Semiconductor packages with embedded wiring on re-distributed bumps
Semiconductor packages with embedded wiring on re-distributed bumps are described. In an illustrative, non-limiting embodiment, a semiconductor package may include an integrated circuit (IC) having a plurality of pads and a re-distribution layer (RDL) coupled to the IC without any substrate or lead frame therebetween, where the RDL comprises a plurality of terminals, and where one or more of the plurality of pads are wire bonded to a corresponding one or more of the plurality of terminals.
1. A method, comprising:
forming a seed layer on a temporary carrier, the seed layer comprising a plurality of die attach locations and a plurality of wire bond locations associated with each of the plurality of die attach locations;
attaching, to one of the plurality of die attach locations, a die having a plurality of pads;
wire bonding at least one of the plurality of pads to at least one of the plurality of wire bond locations to produce a wire bonded die;
encapsulating the wire bonded die to produce an encapsulated die;
debonding the temporary carrier from the encapsulated die;
after debonding the temporary carrier, forming a re-distribution layer (RDL) upon the encapsulated die; and
forming a passivation layer over the RDL, the passivation layer including openings that extend through the passivation layer to the RDL.
2. The method of claim 1 , further comprising laser marking the plurality of die attach locations and the plurality of wire bond locations on the seed layer.
3. The method of claim 1 , further comprising attaching a passive electrical component to one or more of the plurality of wire bond locations.
4. The method of claim 1 , further comprising:
stacking a second die upon the die, wherein the second die comprises a second plurality of pads.
5. The method of claim 4 , further comprising:
wire bonding at least one of the second plurality of pads to a corresponding one of the plurality of pads.
6. The method of claim 1 , further comprising:
attaching, to another one of the plurality of die attach locations disposed side-by-side with respect to the one of the plurality of die attach locations, a second die having a second plurality of pads; and
wire bonding at least one of the second plurality of pads to a corresponding one of the plurality of pads.
7. The method of claim 1 , wherein the RDL is formed on the encapsulated die without any substrate or lead frame therebetween.
8. The method of claim 1 , wherein forming the RDL further comprises:
after debonding of the temporary carrier, applying a photoresist (PR) pattern to the encapsulated die;
etching selected areas of the seed layer to match at least a portion of the PR pattern; and
forming conductor traces on the encapsulated die using the PR pattern.
9. The method of claim 8 , wherein forming the conductor traces further comprises performing an etching operation and an electroplating operation.
10. The method of claim 8 , further comprising forming one or more solder balls or pillar bumps at the one or more openings in the passivation layer.