Semiconductor package and a method of manufacturing the semiconductor package
A semiconductor package including: a package substrate; a spacer chip attached on a surface of the package substrate, the spacer chip having a groove pattern in a surface of the spacer chip; at least one semiconductor chip mounted on the package substrate, the at least one semiconductor chip being attached on the surface of the spacer chip via an adhesive film; and a sealing member on the surface of the package substrate, the sealing member covering the spacer chip and the at least one semiconductor chip.
1. A semiconductor package, comprising:
a package substrate;
a spacer chip attached on a surface of the package substrate, the spacer chip having a groove pattern in a surface of the spacer chip;
at least one semiconductor chip mounted on the package substrate, the at least one semiconductor chip being attached on the surface of the spacer chip via an adhesive film; and
a sealing member on the surface of the package substrate, the sealing member covering the spacer chip and the at least one semiconductor chip, wherein the groove pattern includes a first groove extending in a first direction and a second groove extending in a second direction that intersects with the first direction.
2. The semiconductor package of claim 1 , wherein the groove pattern extends along a peripheral region of the spacer chip.
3. The semiconductor package of claim 1 , wherein the groove pattern includes two first grooves extending parallel with each other and two second grooves extending parallel with each other.
4. The semiconductor package of claim 3 , wherein one of the two first grooves is arranged adjacent to a first side surface of the spacer chip and the other of the two first grooves is arranged adjacent to a second side surface of the spacer chip opposite the first side surface, and
wherein one of the two second grooves is arranged adjacent to a third side surface of the spacer chip adjacent to the first side surface of the spacer chip and the other of the two second grooves is arranged adjacent to a fourth side surface of the spacer chip opposite the third side surface.
5. The semiconductor package of claim 1 , wherein a depth of the groove pattern is within a range of 30% to 70% of a thickness of the spacer chip.
6. The semiconductor package of claim 1 , wherein the adhesive film includes a die attach film.
7. The semiconductor package of claim 1 , wherein the spacer chip has a thickness of about 50 μm to about 800 μm.
8. The semiconductor package of claim 1 , wherein the spacer chip includes a silicon material.
9. A semiconductor package, comprising:
a package substrate having an upper surface and a lower surface opposite to each other, the package substrate having a plurality of substrate pads in the upper surface;
a first spacer chip arranged on the upper surface of the package substrate, the first spacer chip having a groove pattern in an upper surface of the first spacer chip;
at least one first semiconductor chip attached on the upper surface of the first spacer chip via an adhesive film;
first conductive connection members electrically connecting chip pads of the first semiconductor chip and the substrate pads; and
a sealing member on the upper surface of the package substrate, the sealing member covering the first spacer chip and the first semiconductor chip,
wherein a portion of the adhesive film is disposed in the groove pattern of the first spacer chip, and wherein the groove pattern includes a first groove extending in a first direction and a second groove extending in a second direction that intersects with the first direction.
10. The semiconductor package of claim 9 , further comprising:
a second spacer chip arranged between the package substrate and the first spacer chip.
11. The semiconductor package of claim 10 , wherein a planar area of the first spacer chip is greater than a planar area of the second spacer chip.
12. The semiconductor package of claim 10 , wherein the second spacer chip has no recess pattern in an upper surface thereof.
13. The semiconductor package of claim 9 , wherein the groove pattern extends along a peripheral region of the first spacer chip.
14. The semiconductor package of claim 9 , wherein the adhesive film includes a die attach film.
15. The semiconductor package of claim 9 , wherein the spacer chip has a thickness of about 50 μm to about 800 μm.
16. A semiconductor package, comprising:
a package substrate;
a first semiconductor chip attached on a surface of the package substrate and electrically connected to the package substrate by first conductive connection members;
a first spacer chip arranged on the surface of the package substrate and spaced apart from the first semiconductor chip;
a second spacer chip arranged on the first semiconductor chip and the first spacer chip, the second spacer chip having a groove pattern in an upper surface of the second spacer chip;
a second semiconductor chip attached on the upper surface of the second spacer chip via an adhesive film, the second semiconductor chip being electrically connected to the package substrate by second conductive connection members; and
a sealing member on the surface of the package substrate, the sealing member covering the first semiconductor chip, the first spacer chip, the second spacer chip and the second semiconductor chip,
wherein a portion of the adhesive film is disposed in the groove pattern of the second spacer chip.