Wiring board and method for manufacturing the same
A method for manufacturing a wiring board according to the present disclosure includes: in the following order, (a) a step of irradiating an insulating layer composed of a resin composition with active energy rays; (b) a step of adsorbing an electroless plating catalyst to the insulating layer; and (c) a step of forming a metal layer on a surface of the insulating layer by electroless plating, in which in the step (a), a modified region having a thickness of 20 nm or more in a depth direction from the surface of the insulating layer and voids communicating from the surface of the insulating layer is formed by irradiation of the active energy rays.
1. A method for manufacturing a wiring board, the method comprising, in a following order:
(a) a step of irradiating an insulating layer composed of a resin composition with active energy rays;
(b) a step of adsorbing an electroless plating catalyst to the insulating layer; and
(c) a step of forming a metal layer on a surface of the insulating layer by electroless plating, wherein
in the step (a), a modified region having a thickness of 20 nm or more in a depth direction from the surface of the insulating layer and voids communicating from the surface of the insulating layer is formed by irradiation of the active energy rays.
2. The method for manufacturing a wiring board according to claim 1 , wherein in the step (c), the metal layer is formed using an electroless copper plating solution.
3. The method for manufacturing a wiring board according to claim 1 , wherein in the step (c), the metal layer is formed using an electroless copper-nickel-phosphorus plating solution.
4. The method for manufacturing a wiring board according to claim 1 , wherein the active energy rays are ultraviolet rays having a wavelength of 254 nm or less.
5. The method for manufacturing a wiring board according to claim 1 , wherein an arithmetic average roughness Ra of the surface of the insulating layer after the step (c) is 100 nm or less.
6. The method for manufacturing a wiring board according to claim 1 , wherein a nickel content rate of the metal layer is 0.25 to 20% by mass.
7. A wiring board comprising:
an insulating layer composed of a resin composition; and
a metal wiring provided on a surface of the insulating layer, wherein
the insulating layer has a modified region having a thickness of 20 nm or more in a depth direction from the surface, and
copper contained in the metal wiring is dispersed in the modified region.
8. The wiring board according to claim 7 , wherein a part of the metal wiring is formed by electroless plating, and
an electroless plating catalyst is dispersed in the modified region.
9. The wiring board according to claim 7 , wherein an average roughness Ra of the surface of the insulating layer is 100 nm or less.
10. The wiring board according to claim 7 , wherein the resin composition is a cured product of a thermosetting resin composition.
11. The wiring board according to claim 7 , wherein the resin composition is a cured product of a photosensitive resin composition.
12. The wiring board according to claim 7 , further comprising a support substrate the insulating layer being formed on,
wherein the support substrate is wafer-shaped and has a diameter of 200 mm, 300 mm or 450 mm.
13. The wiring board according to claim 7 , further comprising a support substrate the insulating layer being formed on,
wherein the support substrate is rectangular panel-shaped and has a side of 300 to 700 mm.
14. The wiring board according to claim 7 , wherein the insulating layer has a thermal expansion coefficient of 80×10 −6 /K or less.