Hybrid-channel nano-sheet FETs
Semiconductor devices and methods of forming a first layer cap at ends of layers of first channel material in a stack of alternating layers of first channel material and second channel material. A second layer cap is formed at ends of the layers of second channel material. The first layer caps are etched away in a first device region. The second layer caps are etched away in a second device region.
1. A nanosheet semiconductor structure comprising:
a first device, comprising:
a first plurality of vertically arranged channel layers, each channel layer of the first plurality comprising a first channel material;
a first gate structure having first gate portions, each first gate portion comprising an n-type work function metal layer, wherein the first gate portions are interleaved between successive channel layers of the first plurality of vertically arranged channel layers;
first layer caps disposed at ends of the first gate portions; and
monolithic n-type source and drain regions respectively disposed:
at opposite sides of the first gate structure; and
vertically adjacent to the corresponding first layer caps; and
a second device within the nanosheet semiconductor structure, the second device comprising:
a second plurality of vertically arranged channel layers, each channel layer of the second plurality comprising a second channel material;
a second gate structure having second gate portions, each second gate portion comprising a p-type work function metal layer, wherein the second gate portions are interleaved between successive channel layers of the second plurality of vertically arranged channel layers;
second layer caps disposed at ends of the second gate portions; and
monolithic p-type source and drain regions respectively disposed:
at opposite sides of the second gate structure; and
vertically adjacent to the corresponding second layer caps;
wherein the channel layers of the first plurality of vertically arranged channel layers are aligned horizontally with the second gate portions of the second gate structure;
wherein the monolithic n-type source region extends horizontally past each vertical outermost surface of the corresponding first layer caps to contact each of the first plurality of vertically arranged channel layers;
wherein the monolithic n-type drain region extends horizontally past each vertical outermost surface of the corresponding first layer caps to contact each of the first plurality of vertically arranged channel layers;
wherein the monolithic p-type source region extends horizontally past each vertical outermost surface of the corresponding second layer caps to contact each of the second plurality of vertically arranged channel layers; and
wherein the monolithic p-type drain region extends horizontally past each vertical outermost surface of the corresponding second layer caps to contact each of the second plurality of vertically arranged channel layers.
2. The nanosheet semiconductor structure of claim 1 , wherein the first device is on a first portion of a semiconductor wafer, and wherein the second device is on a second portion of the semiconductor wafer adjacent to the first portion.
3. The nanosheet semiconductor structure of claim 1 , further comprising a planarized dielectric layer disposed over the first device and the second device.
4. The nanosheet semiconductor structure of claim 1 , wherein the first channel material is silicon, and wherein the second channel material is silicon germanium.
5. The nanosheet semiconductor structure of claim 1 , further comprising:
first gate spacer portions disposed at opposite sides of an upper portion of the first gate structure; and
second gate spacer portions disposed at opposite sides of an upper portion of the second gate structure.
6. The nanosheet semiconductor structure of claim 5 , wherein one or more of the first layer caps of the first device are underneath, and are in direct contact with, the first gate spacer portions, and wherein the source and drain regions of the second device extend horizontally underneath, and are in direct contact with, the second gate spacer portions.
7. The nanosheet semiconductor structure of claim 5 , wherein the first and second gate spacer portions comprise SiBCN.
8. The nanosheet semiconductor structure of claim 1 , wherein the first gate structure comprises a first conductive gate contact over the first plurality of channel layers, wherein the second gate structure comprises a second conductive gate contact over the second plurality of channel layers, and wherein the first conductive gate contact and the second conductive gate contact comprise tungsten.
9. The nanosheet semiconductor structure of claim 1 , wherein each of the first layer caps have a thickness of about 6 nm.
10. The nanosheet semiconductor structure of claim 1 , wherein the first layer caps comprise a dielectric material, and wherein the second layer caps comprise an oxide compound.
11. The nanosheet semiconductor structure of claim 1 , wherein the first layer caps are selectively etchable with respect to the second layer caps.
12. A nanosheet semiconductor structure comprising:
a first device, comprising:
a first plurality of vertically arranged channel layers, each channel layer of the first plurality comprising a first channel material;
a first gate structure having first gate portions, each first gate portion comprising an n-type work function metal layer, wherein the first gate portions are interleaved between successive channel layers of the first plurality of vertically arranged channel layers;
first layer caps disposed at ends of first gate portions;
first gate spacer portions disposed at opposite sides of an upper portion of the first gate structure, above the first layer caps; and
monolithic n-type source and drain regions respectively disposed:
at opposite sides of the first gate structure; and
vertically adjacent to the corresponding first layer caps; and
a second device within the nanosheet semiconductor structure, the second device comprising:
a second plurality of vertically arranged channel layers, each channel layer of the second plurality comprising a second channel material;
a second gate structure having second gate portions, each second gate portion comprising a p-type work function metal layer, wherein the second gate portions are interleaved between successive channel layers of the second plurality of vertically arranged channel layers;
second layer caps disposed on ends of the second gate portions;
second gate spacer portions disposed on opposite sides of an upper portion of the second gate structure, above the second layer caps; and
monolithic p-type source and drain regions respectively disposed:
at opposite sides of the second gate structure; and
vertically adjacent to the corresponding second layer caps;
wherein the first plurality of vertically arranged channel layers are vertically displaced with respect to the second plurality of vertically arranged channel layers;
wherein the monolithic n-type source region extends horizontally past each vertical outermost surface of the corresponding first layer caps to contact each of the first plurality of vertically arranged channel layers;
wherein the monolithic n-type drain region extends horizontally past each vertical outermost surface of the corresponding first later caps to contact each of the first plurality of vertically arranged channel layers;
wherein the monolithic p-type source region extends horizontally past each vertical outermost surface of the corresponding second layer caps to contact each of the second plurality of vertically arranged channel layers; and
wherein the monolithic p-type drain region extends horizontally past each vertical outermost surface of the corresponding second layer caps to contact each of the second plurality of vertically arranged channel layers.
13. The nanosheet semiconductor structure of claim 12 , wherein the first device is on a first portion of a semiconductor wafer, and wherein the second device is on a second portion of the semiconductor wafer adjacent to the first portion.
14. The nanosheet semiconductor structure of claim 12 , wherein the first channel material is silicon, and wherein the second channel material is silicon germanium.
15. The nanosheet semiconductor structure of claim 12 , wherein one or more of the first layer caps of the first device are directly contacting lower surfaces of the first gate spacer portions, and wherein the source and drain regions of the second device are directly contacting lower surfaces of the second gate spacer portions.
16. The nanosheet semiconductor structure of claim 12 , wherein the first and the second gate spacer portions comprise SiBCN.
17. The nanosheet semiconductor structure of claim 12 , wherein the first gate structure comprises a first conductive gate contact over the first plurality of channel layers, and wherein the second gate structure comprises a second conductive gate contact over the second plurality of channel layers, and wherein the first conductive gate contact and the second conductive gate contact comprise tungsten.
18. The nanosheet semiconductor structure of claim 12 , wherein each of the first layer caps have a thickness of about 6 nm.
19. The nanosheet semiconductor structure of claim 12 , wherein the first layer caps comprise a dielectric material, and wherein the second layer caps comprise an oxide compound.
20. The nanosheet semiconductor structure of claim 12 , wherein the first layer caps are selectively etchable with respect to the second layer caps.