Chemical-mechanical polishing composition, rinse composition, chemical-mechanical polishing method, and rinsing method
Provided is a chemical-mechanical polishing composition including an abrasive, a basic component, a polyoxyalkylene alkyl ether represented by the formula (i) RO-(AO) n —H, wherein R is a linear or branched C 1 to C 15 alkyl group, A is an alkylene group selected from the group consisting of an ethylene group, a propylene group, and a combination thereof, and n represents average addition mol numbers of AO and is 2 to 30, and an aqueous carrier, a rinse composition including the polyoxyalkylene alkyl ether and an aqueous carrier, and a substrate chemical-mechanical polishing method and a rinsing method in which these are used.
1. A chemical mechanical polishing composition comprising:
a polishing agent;
a basic component;
a polyoxyalkylene alkyl ether represented by Formula (i) RO-(AO) n —H, where R represents a linear or branched C 11 -C 15 alkyl group, A represents an alkylene group selected from a group consisting of an ethylene group, a propylene group, and a combination thereof, and n represents the average number of moles of added AO groups, the number being from 6 to 30; and
an aqueous carrier.
2. A chemical-mechanical polishing composition according to claim 1 , further comprising a water-soluble polymer other than the polyoxyalkylene alkyl ether.
3. A chemical mechanical polishing composition according to claim 2 , wherein the water-soluble polymer includes at least one type selected from a group consisting of a cellulose derivative, a polymer containing a polyvinyl alcohol structural unit, an alkylene polyalkylene oxide amine polymer including at least two repeating structural units having a tertiary amine with an alkylene group and a polyalkylene oxide group bonded to an N atom, and any combination thereof.
4. A chemical mechanical polishing composition according to claim 3 , wherein the water-soluble polymer includes a cellulose derivative, a polymer containing a polyvinyl alcohol structural unit, and an alkylene polyalkylene oxide amine polymer including at least two repeating structural units having a tertiary amine with an alkylene group and a polyalkylene oxide group bonded to an N atom.
5. A chemical mechanical polishing composition according to claim 3 , wherein the water-soluble polymer is a polymer containing a polyvinyl alcohol structural unit.
6. A chemical mechanical polishing composition comprising:
a polishing agent;
a basic component;
a polyoxyalkylene alkyl ether including at least one of polyoxyethylene oxypropylene 2-propyl heptyl ether and polyoxyethylene isotridecyl ether;
further comprising a water-soluble polymer other than the polyoxyalkylene alkyl ether; and
an aqueous carrier.
7. A chemical mechanical polishing composition comprising:
a polishing agent;
a basic component;
a polyoxyalkylene alkyl ether represented by Formula (i) RO-(AO) n —H, where R represents a linear or branched C 1 -C 15 alkyl group, A represents an alkylene group selected from a group consisting of an ethylene group, a propylene group, and a combination thereof, and n represents the average number of moles of added AO groups, the number being from 2 to 30;
an aqueous carrier; and
a water-soluble polymer containing an alkylene polyalkylene oxide amine polymer including at least two repeating structural units having a tertiary amine with an alkylene group and a polyalkylene oxide group bonded to an N atom.
8. A chemical mechanical polishing method for a base material comprising the steps of:
bringing a base material into contact with a polishing pad and a chemical mechanical polishing composition of claim 1 ;
moving the polishing pad against the base material with the chemical mechanical polishing composition interposed therebetween; and
removing at least some of the base material to polish the base material.
9. A rinsing composition comprising:
a polyoxyalkylene alkyl ether represented by Formula (i) RO-(AO) n —H, where R represents a linear or branched C 11 -C 15 alkyl group, A represents an alkylene group selected from a group consisting of an ethylene group, a propylene group, and a combination thereof, and n represents the average number of moles of added AO groups, the number being from 6 to 30 and an aqueous carrier.
10. A rinsing composition according to claim 9 , further comprising a water-soluble polymer other than the polyoxyalkylene alkyl ether.
11. A rinsing composition according to claim 10 , wherein the water-soluble polymer includes at least one type selected from a group consisting of a cellulose derivative, a polymer containing a polyvinyl alcohol structural unit, an alkylene polyalkylene oxide amine polymer including at least two repeating structural units having a tertiary amine with an alkylene group and a polyalkylene oxide group bonded to an N atom, and any combination thereof.
12. A rinsing composition according to claim 11 , wherein the water-soluble polymer includes a cellulose derivative, a polymer containing a polyvinyl alcohol structural unit, and an alkylene polyalkylene oxide amine polymer including at least two repeating structural units having a tertiary amine with an alkylene group and a polyalkylene oxide group bonded to an N atom.
13. A rinsing composition according to claim 11 , wherein the water-soluble polymer is a polymer containing a polyvinyl alcohol structural unit.
14. A rinsing method for a base material comprising the steps of:
bringing a base material after chemical mechanical polishing into contact with a polishing pad and a rinsing composition of claim 9 ; and
moving the polishing pad against the base material with the rinsing composition interposed therebetween.
15. A rinsing composition comprising: a polyoxyalkylene alkyl ether represented by Formula (i) RO-(AO) n —H, where R represents a linear or branched C 1 -C 15 alkyl group, A represents an alkylene group selected from a group consisting of an ethylene group, a propylene group, and a combination thereof, and n represents the average number of moles of added AO groups, the number being from 2 to 30;
an aqueous carrier; and
a water-soluble polymer containing an alkylene polyalkylene oxide amine polymer including at least two repeating structural units having a tertiary amine with an alkylene group and a polyalkylene oxide group bonded to an N atom.