Method to create MIMcap designs across changing MIMcap structures
A system and method for fabricating on-die metal-insulator-metal capacitors capable of maintaining a similar capacitance for design reuse across multiple semiconductor fabrication processes are described. In various implementations, an integrated circuit includes multiple metal-insulator-metal (MIM) capacitors. The MIM capacitors are formed between two signal nets. The integrated circuit includes multiple intermediate metal layers (or metal plates) formed between two signal nets. Subsequent semiconductor fabrication processes typically increase a number of metal plates that can be formed in the dielectric layer, such as an oxide layer, between two signal nets. To permit design reuse across multiple semiconductor fabrication processes, for a particular MIM capacitor designated to maintain a same capacitance, the additional metal plates for the particular MIM capacitor are formed as floating nets. Additionally, the same electrode plates of the particular MIM capacitor are used across the multiple semiconductor fabrication processes.
1. An integrated circuit comprising:
a metal-insulator-metal (MIM) capacitor comprising a first metal layer separated from a second metal layer by an insulating distance equal to a thickness of a first dielectric layer between the first metal layer and the second metal layer;
a second dielectric layer adjacent to the second metal layer; and
a third metal layer adjacent to the second dielectric layer; and
wherein:
each of the first metal layer and the second metal layer is connected to a respective voltage reference level; and
the third metal layer has no connection to a voltage reference level used by the first metal layer.
2. The integrated circuit as recited in claim 1 , wherein the third metal layer is a floating net with no connection to a voltage reference level used by the integrated circuit.
3. The integrated circuit as recited in claim 2 , further comprising one or more metal layers in addition to the third metal layer between the third metal layer and a signal net that are floating with no connection to a voltage reference level used by the integrated circuit.
4. The integrated circuit as recited in claim 1 , wherein the third metal layer is connected to a voltage reference level used by the second metal layer.
5. The integrated circuit as recited in claim 4 , further comprising one or more metal layers in addition to the third metal layer between the third metal layer and a signal net that are connected to the voltage reference level used by the second metal layer.
6. The integrated circuit as recited in claim 1 , wherein:
the first metal layer is connected to a first signal net via a fourth metal layer; and
the second metal layer is connected to a second signal net via a fifth metal layer.
7. The integrated circuit as recited in claim 1 , wherein each of the first dielectric layer and the second dielectric layer comprises an oxide layer surrounding the first metal layer, the second metal layer, and the third metal layer.
8. A computing system comprising:
a memory configured to store instructions of one or more tasks and source data to be processed by the one or more tasks;
an integrated circuit configured to execute the instructions using the source data, wherein the integrated circuit comprises one or more metal-insulator-metal (MIM) capacitors, each comprising:
a first metal layer;
a first dielectric layer adjacent to the first metal layer;
a second metal layer adjacent to the first dielectric layer, wherein a metal-insulator-metal (MIM) capacitor is formed by the first metal layer separated from the second metal layer by an insulating distance equal to a thickness of the first dielectric layer between the first metal layer and the second metal layer;
a second dielectric layer adjacent to the second metal layer; and
a third metal layer adjacent to the second dielectric layer; and
wherein:
each of the first metal layer and the second metal layer is connected to a respective voltage reference level; and
the third metal layer has no connection to a voltage reference level used by the first metal layer.
9. The computing system as recited in claim 8 , wherein the third metal layer is a floating net with no connection to a voltage reference level used by the integrated circuit.
10. The computing system as recited in claim 9 , wherein the integrated circuit further comprises one or more metal layers in addition to the third metal layer between the third metal layer and a signal net that are floating with no connection to a voltage reference level used by the integrated circuit.
11. The computing system as recited in claim 8 , wherein the third metal layer is connected to a voltage reference level used by the second metal layer.
12. The computing system as recited in claim 11 , wherein the integrated circuit further comprises one or more metal layers in addition to the third metal layer between the third metal layer and a signal net that are connected to the voltage reference level used by the second metal layer.
13. The computing system as recited in claim 8 , wherein:
the first metal layer is connected to a first signal net via a fourth metal layer; and
the second metal layer is connected to a second signal net via a fifth metal layer.