. The light detecting device according to claim 1 , further comprising a set of pixels, wherein a first pixel in the set of pixels is closer to an edge of the set of pixels than a second pixel, wherein the first light shielding region is disposed corresponding to the first pixel and the second light shielding region is disposed corresponding to the second pixel, and wherein the first light shielding region is offset from a pixel boundary of the first pixel in a greater amount than the second light shielding region is offset from a pixel boundary of the second pixel.
13. The light detecting device according to claim 12 , further comprising a set of microlenses, wherein a first microlens is offset from the pixel boundary of the first pixel in a greater amount than a second microlens is offset from the pixel boundary of the second pixel.
14. A light detecting device comprising:
a semiconductor substrate having a first surface as a light incident surface and a second surface opposite to the first surface, the first surface and the second surface each extending in a first direction;
a first photoelectric conversion region disposed in the semiconductor substrate and corresponding to a first color filter, wherein the first photoelectric conversion region is disposed between a first trench region and a second trench region in a first cross-section view perpendicular to the first surface;
a second photoelectric conversion region disposed in the semiconductor substrate and corresponding to a second color filter, wherein the second photoelectric conversion region is disposed between a third trench region and a fourth trench region in a second cross-section view perpendicular to the first surface, wherein the first color filter filters light of a different wavelength range than the second color filter;
a first light shielding region disposed above the first surface, wherein the first light shielding region overlaps at least a part of the first trench region in a second direction, the second direction being perpendicular to the first direction, and the first light shielding region is offset from a center portion of the first trench region in a third direction;
a second light shielding region disposed adjacent to the first surface, wherein the second light shielding region overlaps at least a part of the second trench region in the second direction;
a third light shielding region disposed adjacent to the first surface, wherein the third light shielding region overlaps at least a part of the third trench region in the second direction and the third light shielding region is offset from a center portion of the third trench region in a fourth direction, the third direction being opposite the fourth direction;
a fourth light shielding region disposed adjacent to the first surface, wherein the fourth light shielding region overlaps at least a part of the fourth trench region in the second direction;
a first distance disposed between the first light shielding region and the second light shielding region and disposed above the first photoelectric conversion region; and
a second distance disposed between the third light shielding region and the second light shielding region and disposed above the second photoelectric conversion region, wherein a size of the first distance and a size of the second distance are substantially the same.
15. The light detecting device according to claim 14 , wherein the first light shielding region is offset from a pixel boundary of a pixel in a direction associated with a wavelength of light to be received in the pixel.
16. The light detecting device according to claim 14 , further comprising a light-shielding film including the first light shielding region and the second light shielding region provided on a light-receiving side of the first surface, the light-shielding film having an opening and being pattern-formed to have a line width with a pixel boundary being a center of the light-shielding film.
17. The light detecting device according to claim 14 , further comprising an insulating layer included in the first trench region and the second trench region, wherein the insulating layer includes a metal oxide.
18. The light detecting device according to claim 17 , wherein a light-shielding film is embedded in the first trench region.
19. The light detecting device according to claim 18 , wherein the light-shielding film is a metal material comprising at least one of tungsten, aluminum, titanium nitride, and titanium.
20. The light detecting device according to claim 17 , wherein the insulating layer is disposed at the first surface of the semiconductor substrate.
21. The light detecting device according to claim 17 , wherein the metal oxide is at least one of hafnium, aluminum, and tantalum.
22. The light detecting device according to claim 14 , wherein the first and second color filters are provided on a light-receiving side of the first surface, the first and second color filters being pattern-formed so that a center of each of the color filters corresponds to a center of a respective pixel.
23. The light detecting device according to claim 14 , further comprising an on-chip lens provided on a light-receiving side of the first surface, the on-chip lens being pattern-formed so that a center of the on-chip lens corresponds to a center of a respective pixel.
24. The light detecting device according to claim 14 , wherein the semiconductor substrate includes a division area including an impurity area on a pixel boundary, the division area extending from the second surface to the first trench region.
25. The light detecting device according to claim 14 , further comprising a set of pixels, wherein a first pixel in the set of pixels is closer to an edge of the set of pixels than a second pixel, wherein the first light shielding region is disposed corresponding to the first pixel and the second light shielding region is disposed corresponding to the second pixel, and wherein the first light shielding region is offset from a pixel boundary of the first pixel in a greater amount than the second light shielding region is offset from a pixel boundary of the second pixel.
26. The light detecting device according to claim 25 , further comprising a set of microlenses, wherein a first microlens is offset from the pixel boundary of the first pixel in a greater amount than a second microlens is offset from the pixel boundary of the second pixel.