Radiation based patterning methods
Stabilized precursor solutions can be used to form radiation inorganic coating materials. The precursor solutions generally comprise metal suboxide cations, peroxide-based ligands and polyatomic anions. Design of the precursor solutions can be performed to achieve a high level of stability of the precursor solutions. The resulting coating materials can be designed for patterning with a selected radiation, such as ultraviolet light, x-ray radiation or electron beam radiation. The radiation patterned coating material can have a high contrast with respect to material properties, such that development of a latent image can be successful to form lines with very low line-width roughness and adjacent structures with a very small pitch.
1. An article comprising:
a substrate comprising a semiconductor wafer; and
a film on a surface of the substrate, wherein the film is composed of a first material comprising metal ions with radiation sensitive ligands and wherein the film has a thickness in a range from about 1 nm to about 40 nm,
wherein exposure of the film to EUV radiation breaks at least some of the bonds between the metal ions and the radiation sensitive ligands in exposed regions of the film.
2. The article of claim 1 wherein the breaking of at least some of the bonds results in differential dissolution rates between exposed and un-exposed regions of the film.
3. The article of claim 1 wherein following exposure the exposed regions of the film condense.
4. The article of claim 3 wherein the exposed regions of the film comprises a metal oxide.
5. The article of claim 1 wherein following exposure the exposed regions of the film are resistant to removal with a developer composition.
6. The article of claim 1 wherein the exposed film has differential dissolution rates with a reactive gas or a liquid solution.
7. The article of claim 1 wherein the exposed film has differential dissolution rates with an aqueous solvent.
8. The article of claim 1 wherein the exposed film has differential dissolution rates with a quaternary ammonium hydroxide.
9. The article of claim 1 wherein the exposed film has differential dissolution rates, wherein a contrast in the differential dissolution rates increases through heating of the exposed film.
10. The article of claim 1 wherein the exposed film has been further condensed by heating to temperatures from 45° C. to 150° C.
11. The article of claim 2 wherein the differential dissolution of the film can be effectively established with EUV radiation at a dose of no more than 100 mJ/cm 2 .
12. The article of claim 1 wherein the film comprises an oxo/hydroxo network.
13. The article of claim 1 wherein the metal of the metal ions comprises Cu, Al, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Zn, Y, Zr, Nb, Mo, In, Sn, Sb, Hf, Ta, W, Jr, Pt, La, Ce, Pr, Nb, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu or a combination thereof.
14. The article of claim 1 wherein the metal of the metal ions comprises Sn.
15. The article of claim 1 wherein the first material prior to irradiation comprises a blend of metal ions.
16. The article of claim 1 wherein the first material further comprises polyatomic anions.
17. The article of claim 1 having a radiation sensitive ligand to metal ion ratio of at least about 2.
18. The article of claim 1 wherein the semiconductor wafer is a single crystal silicon wafer.
19. The article of claim 1 wherein the film is composed of the first material over a patterned second material.