Polymer material, composition, and method of manufacturing semiconductor device
According to one embodiment, a polymer material is disclosed. The polymer material contains a polymer. The polymer contains a first monomer unit having a lone pair and an aromatic ring at a side chain, and a second monomer unit including a crosslinking group at a terminal of the side chain, with its molar ratio of 0.5 mol % to 10 mol % to all monomer units in the polymer. The polymer material can be used for manufacturing a composite film as a mask pattern for processing a target film on a substrate. The composite film can be formed by a process including, forming an organic film on the target film with the polymer material, patterning the organic film, and forming the composite film by impregnating a metal compound into the patterned organic film.
1. A method of manufacturing a semiconductor device, comprising:
forming an organic film on a target film on a semiconductor substrate with a polymer material;
patterning the organic film;
forming a mask pattern composed of a composite film by impregnating a metal compound into the patterned organic film; and
processing the target film by using the mask pattern, wherein
the polymer material contains a polymer containing a first monomer unit having a lone pair and an aromatic ring at a side chain, and
the metal compound is impregnated into the patterned organic film with 10 atom % or more as a metal amount.
2. The method according to claim 1 , wherein
a main component monomer of the polymer is a (meth)acrylate, and
a component monomer of the first monomer unit is an aromatic compound derivative of a (meth)acrylic acid.
3. The method according to claim 1 , wherein
the first monomer unit has two or more lone pair at a side chain.
4. The method according to claim 1 , wherein
the polymer contains a second monomer unit including a crosslinking group at a terminal of the side chain, with its molar ratio of 0.5 mol % to 10 mol % to all monomer units in the polymer.
5. The method according to claim 4 , wherein
the crosslinking group includes a glycidyl group.
6. The method according to claim 5 , wherein
the polymer contains a third monomer unit including a group formable a carboxyl group due to heating or light irradiation at the terminal of the side chain.
7. The method according to claim 4 , wherein
a molar ratio of the first monomer unit to all monomer units in the polymer is 30 mol % to 99.5 mol %.
8. The method according to claim 6 , wherein
a molar ratio of the third monomer unit to all monomer units in the polymer is 0.2 mol % to 50 mol %, and
a molar ratio of the first monomer unit to all monomer units in the polymer is 49.5 mol % to 99.3 mol %.
9. The method according to claim 1 , wherein
the first monomer unit has the lone pair contained in a ester bond (—COO—), a cyano group (—C≡N), a pyridine skeleton, and an amino group (—NH 2 ).