Polishing composition for semiconductor process and method for manufacturing semiconductor device by using the same
The present disclosure relates to a polishing composition for a semiconductor process that may increase a polishing rate of a boron-doped polysilicon layer, improve polishing selectivity, prevent a defect of a wafer that may occur in a polishing process, and improving surface roughness of the wafer, and a method for polishing a substrate by using the same. In addition, the present disclosure relates to a method for manufacturing a polished substrate by using a polishing composition for a semiconductor process.
1. A polishing composition for a semiconductor process, comprising:
water; and
a polishing particle,
wherein the polishing particle includes a functional group bonded to a surface of the polishing particle,
the functional group includes an amine group, and
a polishing selectivity of a silicon nitride layer to a boron-doped polysilicon layer is 1:100 to 1:600,
wherein the content of the amine group is 0.0185 wt % to 0.05 wt %, based on the total weight of the polishing composition.
2. The polishing composition of claim 1 , having a pH of 2 to 5.
3. The polishing composition of claim 1 , having an etch rate for the silicon nitride layer of 100 Å/min or less.
4. The polishing composition of claim 1 , wherein the functional group bonded to the surface of the polishing particle includes the following structure of Formula 1:
wherein
means a portion bonded to the surface of the polishing particle,
R 1 and R 2 are the same as or different from each other, and are each independently selected from the group consisting of hydrogen, a substituted or unsubstituted alkyl group having 1 to 10 carbon atoms, a substituted or unsubstituted cycloalkyl group having 3 to 10 carbon atoms, a substituted or unsubstituted alkenyl group having 2 to 10 carbon atoms, and a substituted or unsubstituted alkynyl group having 2 to 10 carbon atoms, and
L 1 is selected from the group consisting of a substituted or unsubstituted alkylene group having 1 to 10 carbon atoms, a substituted or unsubstituted alkenylene group having 2 to 10 carbon atoms, a substituted or unsubstituted alkynylene group having 2 to 10 carbon atoms, and a substituted or unsubstituted cycloalkylene group having 3 to 10 carbon atoms.
5. The polishing composition of claim 4 , wherein R 1 and R 2 are the same as or different from each other, and are each independently an alkyl group having 1 to 10 carbon atoms.
6. The polishing composition of claim 4 , wherein L 1 is a substituted or unsubstituted alkylene group having 1 to 10 carbon atoms.
7. The polishing composition of claim 1 , further comprising an agent for improving a polishing rate containing an amine group,
wherein the content of the amine group included in the functional group bonded to the surface of the polishing particle is 0.008 wt % to 0.06 wt %, based on the total weight of the polishing composition, and
the content of the amine group included in the agent for improving a polishing rate is 0.006 wt % to 0.05 wt %, based on the total weight of the polishing composition.
8. The polishing composition of claim 7 , further comprising a polishing inhibitor for the silicon nitride layer.
9. The polishing composition of claim 8 , wherein the polishing inhibitor for the silicon nitride layer is selected from the group consisting of polyacrylic acid, polyphosphoric acid, polymaleic acid, polymethacrylic acid, polyacrylamide-co-acrylic acid, polyacrylic acid-co-maleic acid, polyacrylamide-co-acrylic acid, and a mixture thereof.
10. The polishing composition of claim 1 , further comprising a surfactant.
11. The polishing composition of claim 10 , wherein the surfactant is selected from the group consisting of polyethylene glycol, polypropylene glycol, polyethylene-propylene copolymer, polyalkyl oxide, polyoxyethylene oxide (PEO), polyethylene oxide, polypropylene oxide; a sodium sulfonate fluorosurfactant, a phosphate ester fluorosurfactant, an amine oxide fluorosurfactant, a betaine fluorosurfactant, an ammonium carboxylate fluorosurfactant, a stearate ester fluorosurfactant, a quaternary ammonium fluorosurfactant, an ethylene oxide/propylene oxide fluorosurfactant, and a polyoxyethylene fluorosurfactant.
12. The polishing composition of claim 10 , wherein the surfactant is included in an amount of 0.0015 wt % to 0.005 wt %, based on the total weight of the polishing composition.
13. The polishing composition of claim 1 , further comprising a pH adjusting agent.
14. The polishing composition of claim 13 , wherein the pH adjusting agent is selected from the group consisting of hydrochloric acid, phosphoric acid, sulfuric acid, hydrofluoric acid, hydrobromic acid, iodic acid, formic acid, malonic acid, maleic acid, oxalic acid, acetic acid, adipic acid, citric acid, adipic acid, acetic acid, propionic acid, fumaric acid, lactic acid, salicylic acid, pimeline, benzoic acid, succinic acid, phthalic acid, butyric acid, glutaric acid, glutamic acid, glycolic acid, aspartic acid, tartaric acid, and potassium hydroxide.
15. A polishing composition for a semiconductor process, comprising:
water;
a polishing particle surface-treated with a functional group including an amine group; and
an amine-based agent for improving a polishing rate,
wherein an etch rate for a boron-doped polysilicon layer is 2,000 Å/min or more,
wherein the content of the amine group is 0.0185 wt % to 0.05 wt %, based on the total weight of the polishing composition.
16. The polishing composition of claim 15 , wherein the amine-based agent for improving a polishing rate is selected from the group consisting of glycine, β-alanine betaine, stearyl betaine, and a mixture thereof.
17. The polishing composition of claim 15 , wherein the amine-based agent for improving a polishing rate is included in an amount of 0.03 wt % to 0.095 wt %, based on the total weight of the polishing composition.
18. A method for manufacturing a semiconductor device, comprising:
providing a semiconductor substrate including a boron-doped polysilicon layer and a silicon nitride layer; and
polishing the boron-doped polysilicon layer and the silicon nitride layer using a polishing composition,
wherein the polishing composition includes water; and
a polishing particle,
the polishing particle includes a functional group bonded to a surface of the polishing particle,
the functional group includes an amine group, and
a polishing selectivity of the silicon nitride layer to the boron-doped polysilicon layer is 1:100 to 1:600 wherein the content of the amine group is 0.0185 wt % to 0.05 wt %, based on the total weight of the polishing composition.
19. The method of claim 18 , wherein the silicon nitride layer is a polishing stopper layer.