IP Library › Granted Patent US 12,532,526
Granted Patent B2
US 12,532,526 · App. 17/821,209 · Granted Jan 20, 2026

Metallic sealants in transistor arrangements

Inventors: Abhishek A. Sharma (Hillsboro, OR); Tahir Ghani (Portland, OR); Jack T. Kavalieros (Portland, OR); Gilbert W. Dewey (Beaverton, OR); Van H. Le (Beaverton, OR); Lawrence D. Wong (Beaverton, OR); Christopher J. Jezewski (Portland, OR)
Assignee: Intel Corporation
H10D64/251H01L23/293H10D30/60H10D30/673H10D30/6739H10D30/6755H10D64/62H10D99/00H10D62/80H10D62/86H10D62/871
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Quick Facts
Patent No.
US 12,532,526
App. No.
17/821,209
Granted
Jan 20, 2026
Kind
B2
Abstract

Disclosed herein are transistor electrode-channel arrangements, and related methods and devices. For example, in some embodiments, a transistor electrode-channel arrangement may include a channel material, source/drain electrodes provided over the channel material, and a sealant at least partially enclosing one or more of the source/drain electrodes, wherein the sealant includes one or more metallic conductive materials.

Claims (40)

1 . An integrated circuit (IC) device, comprising:

a semiconductor material;

a transistor comprising an electrode and a gate stack, wherein the electrode is a source electrode or a drain electrode of the transistor, and wherein the gate stack includes a gate dielectric and a gate electrode material; and

a sealant, wherein at least 80% of the sealant is amorphous, and wherein the electrode is between the semiconductor material and at least a portion of the sealant.

2 . The IC device according to claim 1 , wherein a hydrogen permeability coefficient of the sealant is above 10 −4 mole per millisecond Pascal.

3 . The IC device according to claim 1 , wherein the sealant includes one or more metallic conductive materials.

4 . The IC device according to claim 1 , wherein the sealant is over at least one sidewall of the electrode.

5 . The IC device according to claim 1 , wherein the sealant wraps around at least a portion of the electrode.

6 . The IC device according to claim 1 , wherein the sealant has a thickness between 0.5 and 100 nanometers.

7 . The IC device according to claim 1 , wherein the semiconductor material is a thin-film semiconductor material.

8 . The IC device according to claim 1 , wherein:

the IC device is a computing device that includes an IC die, and

the IC die includes the semiconductor material, the electrode, and the sealant.

9 . The IC device according to claim 8 , wherein the computing device is a wearable or handheld computing device.

10 . The IC device according to claim 8 , wherein the computing device further includes one or more communication chips and an antenna.

11 . An integrated circuit (IC) device, comprising:

a transistor comprising a region, wherein the region is either a source region or a drain region of the transistor;

an electrode coupled to the region;

a layer comprising two or more layers of different metallic conductive materials, wherein at least a portion of the layer is in physical contact with at least a portion of the electrode, and the layer includes an amorphous material; and

a semiconductor material, wherein the electrode is between the semiconductor material and at least a portion of the layer.

12 . The IC device according to claim 11 , wherein the layer has a thickness between 0.5 and 100 nanometers.

13 . The IC device according to claim 11 , wherein:

the IC device is an IC package that includes an IC die and a further component coupled to the IC die, and

the IC die includes the transistor, the electrode, and the layer.

14 . The IC device according to claim 13 , wherein the further component includes one of an interposer, a package substrate, a carrier substrate, a motherboard, or a further IC die.

15 . The IC device according to claim 13 , wherein the further component is coupled to the IC die by first-level interconnects.

16 . The IC device according to claim 11 , wherein the layer is over at least one sidewall of the electrode.

17 . The IC device according to claim 11 , wherein the transistor is a thin-film transistor.

18 . An integrated circuit (IC) device, comprising:

a transistor comprising an electrode and a gate stack, wherein the electrode is a source electrode or a drain electrode of the transistor, and wherein the gate stack includes a gate dielectric and a gate electrode material; and

a layer adjacent to the electrode, wherein at least 80 % of the layer is amorphous, at least a portion of the layer is in physical contact with at least a portion of the electrode, and the layer wraps around at least a portion of the electrode.

19 . The IC device according to claim 18 , wherein a hydrogen permeability coefficient of the layer is above 10 −4 mole per millisecond Pascal.

20 . The IC device according to claim 18 , wherein the layer includes one or more metallic conductive materials.

21 . The IC device according to claim 18 , further comprising:

a semiconductor material,

wherein the electrode is between the semiconductor material and at least a portion of the layer.

22 . The IC device according to claim 18 , wherein:

the IC device is an IC package that includes an IC die and a further component coupled to the IC die, and

the IC die includes the transistor and the layer.

23 . The IC device according to claim 22 , wherein the further component includes one of an interposer, a package substrate, a carrier substrate, a motherboard, or a further IC die.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 22, 2022
From: SHARMA, ABHISHEK A.; GHANI, TAHIR; KAVALIEROS, JACK T.; DEWEY, GILBERT; LE, VAN H.; WONG, LAWRENCE D.; JEZEWSKI, CHRISTOPHER J.
To: INTEL CORPORATION
Reel/Frame 060853/0712 →
Continuity (2)
Continuation 15899590 · Feb 20, 2018
Related Publication 20220406907A1 · Dec 22, 2022
References Cited (8)
US 6340963B1 · Anno · 2002 [cited by examiner]
US 11522059B2 · Sharma · 2022 [cited by examiner]
US 20030102475A1 · Kwon · 2003 [cited by examiner]
US 20100090309A1 · Rocklein · 2010 [cited by examiner]
US 20100163868A1 · Yamazaki · 2010 [cited by examiner]
US 20140197377A1 · Kim · 2014 [cited by examiner]
US 20140225106A1 · Lee · 2014 [cited by examiner]
US 20160197192A1 · Kang · 2016 [cited by examiner]