Heat dissipation member and method of manufacturing the same
A plate-shaped heat dissipation member includes a metal-silicon carbide composite containing aluminum or magnesium, in which at least one of two main surfaces of the heat dissipation member is curved to be convex in an outward direction of the heat dissipation member, and when a flatness of the one main surface defined by JIS B 0621 is represented by f 1 and a flatness of the other main surface different from the one main surface defined by JIS B 0621 is represented by f 2 , f 2 is less than f 1 by 10 μm or more.
1. A plate-shaped heat dissipation member comprising a metal-silicon carbide composite impregnated with aluminum or magnesium,
wherein at least one of two main surfaces of the heat dissipation member is curved to be convex in an outward direction of the heat dissipation member,
when a flatness of the one main surface defined by JIS B 0621: 1984 is represented by f 1 and a flatness of the other main surface different from the one main surface defined by JIS B 0621: 1984 is represented by f 2 , f 2 is less than f 1 by 10 μm or more,
wherein the heat dissipation member is substantially rectangular, and
when a length of a long side of the rectangle is represented by a and a length of a short side of the rectangle is represented by b,
a straight line connecting middle points of two short sides of the one main surface is represented by l 1 and a straight line connecting middle points of two long sides of the one main surface is represented by l 2 ,
a maximum distance between a point on a curve of the one main surface and l 1 in a cross-sectional view of the heat dissipation member showing a cross-section including l 1 and substantially perpendicular to the one main surface is represented by h 1 , and
a maximum distance between a point on a curve of the one main surface and l 2 in a cross-sectional view of the heat dissipation member showing a cross-section including l 2 and substantially perpendicular to the one main surface is represented by h 2 ,
h 1 /a≥h 2 /b.
2. The heat dissipation member according to claim 1 ,
wherein a surface metal layer containing aluminum or magnesium is provided on the one main surface and/or the other main surface.
3. The heat dissipation member according to claim 1 ,
wherein f 1 is 100 μm or more and 700 μm or less.
4. The heat dissipation member according to claim 1 ,
wherein f 2 is 300 μm or less.
5. The heat dissipation member according to claim 1 ,
wherein a value of (h 1 /a)/(h 2 /b) is 1.00 or more and 1.9 or less.
6. The heat dissipation member according to claim 1 ,
wherein an average length RS m of roughness curve elements of the other main surface is 50 μm or more and 200 μm or less.
7. A method of manufacturing the heat dissipation member according to claim 1 , the method comprising:
a step of preparing a plate-shaped metal-silicon carbide composite impregnated with aluminum or magnesium; and
a step of mechanically processing a part of at least one surface of the composite to provide the one main surface.
8. A plate-shaped heat dissipation member comprising a metal-silicon carbide composite impregnated with aluminum or magnesium,
wherein at least one of two main surfaces of the heat dissipation member is curved to be convex in an outward direction of the heat dissipation member,
when a flatness of the one main surface defined by JIS B 0621: 1984 is represented by f 1 and a flatness of the other main surface different from the one main surface defined by JIS B 0621: 1984 is represented by f 2 , f 2 is less than f 1 by 10 μm or more, and
wherein an average length RS m of roughness curve elements of the one main surface is 50 μm or more and 250 μm or less.
9. The heat dissipation member according to claim 8 ,
wherein a surface metal layer containing aluminum or magnesium is provided on the one main surface and/or the other main surface.
10. The heat dissipation member according to claim 8 ,
wherein f 1 is 100 μm or more and 700 μm or less.
11. The heat dissipation member according to claim 8 ,
wherein f 2 is 300 μm or less.
12. The heat dissipation member according to claim 8 ,
wherein the heat dissipation member is substantially rectangular, and
when a length of a long side of the rectangle is represented by a and a length of a short side of the rectangle is represented by b,
a straight line connecting middle points of two short sides of the one main surface is represented by l 1 and a straight line connecting middle points of two long sides of the one main surface is represented by l 2 ,
a maximum distance between a point on a curve of the one main surface and l 1 in a cross-sectional view of the heat dissipation member showing a cross-section including l 1 and substantially perpendicular to the one main surface is represented by h 1 , and
a maximum distance between a point on a curve of the one main surface and l 2 in a cross-sectional view of the heat dissipation member showing a cross-section including l 2 and substantially perpendicular to the one main surface is represented by h 2 ,
h 1 /a≥h 2 /b.
13. The heat dissipation member according to claim 12 ,
wherein a value of (h 1 /a)/(h 2 /b) is 1.00 or more and 1.9 or less.
14. The heat dissipation member according to claim 8 ,
wherein an average length RS m of roughness curve elements of the other main surface is 50 μm or more and 200 μm or less.
15. A method of manufacturing the heat dissipation member according to claim 8 , the method comprising:
a step of preparing a plate-shaped metal-silicon carbide composite impregnated with aluminum or magnesium; and
a step of mechanically processing a part of at least one surface of the composite to provide the one main surface.