Semiconductor device having dolmen structure and manufacturing method therefor, and support piece formation laminate film and manufacturing method therefor
A support piece formation laminate film according to the present disclosure includes a base material film, a pressure-sensitive adhesive layer, and a support piece formation film, in this order, in which the support piece formation film has a multi-layer structure including at least a metal layer. The support piece formation laminate film is applied to a manufacturing process of a semiconductor device having a dolmen structure including a substrate, a first chip disposed on the substrate, a plurality of support pieces disposed around the first chip, on the substrate, and a second chip disposed to be supported by the plurality of support pieces and to cover the first chip.
1. A manufacturing method for a semiconductor device having a dolmen structure, the semiconductor device comprising: a substrate; a first chip disposed on the substrate; a plurality of support pieces disposed around the first chip on the substrate; and a second chip disposed to be supported by the plurality of support pieces and to cover the first chip, the method comprising processes of:
(A) preparing a laminate film comprising a base material film, a pressure-sensitive adhesive layer and a support piece formation film in order, wherein the support piece formation film has a multi-layer structure comprising a metal layer and a thermosetting resin layer that is in contact with the metal layer and with the pressure-sensitive adhesive layer;
(B) forming the plurality of support pieces on a surface of the pressure-sensitive adhesive layer by singulating the support piece formation film;
(C) picking up the plurality of support pieces from the pressure-sensitive adhesive layer;
(D) disposing the first chip on the substrate;
(E) disposing the plurality of support pieces onto the substrate around the first chip or around a region in which the first chip is to be disposed on the substrate;
(F) preparing an adhesive piece-attached chip comprising the second chip and a bonding adhesive piece provided on one surface of the second chip; and
(G) constructing the dolmen structure by disposing the adhesive piece-attached chip on surfaces of the plurality of support pieces.
2. The manufacturing method according to claim 1 , wherein a process of irradiating the pressure-sensitive adhesive layer with an ultraviolet ray is not provided between the process (B) and the process (C).
3. The manufacturing method according to claim 1 , wherein the method further comprises a process of heating the support piece formation film or the plurality of support pieces before the process (G) to cure the thermosetting resin layer.
4. The manufacturing method according to claim 1 , wherein the thermosetting resin layer in preparing the laminate film, has a melt viscosity at 120° C. of 4,300 to 50,000 Pa·s, to inhibit a position shift of the plurality of support pieces relative to the substrate.