Semiconductor device, power converter, method for manufacturing semiconductor device, and method for manufacturing power converter
There is provided a semiconductor device including an insulating substrate provided with a circuit surface, and an external terminal bonded to the circuit surface. The circuit surface has an upper surface that is in contact with and bonded to a part of a lower surface of the external terminal. In at least a part of a portion where the upper surface of the circuit surface and the lower surface of the external terminal are in contact with each other, a melted portion of the circuit surface and the external terminal is formed. A gap between the upper surface of the circuit surface and the lower surface of the external terminal has a size of 20 μm or less. The circuit surface and the external terminal are each made of copper or copper alloy.
1 . A semiconductor device comprising:
a metal plate;
a semiconductor element disposed on an upper surface of the metal plate via a bonding material; and
an external terminal bonded to the upper surface of the metal plate,
wherein
the upper surface of the metal plate and a lower surface of the external terminal are in contact with each other via a conductive material,
in at least a part of a portion where the upper surface of the metal plate and the lower surface of the external terminal are in contact with each other, a melted portion formed by melting the metal plate, the external terminal, and the conductive material at one time, and
the metal plate and the external terminal are each made of copper or copper alloy.
2 . The semiconductor device according to claim 1 , further comprising a sealing material formed covering the metal plate, the semiconductor element, and a part of the external terminal.
3 . The semiconductor device according to claim 1 , wherein the conductive material is formed beyond a range where the metal plate and the external terminal overlap with each other in plan view.
4 . The semiconductor device according to claim 1 , wherein a plurality of the melted portions is formed.
5 . A power converter comprising:
a conversion circuit that converts received power and outputs the converted power, and includes a semiconductor device comprising:
a metal plate;
a semiconductor element disposed on an upper surface of the metal plate via a bonding material; and
an external terminal bonded to the upper surface of the metal plate,
wherein
the upper surface of the metal plate and a lower surface of the external terminal are in contact with each other via a conductive material,
in at least a part of a portion where the upper surface of the metal plate and the lower surface of the external terminal are in contact with each other, a melted portion of the metal plate, the external terminal, and the conductive material is formed, and
the metal plate and the external terminal are each made of copper or copper alloy;
a drive circuit that outputs a driving signal to the semiconductor device for driving the semiconductor device; and
a control circuit that outputs a control signal to the drive circuit for controlling the drive circuit.