IP Library Granted Patent US 11,488,883
Granted Patent B1
US 11,488,883 · App. 17/229,429 · Granted Nov 1, 2022

Semiconductor device package having thermally conductive layers for heat dissipation

Inventors: Yazhou Zhang (Shanghai, CN); Jiandi Du (Shanghai, CN); Hope Chiu (Shanghai, CN); Cong Zhang (Shanghai, CN); Fen Yu (Shanghai, CN); Ada Shen (Shanghai, CN); Gary Zheng (Shanghai, CN); Honny Chen (Shanghai, CN)
Assignee: Western Digital Technologies, Inc.
H01L23/36G11C5/06H01L23/16H01L23/31H01L25/0657
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Quick Facts
Patent No.
US 11,488,883
App. No.
17/229,429
Granted
Nov 1, 2022
Kind
B1
Abstract

A semiconductor device package includes a substrate, a heat-generating component positioned on a surface of the substrate, and an encapsulant at least partially covering the heat-generating component and having an outer surface. A first heat-conducting layer is disposed between the encapsulant and the first heat-generating component. One or more pillars are in contact with the first heat-conducting layer and extend to the outer surface of the encapsulant and contact a second heat-conducting layer disposed on the outer surface of the encapsulant.

Claims (37)

1. A semiconductor device package, comprising:

a substrate;

a heat-generating component positioned on a surface of the substrate, the heat-generating component including contacts configured to make electrical contact with the substrate;

an encapsulant at least partially covering the heat-generating component, the encapsulant having an outer surface;

a first heat-conducting, the first heat-conducting layer being electrically conductive and disposed between the encapsulant and the first heat-generating component; and

one or more pillars in contact with the first heat-conducting layer, the one or more pillars extending to the outer surface of the encapsulant.

2. The semiconductor device package of claim 1 , further comprising a second heat-conducting layer on the outer surface of the encapsulant, wherein at least a portion of the encapsulant is disposed between the first heat-conducting layer and the second heat-conducting layer.

3. The semiconductor device package of claim 2 , wherein the first heat-conducting layer, the second heat-conducting layer, and the one or more pillars each comprises a material having a thermal conductivity that is at least 147 W/m·K.

4. The semiconductor device package of claim 2 , wherein the one or more pillars are in contact with the second heat-conducting layer.

5. The semiconductor device package of claim 4 , wherein the one or more pillars extend through the encapsulant from the first heat-conducting layer to the second heat-conducting layer.

6. The semiconductor device package of claim 1 , wherein the one or more pillars are positioned on the substrate and spaced from the heat-generating component.

7. The semiconductor device package of claim 6 , further comprising an underfill material disposed on the substrate between the one or more pillars and the heat-generating component.

8. The semiconductor device package of claim 7 , wherein the first heat-conducting layer is disposed between the underfill material and the encapsulant.

9. The semiconductor device package of claim 8 , wherein the first heat-generating component comprises an integrated circuit die having an active side facing the substrate and a back side opposite the active side, and wherein the first heat-conducting layer is disposed directly on the back side of the integrated circuit die and the underfill material.

10. The semiconductor device package of claim 9 , further comprising one or more NAND dies, wherein at least one of the one or more pillars is positioned between the one or more NAND dies and the integrated circuit die.

11. The semiconductor device package of claim 10 , further comprising a second heat-conducting layer formed on the outer surface of the encapsulant, wherein one or more pillars extend from the surface of the substrate to the second heat-conducting layer.

12. The semiconductor device package of claim 11 , wherein the first and second heat-conducting layers and the one or more pillars comprise copper.

13. A semiconductor device package, comprising:

a substrate;

a first heat-generating component positioned on a surface of the substrate, the first heat-generating component including an active side having contacts configured to make electrical contact with the substrate and a back side opposite the active side;

one or more second heat-generating components positioned laterally adjacent to the first heat-generating component;

an encapsulant at least partially covering the first heat-generating component and the one or more second heat-generating components, the encapsulant having an outer surface;

a heat-conducting layer disposed on a top and two lateral side surfaces of the outer surface of the encapsulant; and

a first heat-conducting spacer positioned on the back side of the first heat-generating component, the first heat-conducting spacer extending to the outer surface of the encapsulant and contacting the heat-conducting layer.

14. The semiconductor device package of claim 13 , further comprising a second heat-conducting spacer, the second heat-conducting spacer positioned between the one or more second heat-generating components and the heat-conducting layer, wherein the second heat-conducting spacer extends to the outer surface of the encapsulant and contacts the heat-conducting layer.

15. The semiconductor device package of claim 14 , wherein the first heat-conducting spacer and/or the second heat-conducting spacer are made of silicon.

16. The semiconductor device package of claim 15 , wherein the substrate includes one or more thermally conductive traces, at least one of the one or more thermally conductive traces being in contact with the heat-conducting layer.

17. The semiconductor device package of claim 16 , wherein the first heat-generating component comprises a control die and the one or more second heat-generating components comprise one or more NAND dies stacked one upon another, wherein the control die is in communication with the one or more NAND dies by way of the substrate.

18. A semiconductor device package, comprising:

a substrate means for providing electrical interconnections;

an integrated circuit die attached to a surface of the substrate means, wherein the integrated circuit die includes contact means for electrically connecting the integrated circuit die with the substrate means;

an encapsulation means for at least partially encapsulating the integrated circuit die;

a heat dissipation means sputtered onto a top and lateral side surfaces of the encapsulation means for dissipating heat generated by the integrated circuit die from the semiconductor device package to a surrounding environment;

a first heat conduction means, the first heat conduction means being electrically conductive and at least partially disposed on a surface of the integrated circuit die; and

a second heat conduction means in communication with the first heat conduction means for conducting the heat generated by the integrated circuit die to the heat dissipation means.

19. The semiconductor device package of claim 18 , wherein the first heat conduction means comprises a heat-conductive layer disposed between the integrated circuit die and the encapsulation means, and one or more pillar means for conducting heat from the heat-conductive layer to the heat dissipation means.

20. The semiconductor device package of claim 18 , wherein the first heat conduction means comprises a heat-conductive spacer in contact with the heat dissipation means, the heat-conductive spacer being positioned between the integrated circuit die and the heat dissipation means.

Assignments (10)
PARTIAL RELEASE OF SECURITY INTERESTS Recorded Apr 25, 2025
From: JPMORGAN CHASE BANK, N.A., AS AGENT
To: SANDISK TECHNOLOGIES, INC.
Reel/Frame 071382/0001 →
SECURITY AGREEMENT Recorded Apr 25, 2025
From: SANDISK TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 071050/0001 →
PATENT COLLATERAL AGREEMENT Recorded Aug 23, 2024
From: SANDISK TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS THE AGENT
Reel/Frame 068762/0494 →
CHANGE OF NAME Recorded Jun 27, 2024
From: SANDISK TECHNOLOGIES, INC.
To: SANDISK TECHNOLOGIES, INC.
Reel/Frame 067982/0032 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 29, 2024
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: SANDISK TECHNOLOGIES, INC.
Reel/Frame 067567/0682 →
PATENT COLLATERAL AGREEMENT - DDTL LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 067045/0156 →
PATENT COLLATERAL AGREEMENT - A&R LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 064715/0001 →
RELEASE OF SECURITY INTEREST AT REEL 056285 FRAME 0292 Recorded Feb 8, 2022
From: JPMORGAN CHASE BANK, N.A.
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 058982/0001 →
SECURITY INTEREST Recorded May 19, 2021
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS AGENT
Reel/Frame 056285/0292 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 15, 2021
From: ZHANG, YAZHOU; DU, JIANDI; CHIU, HOPE; ZHANG, CONG; YU, FEN; SHEN, ADA; ZHENG, GARY; CHEN, HONNY
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 055932/0498 →