Granted Patent
B2
US 12,714,404 · App. 17/758,932 · Granted Aug 25, 2026
Flexible capacitive micromachined ultrasonic transducer arrays
View Patent ↗
Loading inventors, assignments & file history…
Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Nov 8, 2022
From: ROHLING, ROBERT; GERARDO, CARLOS D; CRETU, EDMOND
To: THE UNIVERSITY OF BRITISH COLUMBIA
Reel/Frame 061692/0930 →
Continuity (4)
Provisional Application
62962284
· Jan 17, 2020
Provisional Application
62962285
· Jan 17, 2020
Provisional Application
62962291
· Jan 17, 2020
References Cited (81)
US 5828394A
· Khuri-Yakub et al.
· 1998
[cited by applicant]
US 6493288B2
· Khuri-Yakub et al.
· 2002
[cited by applicant]
US 6606389B1
· Selfridge et al.
· 2003
[cited by applicant]
US 6854338B2
· Khuri-Yakub et al.
· 2005
[cited by applicant]
US 7376236B1
· Norris et al.
· 2008
[cited by applicant]
US 7615834B2
· Khuri-Yakub et al.
· 2009
[cited by applicant]
US 7646097B2
· Yu et al.
· 2010
[cited by applicant]
US 7673375B2
· Chang et al.
· 2010
[cited by applicant]
US 7741686B2
· Khuri-Yakub et al.
· 2010
[cited by applicant]
US 7745973B2
· Bayram et al.
· 2010
[cited by applicant]
US 7759839B2
· Huang
· 2010
[cited by applicant]
US 8451693B2
· Nikoozadeh et al.
· 2013
[cited by applicant]
US 9132693B2
· Klootwijk et al.
· 2015
[cited by applicant]
US 9586233B2
· Apte et al.
· 2017
[cited by applicant]
US 9662679B2
· Chen et al.
· 2017
[cited by applicant]
US 20030005771A1
· Percin et al.
· 2003
[cited by applicant]
US 20030024317A1
· Miller
· 2003
[cited by applicant]
US 20050101867A1
· Johnson et al.
· 2005
[cited by applicant]
US 20050121734A1
· Degertekin
· 2005
[cited by examiner]
US 20050177045A1
· Degertekin
· 2005
[cited by examiner]
US 20050219953A1
· Bayram et al.
· 2005
[cited by applicant]
US 20070093702A1
· Yu et al.
· 2007
[cited by applicant]
US 20070287912A1
· Khuri-Yakub et al.
· 2007
[cited by applicant]
US 20100168583A1
· Dausch
· 2010
[cited by examiner]
US 20100173437A1
· Wygant et al.
· 2010
[cited by applicant]
US 20120245457A1
· Crowley
· 2012
[cited by examiner]
US 20140013850A1
· Kim et al.
· 2014
[cited by applicant]
US 20140169527A1
· Luo
· 2014
[cited by applicant]
US 20160051225A1
· Kim et al.
· 2016
[cited by applicant]
US 20180344167A1
· Xiang
· 2018
[cited by applicant]
US 20200282424A1
· Oralkan et al.
· 2020
[cited by applicant]
JP H05215694A
· 1993
[cited by applicant]
JP 2005021380A
· 2005
[cited by applicant]
JP 2008173291A
· 2008
[cited by applicant]
JP 2017018510A
· 2017
[cited by applicant]
JP 2017130952A
· 2017
[cited by applicant]
JP 2017201782A
· 2017
[cited by applicant]
KR 20190139027A
· 2019
[cited by examiner]
WO 2019119127A1
· 2019
[cited by applicant]
WO 2021142554
· 2021
[cited by applicant]
WO 2022067447
· 2022
[cited by applicant]
WO WO2024011328A1
· 2024
[cited by examiner]
Memon, Farah, et al. “Capsule ultrasound device: Further developments.” 2016 IEEE International Ultrasonics Symposium (IUS). IEEE, 2016. (Year: 2016).
[cited by examiner]
Lucarini, Ivano, Luca Maiolo, and Alessandro S. Savoia. “Fabrication and characterization of capacitive micromachined ultrasonic transducers integrated on ultra-thin and flexible substrates.” 2019 IEEE International Ult…
[cited by examiner]
Anzinger, Sebastian. Airborne capacitive micromachined ultrasonic transducers in dual-backplate technology. Verlag Dr. Hut, 2022. (Year: 2022).
[cited by examiner]
Omidvar, Amirhossein. Flexible polymer-based capacitive micromachined ultrasonic transducers (polyCMUTs) for conformal sonography. Diss. University of British Columbia, 2024. (Year: 2024).
[cited by examiner]
Wang M et al.: “A photoacoustic imager with infrared illumination through the CMUT chip”, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2011); Beijing, China; Jun. 5-9, …
[cited by applicant]
Oralkan, O. et al. Capacitive micromachined ultrasonic transducers: Next-generation arrays for acoustic imaging? Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on 49, 1596-1610 (2002).
[cited by applicant]
S. Ergun, Y. Huang, X. Zhuang, O. Oralkan, G. G. Yarahoglu, and B. T. Khuri-Yakub, “Capacitive micromachined ultrasonic transducers: fabrication technology,” Ultrasonics, Ferroelectrics and Frequency Control, IEEE Trans…
[cited by applicant]
A. Bozkurt, I. Ladabaum, A. Atalar, and B. T. Khuri-Yakub, “Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers,” IEEE Transactions on Ultrasonics, Ferroelectrics, an…
[cited by applicant]
M. M. Chang, M. T. Deng, J. T. Gwo, J. D. Mai and E. Hsu, “Polymer-based Capacitive Micromachined Ultrasonic Transducers (CMUT) for Micro Surgical Imaging Applications,” 2006 1st IEEE International Conference on Nano/Mi…
[cited by applicant]
D.A. Hutchins, D.R. Billson, R.J. Bradley, K.S. Ho. Structural health monitoring using polymer-based capacitive micromachined ultrasonic transducers (CMUTs). Ultrasonics, vol. 51, No. 8, pp. 870-877, 2011.
[cited by applicant]
H. Lorenz, M. Despont, N. Fahrni, N. LaBianca, P. Renaud, and P. Vettiger, “SU-8: a low-cost negative resist for MEMS,” J. Micromech. Microeng., vol. 7, No. 3, p. 121, 1997.
[cited by applicant]
C. Liu, “Recent Developments in Polymer MEMS,” Adv. Mater., vol. 19, No. 22, pp. 3783-3790, Nov. 2007.
[cited by applicant]
Y. P. Li, C. D. He, J. T. Zhang, J. L. Song, W. D. Zhang, and C. Y. Xue, “Design and Analysis of Capacitive Micromachined Ultrasonic Transducers Based on SU-8,” Key Engineering Materials, vol. 645-646, pp. 577-582, May …
[cited by applicant]
Joseph, J., Singh, S. G. & Vanjari, S. R. K. Fabrication of SU-8 based Capacitive Micromachined Ultrasonic Transducer for low frequency therapeutic applications. in 2015 37th Annual International Conference of the IEEE …
[cited by applicant]
Chiou, D.-Y., Chen, M.-Y., Chang, M.-W. & Deng, H.-C. Finite element modeling, characterization, and optimization design for the polymer-typed capacitive micro-arrayed ultrasonic transducer. Microsyst Technol 14, 787-79…
[cited by applicant]
C. F. Dalziel, “Electric shock hazard,” IEEE Spectrum, vol. 9, No. 2, pp. 41-50, Feb. 1972.
[cited by applicant]
Li, Z., Ilkhechi, A. K., Ceroici, C. & Zemp, R. Transparent capacitive micromachined ultrasonic transducer (CMUT) arrays for real-time photoacoustic applications. Opt. Express, OE 27, 13204-13218 (2019).
[cited by applicant]
A. Gefen and B. Dilmoney, “Mechanics of the normal woman's breast,” THC, vol. 15, No. 4, pp. 259-271, Jul. 2007.
[cited by applicant]