IP Library › Granted Patent US 11,177,140
Granted Patent B2
US 11,177,140 · App. 17/346,574 · Granted Nov 16, 2021

3D semiconductor device and structure

Inventors: Zvi Or-Bach (Haifa, IL); Brian Cronquist (Klamath Falls, OR); Deepak Sekar (Sunnyvale, CA)
Assignee: MONOLITHIC 3D INC.
H01L21/4871H01L21/823487H01L23/34H01L23/367H01L23/3677H01L23/49827H01L23/49838H01L23/5226H01L23/60H01L25/0657H01L25/50H01L27/0207H01L27/0248H01L27/0688H01L27/092H01L27/098H01L23/373H01L23/3732H01L2225/06527H01L2225/06541H01L2225/06589H01L2924/0002
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Quick Facts
Patent No.
US 11,177,140
App. No.
17/346,574
Granted
Nov 16, 2021
Kind
B2
Abstract

A 3D semiconductor device, the device including: a first level, wherein said first level comprises a first layer, said first layer comprising first transistors, and wherein said first level comprises a second layer, said second layer comprising first interconnections; a second level overlaying said first level, wherein said second level comprises a third layer, said third layer comprising second transistors, and wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and a plurality of connection paths, wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors, wherein said second level is bonded to said first level, wherein said bonded comprises oxide to oxide bond regions, wherein said bonded comprises metal to metal bond regions, wherein said second level comprises at least one Electrostatic discharge (ESD) circuit.

Claims (85)

1. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises at least one Electrostatic discharge (ESD) circuit.

2. The device according to claim 1 ,

wherein said second level comprises at least one Phase Lock Loop (“PLL) circuit.

3. The device according to claim 1 ,

wherein said second level comprises at least one SerDes circuit.

4. The device according to claim 1 , further comprising:

a heat removal path from said third level to an external surface of said device.

5. The device according to claim 1 ,

wherein at least one of said second transistors comprise a high-k metal gate.

6. The device according to claim 1 , further comprising:

at least one memory array,

wherein said second level comprises said at least one memory array,

wherein said first level comprises at least one control circuit, and

wherein said at least one control circuit controls read operations of said at least one memory array.

7. The device according to claim 1 ,

wherein at least one of said second transistors is a FinFET type transistor.

8. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises a rectangular guard-ring structure, and

wherein said second transistors and said second interconnections are surrounded by said guard-ring structure.

9. The device according to claim 8 ,

wherein said second level comprises at least one PLL circuit.

10. The device according to claim 8 ,

wherein said second level comprises at least one SerDes circuit.

11. The device according to claim 8 ,

wherein at least one of said second transistors comprises a raised source and a raised drain.

12. The device according to claim 8 ,

wherein said second level comprises at least one ElectroStatic Discharge (ESD) circuit.

13. The device according to claim 8 , further comprising:

at least one memory array,

wherein said second level comprises said at least one memory array,

wherein said first level comprises at least one control circuit, and

wherein said at least one control circuit controls read operations of said at least one memory array.

14. The device according to claim 8 ,

wherein at least one of said second transistors is a FinFET type transistor.

15. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said first level comprises first dice lines,

wherein said second level comprises second dice lines, and

wherein said second dice lines are aligned to said first dice lines with less than 1 micron alignment error.

16. The device according to claim 15 , further comprising:

a heat removal path from said third level to an external surface of said device.

17. The device according to claim 15 ,

wherein said second level comprises at least one SerDes circuit.

18. The device according to claim 15 ,

wherein at least one of said second transistors comprises a raised source and a raised drain.

19. The device according to claim 15 , further comprising:

at least one memory array,

wherein said second level comprises said at least one memory array,

wherein said first level comprises at least one control circuit, and

wherein said at least one control circuit controls at least part of data written to said at least one memory array.

20. The device according to claim 15 ,

wherein at least one of said second transistors is a FinFET type transistor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 14, 2021
From: OR-BACH, ZVI; CRONQUIST, BRIAN; SEKAR, DEEPAK
To: MONOLITHIC 3D INC.
Reel/Frame 056532/0155 →
Continuity (11)
Continuation In Part 17222960 · Apr 5, 2021
Continuation In Part 17115766 · Dec 8, 2020
Continuation In Part 17061563 · Oct 1, 2020
Continuation In Part 16114211 · Aug 28, 2018
Continuation In Part 15913917 · Mar 6, 2018
Continuation In Part 15470872 · Mar 27, 2017
Continuation In Part 13864245 · Apr 17, 2013
Continuation 13803437 · Mar 14, 2013
Continuation In Part 13731108 · Dec 30, 2012
Continuation 13730897 · Dec 29, 2012
Related Publication 20210305063A1 · Sep 30, 2021
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