IP Library Granted Patent US 12,080,660
Granted Patent B2
US 12,080,660 · App. 17/228,978 · Granted Sep 3, 2024

Package with different types of semiconductor dies attached to a flange

Inventors: Xikun Zhang (Shanghai, CN); Dejiang Chang (Shanghai, CN); Bill Agar (Morgan Hill, CA); Michael Lefevre (Morgan Hill, CA); Alexander Komposch (Morgan Hill, CA)
Assignee: MACOM Technology Solutions Holdings, Inc.
H01L23/66H01L23/49503H01L23/49568H01L23/49575H01L23/49844H01L24/27H01L24/32H01L24/83H01L24/95H01L25/072H01L25/50H01L29/16H01L23/49534H01L23/49537H01L23/49582H01L23/49586H01L24/29H01L24/48H01L24/49H01L24/73H01L24/92H01L2223/6644H01L2223/6672H01L2224/29101H01L2224/29111H01L2224/29139H01L2224/29144H01L2224/29147H01L2224/2919H01L2224/32245H01L2224/45014H01L2224/48091H01L2224/48247H01L2224/49111H01L2224/49175H01L2224/73265H01L2224/83121H01L2224/83136H01L2224/83192H01L2224/83801H01L2224/83815H01L2224/8384H01L2224/83855H01L2224/92247H01L2924/00014H01L2924/01029H01L2924/01047H01L2924/01079H01L2924/014H01L2924/10253H01L2924/10329H01L2924/1033H01L2924/13091H01L2924/19041
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Quick Facts
Patent No.
US 12,080,660
App. No.
17/228,978
Granted
Sep 3, 2024
Kind
B2
Abstract

A multi-die package includes a thermally conductive flange, a first semiconductor die made of a first semiconductor material attached to the thermally conductive flange via a first die attach material, a second semiconductor die attached to the same thermally conductive flange as the first semiconductor die via a second die attach material, and leads attached to the thermally conductive flange or to an insulating member secured to the flange. The leads are configured to provide external electrical access to the first and second semiconductor dies. The second semiconductor die is made of a second semiconductor material different than the first semiconductor material. Additional multi-die package embodiments are described.

Claims (74)

1. A multi-die package, comprising:

a thermally conductive flange;

a first semiconductor die made of a first semiconductor material attached to the thermally conductive flange via a first die attach material;

a second semiconductor die made of a second semiconductor material different than the first semiconductor material and attached to the same thermally conductive flange as the first semiconductor die via a second die attach material; and

a circuit board attached to the thermally conductive flange, the circuit board comprising a plurality of metal traces which form leads configured to provide external electrical access to the first and second semiconductor dies, and the circuit board comprising a plurality of openings,

wherein the first and second semiconductor dies are attached to the thermally conductive flange through separate ones of the plurality of openings.

2. The multi-die package of claim 1 , further comprising electrical conductors which electrically connect respective ones of the metal traces to different terminals of the first and second semiconductor dies to form a circuit.

3. The multi-die package of claim 1 , further comprising a passive semiconductor die attached to the thermally conductive flange through a same opening in the circuit board as one of the first and second semiconductor dies.

4. The multi-die package of claim 1 , wherein the circuit board is configured to be attached to the thermally conductive flange with one of the following: a glue, an electrically conductive solder, and non-conductive solder.

5. The multi-die package of claim 1 , further comprising an open-cavity package configuration comprising a lid.

6. The multi-die package of claim 1 , wherein:

the first semiconductor die comprises a main amplifier of a Doherty amplifier circuit and the second semiconductor die comprises a peaking amplifier of the Doherty amplifier circuit, and

the first die attach material is configured to hold the first semiconductor die to the thermally conductive flange during attachment of the second semiconductor die to the thermally conductive flange.

7. The multi-die package of claim 1 , wherein:

the first semiconductor die comprises a power transistor die and the second semiconductor die comprises a power transistor die,

the first die attach material has a first die attach temperature range, and

the second die attach material has a second die attach temperature range which is different than the first die attach temperature range.

8. The multi-die package of claim 1 , wherein:

the first semiconductor die comprises a GaN power amplifier die and the second semiconductor die comprises an LDMOS power amplifier die,

the first die attach material has a first die attach temperature range, and

the second die attach material has a second die attach temperature range which is different than the first die attach temperature range.

9. The multi-die package of claim 1 , wherein:

the second die attach material comprises one of AuSn, AgSn or CuSn,

the first die attach temperature range is greater than the second die attach temperature range,

the first die attach material directly attaches the first semiconductor die to the thermally conductive flange, and

the second die attach material directly attaches the second semiconductor die to the thermally conductive flange.

10. A multi-die package, comprising:

a thermally conductive flange:

a first semiconductor die made of a first semiconductor material attached to the thermally conductive flange via a first die attach material;

a second semiconductor die made of a second semiconductor material different than the first semiconductor material and attached to the same thermally conductive flange as the first semiconductor die via a second die attach material;

a circuit board attached to the thermally conductive flange, the circuit board comprising a plurality of metal traces which form leads configured to provide external electrical access to the first and second semiconductor dies, and a plurality of openings through which the first and second semiconductor dies are attached to the thermally conductive flange; and

a third semiconductor die attached to the thermally conductive flange through an additional opening in the circuit board,

wherein the third semiconductor die comprises a driver stage die,

wherein the second semiconductor die comprises a main amplifier die, and

wherein the third semiconductor die comprises a peaking amplifier die.

11. The multi-die package of claim 10 , further comprising a plurality of passive semiconductor dies attached to the thermally conductive flange through one or more of the plurality of openings in the circuit board.

12. The multi-die package of claim 11 , wherein:

at least one of the plurality of passive semiconductor dies comprises a first terminal attached to the thermally conductive flange and a second terminal facing away from the thermally conductive flange; and

the plurality of passive semiconductor dies comprise at least one of the following: a capacitor, an inductor and a resistor.

13. The multi-die package of claim 11 , wherein at least one of the plurality of passive semiconductor dies is configured to form part of one of the following: an input match network and an output match network.

14. A multi-die package, comprising:

a thermally conductive flange;

a first semiconductor die made of a first semiconductor material attached to the thermally conductive flange via a first die attach material;

a second semiconductor die made of a second semiconductor material different than the first semiconductor material and attached to the same thermally conductive flange as the first semiconductor die via a second die attach material; and

a circuit board attached to the thermally conductive flange, the circuit board comprising a plurality of metal traces which form leads, and the circuit board comprising a plurality of openings through which the first and second semiconductor dies are arranged on the thermally conductive flange in separate ones of the plurality of openings.

15. The multi-die package of claim 14 , further comprising electrical conductors which electrically connect respective ones of the metal traces to different terminals of the first and second semiconductor dies to form a circuit.

16. The multi-die package of claim 14 , further comprising a passive semiconductor die attached to the thermally conductive flange through a same opening in the circuit board as one of the first and second semiconductor dies.

17. The multi-die package of claim 14 , further comprising a third semiconductor die attached to the thermally conductive flange through an additional opening in the circuit board,

wherein the third semiconductor die comprises a driver stage die,

wherein the second semiconductor die comprises a main amplifier die, and

wherein the third semiconductor die comprises a peaking amplifier die.

18. The multi-die package of claim 17 , further comprising a plurality of passive semiconductor dies attached to the thermally conductive flange through one or more of the plurality of openings in the circuit board.

19. The multi-die package of claim 14 , wherein the circuit board is configured to be attached to the thermally conductive flange with one of the following: a glue, an electrically conductive solder, and non-conductive solder.

20. The multi-die package of claim 14 , further comprising a plurality of passive semiconductor dies attached to the thermally conductive flange through one or more of the plurality of openings in the circuit board,

wherein at least one of the plurality of passive semiconductor dies comprises a first terminal attached to the thermally conductive flange and a second terminal facing away from the thermally conductive flange.

21. The multi-die package of claim 14 , further comprising a plurality of passive semiconductor dies attached to the thermally conductive flange through one or more of the plurality of openings in the circuit board,

wherein at least one of the plurality of passive semiconductor dies is configured to form part of one of the following: an input match network and an output match network.

22. The multi-die package of claim 14 , further comprising an open-cavity package configuration comprising a lid.

23. The multi-die package of claim 14 , wherein:

the first semiconductor die comprises a main amplifier of a Doherty amplifier circuit and the second semiconductor die comprises a peaking amplifier of the Doherty amplifier circuit, and

the first die attach material is configured to hold the first semiconductor die to the thermally conductive flange during attachment of the second semiconductor die to the thermally conductive flange.

24. The multi-die package of claim 14 , wherein:

the first semiconductor die comprises a power transistor die and the second semiconductor die comprises a power transistor die,

the first die attach material has a first die attach temperature range, and

the second die attach material has a second die attach temperature range which is different than the first die attach temperature range.

25. The multi-die package of claim 14 , wherein:

the first semiconductor die comprises a GaN power amplifier die and the second semiconductor die comprises an LDMOS power amplifier die,

the first die attach material has a first die attach temperature range, and

the second die attach material has a second die attach temperature range which is different than the first die attach temperature range.

26. The multi-die package of claim 14 , wherein:

the second die attach material comprises one of AuSn, AgSn or CuSn,

the first die attach temperature range is greater than the second die attach temperature range,

the first die attach material directly attaches the first semiconductor die to the thermally conductive flange, and

the second die attach material directly attaches the second semiconductor die to the thermally conductive flange.

Assignments (7)
RELEASE OF SECURITY INTEREST IN INTELLECTUAL PROPERTY COLLATERAL AT REEL/FRAME NO. 64185/0755 Recorded Sep 30, 2025
From: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: WOLFSPEED, INC.
Reel/Frame 072989/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 5, 2024
From: WOLFSPEED, INC.
To: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
Reel/Frame 068310/0001 →
CHANGE OF NAME Recorded Aug 5, 2024
From: CREE, INC.
To: WOLFSPEED, INC.
Reel/Frame 068179/0679 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 29, 2023
From: WOLFSPEED, INC.
To: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
Reel/Frame 066236/0086 →
RELEASE OF SECURITY INTEREST IN PATENT COLLATERAL AT REEL/FRAME NO. 64185/0755 Recorded Dec 4, 2023
From: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: WOLFSPEED, INC.
Reel/Frame 065758/0625 →
SECURITY INTEREST Recorded Jun 30, 2023
From: WOLFSPEED, INC.
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION
Reel/Frame 064185/0755 →
CHANGE OF NAME Recorded Feb 14, 2022
From: CREE, INC.
To: WOLFSPEED, INC.
Reel/Frame 059085/0667 →