Semiconductor device structure and method for forming the same
A semiconductor device structure is provided. The semiconductor device structure includes a substrate. The semiconductor device structure includes a gate stack over the substrate. The semiconductor device structure includes a cap layer over the gate stack. The semiconductor device structure includes a protective layer over the cap layer, wherein a lower portion of the protective layer extends into the cap layer. The semiconductor device structure includes a contact structure passing through the protective layer and the cap layer.
1. A method for forming a semiconductor device structure, comprising:
forming a dielectric layer over a substrate, wherein the dielectric layer has a trench;
forming a gate stack in the trench, wherein a first top surface of the gate stack is lower than a second top surface of the dielectric layer;
forming a cap layer over the gate stack and in the trench;
forming a protective layer over the cap layer, wherein a lower portion of the protective layer is embedded in the cap layer;
forming a first through hole in the protective layer;
forming a second through hole in the cap layer and under the first through hole; and
forming a contact structure in the first through hole and the second through hole.
2. The method for forming the semiconductor device structure as claimed in claim 1 , wherein the forming of the cap layer over the gate stack and in the trench comprises:
forming a cap material layer in the trench, wherein the cap material layer has a sidewall portion and a bottom portion, the sidewall portion is over an inner wall of the trench, and the bottom portion is over a first top surface of the gate stack;
forming a dopant in the bottom portion; and
removing the sidewall portion.
3. The method for forming the semiconductor device structure as claimed in claim 2 , wherein the cap material layer is further formed over the second top surface of the dielectric layer, and the method further comprises:
forming a mask layer over the bottom portion of the cap material layer after removing the sidewall portion of the cap material layer;
removing the cap material layer over the second top surface of the dielectric layer; and
removing the mask layer.
4. The method for forming the semiconductor device structure as claimed in claim 1 , further comprising:
forming a conductive layer over the gate stack before forming the cap layer over the gate stack and in the trench, wherein the cap layer is formed over the conductive layer.
5. The method for forming the semiconductor device structure as claimed in claim 4 , wherein the forming of the conductive layer over the gate stack comprises:
forming a conductive material layer in the trench, wherein the conductive material layer has a sidewall portion and a bottom portion, the sidewall portion is over an inner wall of the trench, the bottom portion is over a top surface of the gate stack, and the sidewall portion is thinner than the bottom portion; and
removing the sidewall portion.
6. The method for forming the semiconductor device structure as claimed in claim 1 , wherein the protective layer has a central portion and a peripheral portion surrounding the central portion, and the peripheral portion is thinner than the central portion.
7. The method for forming the semiconductor device structure as claimed in claim 6 , wherein the contact structure passes through the central portion of the protective layer.
8. The method for forming the semiconductor device structure as claimed in claim 1 , wherein a first sidewall of the cap layer is substantially aligned with a second sidewall of the protective layer.
9. The method for forming the semiconductor device structure as claimed in claim 1 , wherein the cap layer and the protective layer are made of different materials.
10. The method for forming the semiconductor device structure as claimed in claim 1 , wherein the cap layer is thinner than the protective layer.
11. A method for forming a semiconductor device structure, comprising:
forming a dielectric layer over a substrate, wherein the dielectric layer has a trench;
forming a gate stack in the trench, wherein a first top surface of the gate stack is lower than a second top surface of the dielectric layer;
forming a cap layer over the gate stack and in the trench, wherein a concentration of a dopant in the cap layer increases in a direction away from the gate stack;
forming a protective layer over the cap layer; and
forming a contact structure passing through the protective layer and the cap layer.
12. The method for forming the semiconductor device structure as claimed in claim 11 , wherein the cap layer has a curved top surface.
13. The method for forming the semiconductor device structure as claimed in claim 11 , wherein the dopant comprises nitrogen.
14. The method for forming the semiconductor device structure as claimed in claim 11 , further comprising:
forming a conductive layer over the gate stack before forming the cap layer over the gate stack and in the trench, wherein the cap layer is formed over the conductive layer.
15. The method for forming the semiconductor device structure as claimed in claim 14 , wherein the conductive layer is between the contact structure and the gate stack.
16. A method for forming a semiconductor device structure, comprising:
forming a dielectric layer over a substrate, wherein the dielectric layer has a trench;
forming a gate stack in the trench, wherein a first top surface of the gate stack is lower than a second top surface of the dielectric layer;
forming a conductive layer over the gate stack and in the trench;
forming a cap layer over the conductive layer and in the trench;
forming a protective layer over the cap layer and in the trench, wherein the conductive layer, the cap layer, and the protective layer are made of different materials, and a first sidewall of the cap layer is connected between a second sidewall of the protective layer and a third sidewall of the conductive layer; and
forming a contact structure passing through the protective layer and the cap layer.
17. The method for forming the semiconductor device structure as claimed in claim 16 , wherein the conductive layer separates the contact structure from the gate stack.
18. The method for forming the semiconductor device structure as claimed in claim 16 , wherein the cap layer comprises metal oxide or semiconductor oxide.
19. The method for forming the semiconductor device structure as claimed in claim 18 , wherein the cap layer further comprises nitrogen.
20. The method for forming the semiconductor device structure as claimed in claim 16 , wherein a width of the conductive layer decreases toward the gate stack.