Semiconductor device
A semiconductor device includes a substrate, a channel layer, an insulating layer, source/drain contacts, a gate dielectric layer, and a gate electrode. The channel layer over the substrate and includes two dimensional (2D) material. The insulating layer is on the channel layer. The source/drain contacts are over the channel layer. The gate dielectric layer is over the insulating layer and the channel layer. The gate electrode is over the gate dielectric layer and between the source/drain contacts.
1. A semiconductor device comprising:
a substrate;
a channel layer over the substrate and comprising:
a first layer comprising chalcogen atoms;
a second layer over the first layer and comprising transition metal; and
a third layer over the second layer and comprising chalcogen atoms;
a 2D insulating layer on the channel layer;
source/drain contacts over the channel layer and extending into the channel layer, wherein one of the source/drain contacts has opposite sidewalls both in direct contact with the 2D insulating layer and a top surface of the second layer of the channel layer;
a gate dielectric layer over the 2D insulating layer and the channel layer; and
a gate electrode over the gate dielectric layer and between the source/drain contacts, wherein the gate electrode is embedded in the gate dielectric layer.
2. The semiconductor device of claim 1 , wherein the 2D insulating layer is hexagonal boron nitride.
3. The semiconductor device of claim 1 , wherein the 2D insulating layer is separated from the second layer of the channel layer.
4. The semiconductor device of claim 1 , wherein a bottom surface of the source/drain contacts is lower than a bottom surface of the 2D insulating layer.
5. The semiconductor device of claim 1 , further comprising a buffer layer between the channel layer and the substrate, wherein the buffer layer is a monolayer.
6. The semiconductor device of claim 1 , wherein the opposite sidewalls of said one of the source/drain contacts are further both in contact with the gate dielectric layer.
7. The semiconductor device of claim 1 , wherein the gate electrode is surrounded by the gate dielectric layer on vertical sides of the gate electrode.
8. The semiconductor device of claim 1 , wherein the opposite sidewalls of said one of the source/drain contacts are further both in direct contact with the third layer of the channel layer.
9. A semiconductor device comprising:
a substrate;
a channel layer over the substrate and comprising:
a first layer comprising chalcogen atoms;
a second layer over the first layer and comprising transition metal; and
a third layer over the second layer and comprising chalcogen atoms;
a two dimensional (2D) insulating layer over the channel layer;
a gate dielectric layer over the 2D insulating layer;
a gate electrode over the gate dielectric layer, wherein the gate electrode is embedded in the gate dielectric layer; and
source/drain contacts on opposite sides of the gate electrode and passing through the gate dielectric layer and the 2D insulating layer to the channel layer, wherein the source/drain contacts are in contact with the gate dielectric layer, one of the source/drain contacts has opposite sidewalls both in direct contact with the 2D insulating layer, a contact area between said one of the source/drain contacts and the second layer of the channel layer is larger than a contact area between said one of the source/drain contacts and the third layer of the channel layer, and a bottom surface of one of the source/drain contacts is in direct contact with the second layer of the channel layer.
10. The semiconductor device of claim 9 , wherein the source/drain contacts are spaced apart from the first layer of the channel layer.
11. The semiconductor device of claim 9 , wherein bottom surfaces of the source/drain contacts are lower than a top surface of the channel layer and higher than a bottom surface of the channel layer.
12. The semiconductor device of claim 9 , wherein the 2D insulating layer comprises hexagonal boron nitride (h-BN).
13. The semiconductor device of claim 9 , further comprising a buffer layer between the channel layer and the substrate, wherein the buffer layer and the 2D insulating layer have substantially the same material.
14. The semiconductor device of claim 9 , wherein the contact area between said one of the source/drain contacts and the second layer of the channel layer is larger than a contact area between said one of the source/drain contacts and the 2D insulating layer.
15. The semiconductor device of claim 9 , wherein the contact area between said one of the source/drain contacts and the second layer of the channel layer is larger than a contact area between said one of the source/drain contacts and the first layer of the channel layer.
16. A semiconductor device comprising:
a channel layer comprising:
a first two dimensional (2D) monolayer;
a second 2D monolayer over the first 2D monolayer; and
a third 2D monolayer over the second 2D monolayer and has an electrical conductivity lower than an electrical conductivity of the second 2D monolayer;
a 2D insulating layer over the channel layer, wherein a thickness of the 2D insulating layer is about 3.0 angstroms to about 50 angstroms;
source/drain contacts over and electrically connected to the channel layer, wherein one of the source/drain contacts has opposite sidewalls both in direct contact with the 2D insulating layer, and a bottom surface of said one of the source/drain contacts is in direct contact with the second 2D monolayer of the channel layer;
a gate dielectric layer over the 2D insulating layer; and
a gate electrode over the gate dielectric layer and between the source/drain contacts, wherein a portion of the 2D insulating layer is directly between the gate electrode and the channel layer, and the gate electrode is embedded in the gate dielectric layer.
17. The semiconductor device of claim 16 , wherein an energy band gap of the 2D insulating layer is greater than about 5.5 eV.
18. The semiconductor device of claim 16 , wherein the bottom surface of the said one of the source/drain contacts is higher than a position of the first 2D monolayer of the channel layer.
19. The semiconductor device of claim 16 , wherein an electrical conductivity of the first 2D monolayer is lower than the electrical conductivity of the second 2D monolayer.
20. The semiconductor device of claim 16 , wherein said one of the source/drain contacts is laterally surrounded by the third 2D monolayer of the channel layer.