High aspect ratio via fill process employing selective metal deposition and structures formed by the same
A semiconductor structure includes a first dielectric material layer, a first metal interconnect structure embedded within the first dielectric material layer and including a first metallic material portion including a first metal, a second dielectric material layer located over the first dielectric material layer, and a second metal interconnect structure embedded within the second dielectric material layer and including an integrated line-and-via structure that includes a second metallic material portion including a second metal. A metal-semiconductor alloy portion including a first metal-semiconductor alloy of the first metal and a semiconductor material is located underneath the second metallic material portion, and contacts a top surface of the first metal interconnect structure.
1. A semiconductor structure, comprising:
a first dielectric material layer;
a first metal interconnect structure embedded within the first dielectric material layer and comprising a first metallic material portion including a first metal;
a second dielectric material layer located over the first dielectric material layer;
a second metal interconnect structure embedded within the second dielectric material layer and comprising an integrated line-and-via structure that includes a second metallic material portion comprising a second metal, wherein the integrated line-and-via structure comprises a metallic line portion and a metallic via portion adjoined to and underlying the metallic line portion; and
a metal-semiconductor alloy portion comprising a first metal-semiconductor alloy of the first metal and a semiconductor material is located underneath the second metallic material portion, and contacts a top surface of the first metal interconnect structure;
wherein:
a bottommost surface segment of the metal-semiconductor alloy portion is located below a horizontal plane including an interface between the first dielectric material layer and the second dielectric material layer; and
a top surface of the metal-semiconductor alloy portion is located above the horizontal plane including the interface between the first dielectric material layer and the second dielectric material layer.
2. The semiconductor structure of claim 1 , wherein:
the integrated line-and-via structure is located within an integrated line-and-via cavity that vertically extends through the second dielectric material layer, and fills an entirety of a line portion of the integrated line-and-via cavity and an upper region of a via portion of the integrated line-and-via cavity; and
an upper portion of the metal-semiconductor alloy portion fills a lower region of the via portion of the integrated line-and-via cavity.
3. The semiconductor structure of claim 2 , wherein a lower portion of the metal-semiconductor alloy portion is embedded within the first dielectric material layer and comprises an annular horizontal surface that contacts a bottom surface of the second dielectric material layer.
4. The semiconductor structure of claim 3 , wherein a lower portion of the metal-semiconductor alloy portion comprises a contoured bottom surface having a greater depth within an area enclosed by a bottom periphery of the via portion of the integrated line-and-via cavity in a plan view than outside the area enclosed by the bottom periphery of the via portion of the integrated line-and-via cavity in the plan view.
5. The semiconductor structure of claim 1 , wherein the metal-semiconductor alloy portion has a contoured top surface such that a periphery of the contoured top surface is vertically offset by a greater distance from a horizontal plane including a top surface of the first dielectric material layer than a center portion of the contoured top surface is vertically offset from the horizontal plane.
6. The semiconductor structure of claim 1 , wherein:
the first metallic material portion comprises the first metal at a first atomic percentage that is greater than 90%; and
the second metallic material portion comprises the second metal at a second atomic percentage that is greater than 90%.
7. The semiconductor structure of claim 1 , wherein the integrated line-and-via structure further comprises a metallic liner that extends vertically from a horizontal plane including a topmost surface of the second metallic material portion to the metal-semiconductor alloy portion.
8. The semiconductor structure of claim 7 , wherein the metallic liner comprises a third metal that is different from the first metal and from the second metal by an atomic percentage that is at least 40%.
9. The semiconductor structure of claim 7 , wherein the metal-semiconductor alloy portion contacts a bottom surface of the metallic liner, and is vertically spaced from the second metallic material portion by a bottom portion of the metallic liner.
10. The semiconductor structure of claim 7 , wherein the metallic liner comprises a metal-semiconductor alloy liner comprising a second metal-semiconductor alloy of a third metal that is different from the first metal of the first metal-semiconductor alloy.
11. The semiconductor structure of claim 10 , wherein the integrated line-and-via structure comprises a metal portion consisting essentially of the third metal, contacting a top surface of the metal-semiconductor alloy portion, and contacting bottom surfaces of the metal-semiconductor alloy liner and the second metallic material portion.
12. The semiconductor structure of claim 7 , wherein the metal-semiconductor alloy portion comprises a bottom portion of the metal-semiconductor alloy liner.