Semiconductor device
View Patent ↗According to one embodiment, a semiconductor device includes first and second electrodes, first to third semiconductor regions a plurality of conductive parts, and a gate electrode. The first semiconductor region is located on the first electrode and electrically connected with the first electrode. The conductive parts are located in the first semiconductor region with insulating parts interposed. The second semiconductor region is located on a portion of the first semiconductor region. The third semiconductor region is located on a portion of the second semiconductor region. The gate electrode is located on the second semiconductor region with a gate insulating layer interposed. The second electrode is located on the second and third semiconductor regions, and the gate electrode and electrically connected with the second and third semiconductor regions, and conductive parts.
1. A semiconductor device, comprising:
a first electrode;
a first semiconductor region located on the first electrode and electrically connected with the first electrode, the first semiconductor region being of a first conductivity type;
a plurality of conductive parts located in the first semiconductor region with insulating parts interposed, the plurality of conductive parts being arranged in a second direction and a third direction, the second direction being perpendicular to a first direction, the first direction being from the first electrode toward the first semiconductor region, the third direction being perpendicular to the first direction and crossing the second direction;
a second semiconductor region located on a portion of the first semiconductor region, the second semiconductor region being of a second conductivity type;
a third semiconductor region located on a portion of the second semiconductor region, the third semiconductor region being of the first conductivity type;
a gate electrode located on the second semiconductor region with a gate insulating layer interposed; and
a second electrode located on the second semiconductor region, the third semiconductor region, and the gate electrode and electrically connected with the second semiconductor region, the third semiconductor region, and the plurality of conductive parts.
2. The device according to claim 1 , wherein
a plurality of the second semiconductor regions and a plurality of the third semiconductor regions are arranged around one of the plurality of conductive parts in a first plane perpendicular to the first direction.
3. The device according to claim 2 , wherein
the first semiconductor region includes a first region arranged with the second semiconductor region in the first plane, and
the first region and the second semiconductor region are alternately arranged around the one of the plurality of conductive parts.
4. The device according to claim 1 , wherein
the plurality of conductive parts includes a pair of the conductive parts next to each other in the second direction,
the gate electrode includes a first electrode portion, and
a position in the second direction of the first electrode portion is between a position in the second direction of one of the pair of conductive parts and a position in the second direction of the other of the pair of conductive parts.
5. The device according to claim 4 , wherein
the first electrode portion extends in an extension direction crossing a direction connecting the pair of conductive parts,
the gate electrode further includes a second electrode portion connected with one end of the first electrode portion in the extension direction, and
a position in the second direction of the second electrode portion is between the position of the one of the pair of conductive parts and the position of the first electrode portion.
6. The device according to claim 5 , wherein
the first electrode portion and the second electrode portion are positioned on the second semiconductor region with the gate insulating layer interposed.
7. The device according to claim 5 , wherein
the second electrode includes a first extension portion extending in the first direction through a region of a first plane perpendicular to the first direction,
the region is surrounded with the first electrode portion and a plurality of the second electrode portions, and
the first extension portion contacts the third semiconductor region.
8. The device according to claim 1 , wherein
the first semiconductor region includes:
a first region arranged with the second semiconductor region in a first plane perpendicular to the first direction; and
a second region positioned lower than the second semiconductor region, and
a first-conductivity-type impurity concentration of the first region is greater than a first-conductivity-type impurity concentration of the second region.