Three-dimensional memory device including low-k drain-select-level isolation structures and methods of forming the same
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, an array of memory opening fill structures located within an array of memory openings vertically extending through the alternating stack, and a drain-select-level isolation structure vertically extending through drain-select-level electrically conductive layers between two rows of memory opening fill structures. The drain-select-level isolation structure may comprise a low-k dielectric material or an air gap.
1. A three-dimensional memory device, comprising:
an alternating stack of insulating layers and electrically conductive layers located over a substrate, wherein the electrically conductive layers comprise word-line-level electrically conductive layers and drain-select-level electrically conductive layers overlying the word-line-level electrically conductive layers;
an array of memory opening fill structures located within an array of memory openings vertically extending through the alternating stack;
a drain-select-level isolation structure vertically extending through the drain-select-level electrically conductive layers and having an effective dielectric constant that is less than 3.9;
a contact-level dielectric layer overlying the alternating stack and the array of memory opening fill structures;
drain contact via structures vertically extending through the contact-level dielectric layer and contacting a top surface of a respective one of the memory opening fill structures;
a first backside trench fill structure laterally extending along the first horizontal direction and contacting first sidewalls of each layer within the alternating stack; and
a second backside trench fill structure laterally extending along the first horizontal direction and laterally spaced from the first backside trench fill structure and contacting second sidewalls of each layer within the alternating stack,
wherein:
the array of memory opening fill structures comprises two rows of first memory opening fill structures that are arranged along a first horizontal direction;
each of the first memory opening fill structures comprises a respective planar straight sidewall in contact with a respective portion of a pair of straight sidewalls of the drain-select-level isolation structure; and
top surfaces of the first backside trench fill structure and the second backside trench fill structure are located within a horizontal plane including a top surface of the contact-level dielectric layer; and
further comprising a capping dielectric material layer comprising a horizontally-extending portion that overlies the top surface of the contact-level dielectric layer, wherein the drain-select-level isolation structure comprises a vertically-extending portion of the capping dielectric material layer.
2. The three-dimensional memory device of claim 1 , wherein top surfaces of the drain contact via structures are located within a horizontal plane including a top surface of the capping dielectric material layer.
3. The three-dimensional memory device of claim 1 , wherein a subset of the drain contact via structures comprises a respective vertically straight and laterally convex sidewall that contacts a vertically straight and laterally concave sidewall segment of the drain-select-level isolation structure.
4. The three-dimensional memory device of claim 1 , wherein one of the drain contact via structures comprises a bottom surface contacting a top surface of one of the drain regions and a downward-protruding portion contacting a planar sidewall of the one of the drain regions.
5. The three-dimensional memory device of claim 1 , wherein the drain-select-level isolation structure comprises an air gap encapsulated by a dielectric material portion of the capping dielectric material layer.
6. The three-dimensional memory device of claim 1 , wherein the capping dielectric material layer comprises organosilicate glass.
7. The three-dimensional memory device of claim 1 , wherein:
top surfaces of the drain contact via structures are located below a horizontal plane including a top surface of the capping dielectric material layer and above a horizontal plane including the top surface of the contact-level dielectric layer; and
the capping dielectric material layer embeds an air gap including a lower portion located within the drain-select-level isolation structure and an upper portion located above the horizontal plane including the top surface of the contact-level dielectric layer.