Differential gas sensor with two sensor components and use for detection of gases
A differential gas sensor includes a first sensor component to selectively detect a first gas present in the environment and to supply a first output signal, a second sensor component configured to supply a second output signal, and a circuit configured to determine a difference between the first output signal and the second output signal.
1 . A differential gas sensor, comprising:
a first sensor component configured to selectively detect a first gas present in the environment and to supply a first output signal, wherein the first sensor component comprises:
a functional layer;
an electrode;
a first cavity interposed between the functional layer and the electrode, wherein the first cavity is free of a solid material, and wherein the first cavity is configured to accept the first gas; and
a polysilicon layer interposed between the functional layer and the first cavity, wherein the functional layer covers a first through opening in the polysilicon layer;
a second sensor component configured to supply a second output signal; and
a circuit configured to determine a difference between the first output signal and the second output signal.
2 . The differential gas sensor as claimed in claim 1 , wherein
the first output signal is representative of a partial pressure of the first gas, and
the second output signal is representative of a total pressure of all further gases present in the environment.
3 . The differential gas sensor as claimed in claim 1 , wherein
the second output signal is representative of a total pressure of the first gas and all further gases present in the environment.
4 . The differential gas sensor as claimed in claim 1 , wherein
the second sensor component is configured to detect no gas, and the second output signal is a zero signal.
5 . The differential gas sensor as claimed in claim 1 , wherein
the functional layer interacts with the first gas.
6 . The differential gas sensor as claimed in claim 1 wherein
the functional layer is selectively permeable to the first gas and is arranged between the first cavity and the environment.
7 . The differential gas sensor as claimed in claim 1 , wherein
a material of the functional layer is selectively permeable to the first gas.
8 . The differential gas sensor as claimed in claim 1 , wherein
the functional layer contains a material comprising one or more elements from a group containing graphene, a metal, a thin metal layer, Pd, Ni, Ti, PTFE, and PMMA.
9 . The differential gas sensor as claimed in claim 1 , wherein
a material of the functional layer is selectively permeable to hydrogen or helium.
10 . The differential gas sensor as claimed in claim 9 , wherein
the functional layer has second through openings for selective passage of the first gas.
11 . The differential gas sensor as claimed in claim 1 , wherein
a sensor element is arranged in the first cavity.
12 . The differential gas sensor as claimed in claim 11 , wherein
the functional layer is part of the sensor element.
13 . The differential gas sensor as claimed in claim 11 , wherein
the sensor element comprises a microelectromechanical sensor (MEMS).
14 . The differential gas sensor as claimed in claim 11 , wherein
the sensor element comprises one or more elements from a group containing a pressure sensor, a thermal conductivity sensor, a speed of sound sensor, a pellistor, a catalytic sensor, a gas-selective sensor, a non-gas-selective sensor, an inductive sensor, a capacitive sensor, a resistive sensor, an optical sensor, or a magnetic sensor.
15 . The differential gas sensor as claimed in claim 1 , wherein
the functional layer comprises a plurality of second through openings.
16 . The differential gas sensor as claimed in claim 1 , wherein
the functional layer comprises a plurality of regularly and laterally arranged portions.
17 . The differential gas sensor as claimed in claim 1 , wherein
the functional layer is configured in such a way that it experiences a change in volume upon contact with the first gas.
18 . The differential gas sensor as claimed in claim 17 , wherein
the functional layer is fitted outside on a wall of the first cavity and pressing of the wall into the first cavity can be detected.
19 . A method of detecting hydrogen, the method comprising utilizing the differential gas sensor of claim 1 .
20 . The method of claim 19 , wherein hydrogen is detected in a container, or in lines in which gaseous hydrogen is stored or transported.
21 . A method of detecting hydrogen outside of a fuel cell, the method comprising utilizing the differential gas sensor of claim 1 .
22 . The method of claim 21 , wherein
the differential gas sensor is fitted at an inlet opening and/or an outlet opening of the fuel cell.
23 . A method of detecting hydrogen in a passenger compartment of a motor vehicle operated with a fuel cell, the method comprising utilizing the differential gas sensor of claim 1 .
24 . A method for leak detection of hydrogen, the method comprising utilizing the differential gas sensor of claim 1 .